adixen's Maglev Turbomolecular Pumps ATH M Series RANGE FROM 500 TO 3200 l/s MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS MAINTENANCE-FREE BEARINGS, HIGH-PERFORMANCE TURBO MOLECULARPUMPS ----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- • Automatic balancing systm for 5-axis magnetic bearing control • Built-in 75°C heating system for corrosive applications • Pump protection with inert gas purge system • Maintenance free magnetically levitated bearings HIGH THROUGHPUT APPLICATIONS ----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- • ATH and ATP maglev series are designed for high pressure and high throughput pumping applications • Optimized for Semicondcutor industry for harsh processes • High flow capacity for large substrate industry such as flat panel display and photovoltaic panel manufacturing industry COMPACT AND PERFORMANT ----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- • On board controler and rack controler for all installation needs • Adjustable rotational speed for optimizing pumping parameters • Very high MTBF • Low cost of ownership • Low noise and vibration levels battery free ATH 500 M / ATH 1600 M / ATH 2300 M / ATH 2800 M / ATH 3200 M
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adixen's Maglev Turbomolecular PumpsATH M Series
RANGE FROM 500 TO 3200 l/s MAGNETICALLYLEVITATED TURBOMOLECULAR PUMPS
• Automatic balancing systm for 5-axismagnetic bearing control
• Built-in 75°C heating system forcorrosive applications
• Pump protection with inert gaspurge system
• Maintenance free magneticallylevitated bearings
HIGH THROUGHPUTAPPLICATIONS-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
• ATH and ATP maglev series aredesigned for high pressure and highthroughput pumping applications
• Optimized for Semicondcutorindustry for harsh processes
• High flow capacity for largesubstrate industry such as flat paneldisplay and photovoltaic panelmanufacturing industry
48 VDC 200-240V 100-240V 200-240V - 50/60Hz - Single Phase
N/A 8.7 (19) 8 (18) 8.7 (19)
560 (100) 650 (300) 1000 (350) 1000 (400)
Integrated yes yes no
ATH 500 M ATH 500 MT ATH 1603 M ATH 1600 MT ATH 2303 M ATH 2300 MT ATH 2800 M ATH 2800 MT ATH 3200 M ATH 3200 MT
* Depends on external conditions of water temperature, water flow, environment temperature** Exhaust pressure limit without flow speed loss. Depends on certain external conditions.
• Coating industry- Glass coating- Thin film depositions- Hard disk manufacture