Advisor: Prof. C.H. LiuUNIVERSAL CONCEPT FOR FABRICATING
ARBITRARY SHAPED IPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING
ACCURATELY CONTROLLED SURGICAL DEVICESReporter: sang-chung
yang()MEMS2007 Page:32Gou-Hua Feng and Ri-Hong ChenDepartment of
Mechanical Engineering, National Chung Cheng University
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IntroductionWorking
principleFabricationTestingResultsConclusions
Outline
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IntroductionRef: JiannJiann-Liang Chen MD, PhD Ref: Gou-Hua Feng
10cm0.5~1cm
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tNafionIPMCRef: Yung Yuen CORef: Gou-Hua Feng
IntroductionIPMC:Ionic polymer metal composites
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Working principleWorking principle of an IPMC transducer: (Left)
No voltage is applied. (Right) Voltage isapplied to cause IPMC
bending.Ref: Byungkyu Kim et al,2003 R:reaction forceE:youngs
modulusI:inertiamax:maximum deplacement at tipL:length of IPMC
V=0V=5
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FabricationIPMC fabrication method 1Process flow diagrams for
fabricatingIPMC transducers with MEMS parallel processing
spirit.
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IPMC fabrication method 2Fabrication process flow diagram for
the production of IPMC transducers Its different compare to
method1.Ref: Gou-Hua Feng et al, 2007 Fabrication2.Apply
Wax1.Substrate3.Deposit parylene-c4.Remove wax5.Pattern PR6.Spray
Nafion7.Remove parylene8.Deposit Pt9.Immersion into NaOH10.After 3
hours
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FabricationPhotograph of negative photoresist JSR-made micromold
array on bulk-micromachined SiN diaphragms.Photograph of diluted
Nafion solution sprayed to fill up the micromolds
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(Top) Individual devices of IPMC transducers with platinum
electrodes simultaneously formed on top and bottom surfaces.
(Bottom right) Cross-sectional view of the device with a clear edge
that no short-circuits occur. (Bottom left) A newly developed
device with varied thicknessFabrication
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TestingExperimental setup for measuring displacement of actuated
IPMC transducers.Experimental setup for measuring force output of
the device with a high-resolution (0.01 mN) electronic balance.
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Relationship between the displacement and frequency.Results
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ResultsResults of instantaneous maximum output force vs. applied
voltage for 0.5, 1, and 1.5 Hz.
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Demonstration of the IPMC transducer gripping a flexible tube
(Left: Front view; Bottom right: side view).Results
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IPMC ?IPMC IPMC
Conclusions
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IntroductionRef: Ref: Byungkyu Kim et al,2003
0.01mN