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300/sec Yaw Rate Gyro
ADXRS610
Rev. 0Information furnished by Analog Devices is believed to be accurate and reliable. However, noresponsibility is assumed by Analog Devices for its use, nor for any infringements of patents or otherrights of third parties that may result from its use. Specifications subject to change without notice. Nolicense is granted by implication or otherwise under any patent or patent rights of Analog Devices.Trademarks and registered trademarks are the property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.ATel: 781.329.4700 www.analog.comFax: 781.461.3113 2007 Analog Devices, Inc. All rights reserved
FEATURES
Complete rate gyroscope on a single chip
Z-axis (yaw rate) response
High vibration rejection over wide frequency
2000 g powered shock survivability
Ratiometric to referenced supply
5 V single-supply operation
105C operation
Self-test on digital command
Ultrasmall and light (< 0.15 cc, < 0.5 gram)
Temperature sensor output
RoHS compliant
APPLICATIONS
Vehicle chassis rollover sensing
Inertial measurement units
Platform stabilization
GENERAL DESCRIPTION
The ADXRS610 is a complete angular rate sensor (gyroscope)
that uses the Analog Devices, Inc. surface-micromachining
process to create a functionally complete and low cost angular
rate sensor integrated with all required electronics on one chip.
The manufacturing technique for this device is the same high
volume BiMOS process used for high reliability automotive
airbag accelerometers.
The output signal, RATEOUT (1B, 2A), is a voltage proportional
to angular rate about the axis normal to the top surface of the
package. The output is ratiometric with respect to a provided
reference supply. A single external resistor can be used to lower
the scale factor. An external capacitor sets the bandwidth. Otherexternal capacitors are required for operation.
A temperature output is provided for compensation techniques.
Two digital self-test inputs electromechanically excite the sensor
to test proper operation of both the sensor and the signal
conditioning circuits. The ADXRS610 is available in a 7 mm
7 mm 3 mm BGA ceramic package.
FUNCTIONAL BLOCK DIAGRAM
VDD
AGND
PGND
AVCC
ST2 ST1 TEMP VRATIO
CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT
DEMOD
180k 1%
22nF
100nF
22nF
100nF
100nF
100nF
DRIVEAMP
MECHANICALSENSOR
CHARGE PUMPAND VOLTAGEREGULATOR
COUT
+5V
+5V
+5V(ADC REF)
ACAMP
VGA
25k@ 25C
ADXRS610
25kSELF-TEST
06520-001
Figure 1.
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TABLE OF CONTENTS
Features.............................................................................................. 1Applications....................................................................................... 1General Description......................................................................... 1
Functional Block Diagram .............................................................. 1Revision History ............................................................................... 2Specifications..................................................................................... 3Absolute Maximum Ratings............................................................ 4
Rate Sensitive Axis ....................................................................... 4ESD Caution.................................................................................. 4
Pin Configuration and Function Descriptions............................. 5Typical Performance Characteristics ............................................. 6
Theory of Operation.........................................................................9Setting Bandwidth.........................................................................9Temperature Output and Calibration.........................................9
Calibrated Performance................................................................9ADXRS610 and Supply Ratiometricity ................................... 10Null Adjustment......................................................................... 10Self-Test Function ...................................................................... 10Continuous Self-Test.................................................................. 10
Outline Dimensions....................................................................... 11Ordering Guide .......................................................................... 11
REVISION HISTORY
4/07Revision 0: Initial Version
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SPECIFICATIONS
All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.
TA = 40C to +105C, VS = AVCC = VDD = 5 V, VRATIO = AVCC, angular rate = 0/sec, bandwidth = 80 Hz (COUT = 0.01 F),
IOUT = 100 A, 1g, unless otherwise noted.
Table 1.
