AD898 Overhaul Part III_Rev C

AD898 Overhaul Manual-Part III

REFERENCE : M164-O3 REVISION : C

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Copyright 2007 ASM Assembly Automation Ltd. All Rights Reserved.

THE INFORMATION HEREIN IS SUBJECT TO CHANGE WITHOUT PRIOR NOTICE

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OVERHAUL MANUAL

AD898 AUTOMATIC DIE BONDER

Part III

Module Assembly


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ASM Office (Worldwide)

全球業務及維修心

Should you have any inquiry about machine setup/operation, please contact the ASM office nearest to your area for assistance. 若任何關機器的設定或操作的查詢，請與你所在最近的 ASM辨事處聯絡。 Hong Kong 香港 ASM ASSEMBLY AUTOMATION LTD 4/F Watson Centre, 16 Kung Yip Street Kwai Chung, Hong Kong 先進動器材限公司香港葵涌工業街 16 號屈臣氏心 4 樓 Tel : 852-2619 2000 Fax : 852-2619 2118/9 China 國

ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD 2/F, No.55 Qing Yun Road, Shanghai Zhangjiang Hi-Tech Park, Shanghai, China Post Code: 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467 先域微電子技術服務(海)限公司

上海市張江高科技園區青雲路 55 號二層

郵編 : 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Suzhou Branch Office Block A, #05-03/06, No.5 Xing Han Street, Suzhou Industrial Park, Suzhou, China Post Code: 215021 先域微電子技術服務(海)限公司

蘇州分公司

蘇州市蘇州工業園星漢街五號 A幢 05-03/06 室郵編 : 215021 Tel : 0512-67626278 Fax: 0512- 67626378 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Shenzhen Branch Office 7/F, Asia Light Building, West Wing No. 8, TaiRan Road 8, Block 503 TaiRan Industry & Commerce Zone, Chegong Temple FuTian District, Shenzhen, China 先域微電子技術服務(海)限公司國深圳市福田區車公廟泰然工貿園泰然 8路 8 號 503 棟亞芳大廈 7 樓西翼郵編 : 518040 Tel : 86-755-8344 6365 Fax : 86-755-8344 6245 ASM MICROELECTRONICS TECHNICAL SERVICES(SHANGHAI) CO.,LTD DONG GUAN OFFICE Zhang Mu Tou Town, Dong Guan City, China 先域微電子技術服務(海)限公司東莞辦事處國東莞市樟頭鎮東深公路大道泰安廣場 A 棟㆕樓 A9,A10,A11 電話: 86-769-7125600, 傳真: 86-769-7125601

Taiwan 台灣 ASM ASSEMBLY AUTOMATION (TAIWAN) BRANCH 香港商先導動器材限公司 10F, No. 530, Sec.2, Chung Shan Road Chung Ho City, Taipei Hsien Taiwan, R.O.C. 台北分公司台北縣和市山路 2 段 530 號 10F Tel : 886-2-2227 3388 Fax : 886-2-2227 3399 No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung Taiwan, R.O.C. 高雄分公司高雄市 811 楠梓加工出口區東㆔街 4-2 號 Tel : 886-7-367 6300 Fax : 886-7-367 6399 2/F, No. 9, Lane 379, Sec 1 Ching Kuo Road Hsin-Chu, Taiwan, R.O.C. 新竹分公司新竹市 300 經國路 ㆒段 379 巷 9 號 2 樓 Tel : 886-3-543 1500 Fax : 886-3-543 1555 台分公司 8F-1, NO. 135, Sec 2 Chung-Shan Rd, Tantzu Taichung, Taiwan R.O.C. Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 Europe 歐洲 ASM ASSEMBLY PRODUCTS B.V. Jan van Eycklaan 10 3723 BC Bilthoven The Netherlands Tel : 31-30-229 8411 Fax : 31-30-225 0584 U.S.A. 美國 ASM PACIFIC ASSEMBLY PRODUCTS INC. 3440 East University Drive, Phoenix Arizona 85034-7200, U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 West Regional Office 97 East Brokaw Road, Suite 100, San Jose California 95112-4209, U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808

Singapore 新加坡 ASM TECHNOLOGY SINGAPORE PTE LTD 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 Malaysia 馬來西亞 ASM ASSEMBLY EQUIPMENT MALAYSIA SDN. BHD. Bayan Point, Block A, No: 15-1-23 Medan Kampung Relau, 11900 Penang, