Air Bearing Stages In applications requiring extreme accuracy and stability, air bearings provide significant advantages over other types of guidance. Typically running against a lapped granite bearing surface, they provide a superbly smooth and effectively friction-free solution. When combined with linear motors and optical encoders, the result is a precise, reliable stage with high stiffness and zero maintenance. Q-Sys engineers have a great deal of experience of incorporating air bearings into single and multi-axis systems for individual requirements, with both the lift and guidance bearing surfaces in carefully designed granite structures. Repeatable precision is achieved by maintaining a constant air gap of just a few microns, using one of a number of pre-loading techniques depending on the specifics of the application. Metrology Inspection Supreme precision High reliability Heavy payloads Custom configurations www.q-sys.eu
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Air Bearing Stages - Q-Sys Bearings V1-1.pdf · Air Bearing Stages In applications requiring extreme accuracy and stability, air bearings provide significant advantages over other
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Air Bearing Stages
In applications requiring extreme accuracy and stability, air bearings provide
significant advantages over other types of guidance. Typically running against a
lapped granite bearing surface, they provide a superbly smooth and effectively
friction-free solution. When combined with linear motors and optical encoders, the
result is a precise, reliable stage with high stiffness and zero maintenance.
Unusually, this gantry beam assembly uses an extruded aluminium beam as the main support. The inkjet printing application required very low downtime combined with a demanding duty cycle so the reliability and maintenance free nature of air bearings was ideal.
This metrology bench uses vacuum pre-loaded bearings to maintain a constant air gap and to avoid introducing any local stress in the granite bearing surface.
This large format split axes platform uses a combination of granite base and granite slides with air bearings for both lift and guidance. The resulting system has superb stability and is used in a laser ablation tool for gen 6 display panel masters.