ADXRS610BBGZ
Parameter Conditions Min Typ Max Unit
SENSITIVITY1 Clockwise rotation is positive output
Measurement Range2 Full-scale range over specifications range 300 /sec
Initial and Over Temperature 40C to +105C 5.52 6 6.48 mV//sec
Temperature Drift3 2 %
Nonlinearity Best fit straight line 0.1 % of FS
NULL1
Null 40C to +105C 2.2 2.5 2.8 V
Linear Acceleration Effect Any axis 0.1 /sec/g
NOISE PERFORMANCERate Noise Density TA 25C 0.05 /sec/HzFREQUENCY RESPONSE
Bandwidth4 0.01 2500 Hz
Sensor Resonant Frequency 12 14.5 17 kHz
SELF TEST1
ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 650 450 250 mV
ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 250 450 650 mV
ST1 to ST2 Mismatch 5 5 +5 %
Logic 1 Input Voltage 3.3 V
Logic 0 Input Voltage 1.7 V
Input Impedance To common 40 50 100 k
TEMPERATURE SENSOR1
VOUT at 25C Load = 10 M 2.35 2.5 2.65 VScale Factor6 @25C, VRATIO = 5 V 9 mV/C
Load to VS 25 k
Load to Common 25 k
TURN-ON TIME Power on to /sec of final 50 ms
OUTPUT DRIVE CAPABILITY
Current Drive For rated specifications 200 A
Capacitive Load Drive 1000 pF
POWER SUPPLY
Operating Voltage (VS) 4.75 5.00 5.25 V
Quiescent Supply Current 3.5 4.5 mA
TEMPERATURE RANGE
Specified Performance40 +105 C
1 Parameter is linearly ratiometric with VRATIO.2 The maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies.3 From +25C to 40C or +25C to 105C.4 Adjusted by external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not reduce noise further.5 Self-test mismatch is described as (ST2 + ST1)/((ST2 ST1)/2).6 For a change in temperature from 25C to 26C. VTEMP is ratiometric to VRATIO. See the Tem section for more details.perature Output and Calibration
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ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter Rating
Acceleration (Any Axis, 0.5 ms)
Unpowered 2000 gPowered 2000 g
VDD, AVCC 0.3 V to +6.0 V
VRATIO AVCC
ST1, ST2 AVCC
Output Short-Circuit Duration(Any Pin to Common)
Indefinite
Operating Temperature Range 55C to +125C
Storage Temperature Range 65C to +150C
Stresses above those listed under the Absolute Maximum
Ratings may cause permanent damage to the device. This is a
stress rating only; functional operation of the device at these or
any other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
Drops onto hard surfaces can cause shocks of greater than
2000gand can exceed the absolute maximum rating of the
device. Exercise care during handling to avoid damage.
RATE SENSITIVE AXIS
The ADXRS610 is a Z-axis rate-sensing device (also called a
yaw rate sensing device). It produces a positive going output
voltage for clockwise rotation about the axis normal to thepackage top, that is, clockwise when looking down at the
package lid.
RATE
AXIS
LONGITUDINAL
AXIS
LATERAL AXIS
+
A B C D G1
7
E FA1
RATE OUT
RATE IN
4.75V
0.25V
VCC = 5V
VRATIO/24.75
VRATIO/2
06520-002
GND
Figure 2. RATEOUT Signal Increases with Clockwise Rotation
ESD CAUTION
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PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
`
PGND
ST1
ST2
TEMP
AGNDVRATIO NC SUMJ
RATEOUT
AVCC
CP2
CP1
CP4CP3CP5VDD
G F E D C B A
7
6
5
4
3
2
1
06520-023
Figure 3. Pin Configuration
Table 4. Pin Function Descriptions
Pin No. Mnemonic Description
6D, 7D CP5 HV Filter Capacitor (0.1 F).
6A, 7B CP4 Charge Pump Capacitor (22 nF).
6C, 7C CP3 Charge Pump Capacitor (22 nF).
5A, 5B CP1
4A, 4B CP2
Charge Pump Capacitor (22 nF).
Charge Pump Capacitor (22 nF).
3A, 3B AVCC Positive Analog Supply.
1B, 2A RATEOUT Rate Signal Output.
1C, 2C SUMJ Output Amp Summing Junction.
1D, 2D NC No Connect.
1E, 2E VRATIO Reference Supply for Ratiometric Output.
1F, 2G AGND Analog Supply Return.3F, 3G TEMP Temperature Voltage Output.
4F, 4G ST2 Self-Test for Sensor 2.
5F, 5G ST1 Self-Test for Sensor 1.
6G, 7F PGND Charge Pump Supply Return.
6E, 7E VDD Positive Charge Pump Supply.
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TYPICAL PERFORMANCE CHARACTERISTICS
N > 1000 for all typical performance plots, unless otherwise noted.
16
0
2
4
6
8
10
12
14
2.26
2.30
2.34
2.38
2.42
2.50
2.46
2.54
2.58
2.62
2.66
2.70
2.74
%O
FPOPULATION
VOLTS065
20-003
Figure 4. Null Output at 25C (VRATIO = 5 V)
25
0
5
10
15
20
0.30
0.25
0.20
0.15
0.10 0
0.05
0.05
0.10
0.15
0.20
0.25
0.30
%O
FPOPULATION
(/sec/C)06520-004
Figure 5. Null Drift over Temperature (VRATIO = 5 V)
30
0
5
10
15
20
25
5.3 5.4 5.5 5.6 5.7 5.8 5.9 6.0 6.1 6.2 6.3 6.4 6.5 6.6 6.7
%O
FP
OPULATION
(mV//sec)06520-005
Figure 6. Sensitivity at 25C (VRATIO = 5 V)
25
0
5
10
15
20
7 5 4 6 3 2 1 0 1 2 3 4 5 6 7
%O
FPOPULATION
% DRIFT 06520-006
Figure 7. Sensitivity Drift over Temperature
45
40
35
30
25
0
5
10
15
20
570 530 490 450 370 410 330
%O
FPOPULATION
(mV)06520-007
Figure 8. ST1 Output Change at 25C (VRATIO = 5 V)
45
40
35
30
25
0
5
10
15
20
330 370 390350 410 430 450 470 510 530490 550 570
%O
F
POPULATION
(mV)06520-008
Figure 9. ST2 Output Change at 25C (VRATIO = 5 V)
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50
45
40
35
30
25
0
5
10
15
20
5 4 3 2 1 1 2 3 4 50
%O
FPOPU
LATION
% MISMATCH06520-009
Figure 10. Self-Test Mismatch at 25C (VRATIO = 5 V)
600
400
200
0
600
400
200
40 20 0 20 40 80 100 12060
(mV)
TEMPERATURE (C)
ST1
ST2
06520-010
Figure 11. Typical Self-Test Change over Temperature
40
35
30
25
0
5
10
15
20
3.0 3 .1 3 .2 3 .3 3.4 3 .5 3.7 3 .8 3 .9 4 .0 4 .13.6
%O
FPOPULATION
(mA)06520-01
1
Figure 12. Current Consumption at 25C (VRATIO = 5 V)
40
35
30
25
0
5
10
15
20
2.40 2.42 2.44 2.46 2.48 2.50 2.54 2.56 2.58 2.602.52
%O
FPOPU
LATION
VOLTS06520-012
Figure 13. VTEMPOutput at 25C (VRATIO = 5 V)
3.3
3.1
2.9
2.7
1.5
2.1
1.9
1.7
2.3
2.5
40 20 0 20 40 60 100 12080
VOLTS
TEMPERATURE (C)
256 PARTS
06520-013
Figure 14. VTEMPOutput over Temperature (VRATIO = 5 V)
60
50
30
40
10
20
20
10
0
750 770 810 830 850790
g
OR/sec
TIME (ms)
Y
REF
X
+45
45
06520-014
Figure 15. g and g g Sensitivity for a 50 g, 10 ms Pulse
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1.6
0100 10k
(Hz)
(/sec
)
1k
1.4
1.2
1.0
0.8
0.4
0.2
0.6
LONG
LAT
RATE
06520-015
Figure 16. Typical Response to 10 g Sinusoidal Vibration(Sensor Bandwidth = 2 kHz)
400
300
200
100
0
100
200
300
4000 250150100 20050
(ms)
(/sec)
DUT1 OFFSET BY +200/sec
DUT2 OFFSET BY 200/sec
06520-016
Figure 17. Typical High g (2500 g) Shock Response(Sensor Bandwidth = 40 Hz)
1
0.1
0.01
0.0010.01 0.1 100k10k1k100101
AVERAGE TIME (Seconds)
(/secrms)
06520-017
Figure 18. Typical Root Allan Deviation at 25C vs. Averaging Time
0.10
0.05
0
0.05
0.100 14012010080604020
TIME (Hours)
(/sec
)
06520-018
Figure 19. Typical Shift in 90 sec Null Averages Accumulatedover 140 Hours
0.10
0.05
0
0.05
0.100 360018001200 30002400600
TIME (Seconds)
(/sec)
06520-019
Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz)
0.1
0.001
0.01
0.000110 100k1k100
(Hz)
(/sec/Hzrms)
10k
06520-020
Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)
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THEORY OF OPERATION
The ADXRS610 operates on the principle of a resonator gyro.
Two polysilicon sensing structures each contain a dither frame
that is electrostatically driven to resonance, producing the
necessary velocity element to produce a Coriolis force during
angular rate. At two of the outer extremes of each frame,
orthogonal to the dither motion, are movable fingers that are
placed between fixed pickoff fingers to form a capacitive pickoff
structure that senses Coriolis motion. The resulting signal is fed
to a series of gain and demodulation stages that produce the
electrical rate signal output. The dual-sensor design rejects
externalg-forces and vibration. Fabricating the sensor with the
signal conditioning electronics preserves signal integrity in
noisy environments.
The electrostatic resonator requires 18 V to 20 V for operation.
Because only 5 V are typically available in most applications, a
charge pump is included on-chip. If an external 18 V to 20 V
supply is available, the two capacitors on CP1 through CP4 can
be omitted and this supply can be connected to CP5 (Pin 6D,
Pin 7D). Note that CP5 should not be grounded when power is
applied to the ADXRS610. Although no damage occurs, under
certain conditions the charge pump may fail to start up after the
ground is removed without first removing power from the
ADXRS610.
SETTING BANDWIDTH
External Capacitor COUT is used in combination with the on-
chip ROUT resistor to create a low-pass filter to limit the
bandwidth of the ADXRS610 rate response. The 3 dB
frequency set by ROUT and COUT is
( )OUTOUTUTO CR
f
=
2
1
and can be well controlled because ROUT has been trimmed
during manufacturing to be 180 k 1%. Any external resistor
applied between the RATEOUT pin (1B, 2A) and SUMJ pin
(1C, 2C) results in
( )EXTEXT
UTO R
RR
+
=
k180
k180
In general, an additional hardware or software filter is added to
attenuate high frequency noise arising from demodulationspikes at the gyros 14 kHz resonant frequency (the noise spikes
at 14 kHz can be clearly seen in the power spectral density
curve shown in Figure 21). Typically, this additional filters
corner frequency is set to greater than 5 the required
bandwidth to preserve good phase response.
Figure 22 shows the effect of adding a 250 Hz filter to the
output of an ADXRS610 set to 40 Hz bandwidth (as shown in
Figure 21). High frequency demodulation artifacts are
attenuated by approximately 18 dB.
0.1
0.01
0.000001
0.00001
0.0001
0.001
10 100k1k100
(Hz)
(/sec/Hzrms)
10k
06520-021
Figure 22. Noise Spectral Density with Additional 250 Hz Filter
TEMPERATURE OUTPUT AND CALIBRATION
It is common practice to temperature-calibrate gyros to improve
their overall accuracy. The ADXRS610 has a temperature propor-
tional voltage output that provides input to such a calibration
method. The temperature sensor structure is shown in Figure
23. The temperature output is characteristically nonlinear, and
any load resistance connected to the TEMP output results in
decreasing the TEMP output and temperature coefficient.
Therefore, buffering the output is recommended.
The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at
25C, and VRATIO = 5 V. The temperature coefficient is ~9 mV/C
at 25C. Although the TEMP output is highly repeatable, it has
only modest absolute accuracy.VRATIO VTEMP
RFIXED RTEMP06520-022
Figure 23. ADXRS610 Temperature Sensor Structure
CALIBRATED PERFORMANCE
Using a 3-point calibration technique, it is possible to calibrate
the null and sensitivity drift of the ADXRS610 to an overall
accuracy of nearly 200/hour. An overall accuracy of 40/hour
or better is possible using more points.
Limiting the bandwidth of the device reduces the flat-band
noise during the calibration process, improving themeasurement accuracy at each calibration point.
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ADXRS610 AND SUPPLY RATIOMETRICITY
The ADXRS610 RATEOUT and TEMP signals are ratiometric
to the VRATIO voltage, that is, the null voltage, rate sensitivity, and
temperature outputs are proportional to VRATIO. Thus, the
ADXRS610 is most easily used with a supply-ratiometric ADC
that results in self-cancellation of errors due to minor supplyvariations. There is some small error due to nonratiometric
behavior. Typical ratiometricity error for null, sensitivity, self-
test, and temperature output is outlined in Table 3.
Note that VRATIO must never be greater than AVCC.
Table 3. Ratiometricity Error for Various Parameters
Parameter VS = VRATIO = 4.75 V VS = VRATIO = 5.25 V
ST1
Mean 0.4% 0.3%
Sigma 0.6% 0.6%
ST2
Mean 0.4% 0.3%Sigma 0.6% 0.6%
Null
Mean 0.04% 0.02%
Sigma 0.3% 0.2%
Sensitivity
Mean 0.03% 0.1%
Sigma 0.1% 0.1%
VTEMP
Mean 0.3% 0.5%
Sigma 0.1% 0.1%
NULL ADJUSTMENT
The nominal 2.5 V null is for a symmetrical swing range at
RATEOUT (1B, 2A). However, a nonsymmetrical output swing
may be suitable in some applications. Null adjustment is
possible by injecting a suitable current to SUMJ (1C, 2C). Note
that supply disturbances may reflect some null instability.
Digital supply noise should be avoided particularly in this case.
SELF-TEST FUNCTION
The ADXRS610 includes a self-test feature that actuates each of
the sensing structures and associated electronics as if subjected
to angular rate. It is activated by standard logic high levels
applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1
causes the voltage at RATEOUT to change about 0.5 V, and
ST2 causes an opposite change of +0.5 V. The self-test response
follows the viscosity temperature dependence of the package
atmosphere, approximately 0.25%/C.
Activating both ST1 and ST2 simultaneously is not damaging.
ST1 and ST2 are fairly closely matched (5%), but actuating
both simultaneously may result in a small apparent null bias
shift proportional to the degree of self-test mismatch.
ST1 and ST2 are activated by applying a voltage equal to VRATIO
to the ST1 and ST2 pins. The voltage applied to ST1 and ST2
must never be greater than AVCC.
CONTINUOUS SELF-TEST
The on-chip integration of the ADXRS610 gives it higher reliability
than is obtainable with any other high volume manufacturing
method. In addition, it is manufactured under a mature BiMOS
process with field-proven reliability. As an additional failure
detection measure, a power-on self-test can be performed.
However, some applications may warrant continuous self-test
while sensing rate. Details outlining continuous self-test
techniques are also available in a separate application note.
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OUTLINE DIMENSIONS
A
B
C
D
E
F
G
BOTTOM
VIEW
7 6 5 4 3
TOP VIEW
3.80 MAX
0.80 BSC(BALL PITCH)
DETAIL A
BALL DIAMETER
0.60
0.550.50
0.60
0.25
7.05
6.85 SQ
6.70
COPLANARITY0.15
2 1
*A1 CORNERINDEX AREA
DETAIL A
A1 BALL PAD
INDICATOR
SEATING
PLANE
4.80BSC SQ
3.30 MAX
2.50 MIN
*BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED
TO THE D/A PAD INTERNALLY VIA HOLES. 060506-A
Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA](BG-32-3)
Dimensions shown in millimeters
ORDERING GUIDEModel Temperature Range Package Description Package Option
ADXRS610BBGZ1 40C to +105C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3
ADXRS610BBGZ-RL1 40C to +105C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-31 Z = RoHS Compliant Part.
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NOTES
2007 Analog Devices, Inc. All rights reserved. Trademarks andregistered trademarks are the property of their respective owners.
D06520-0-4/07(0)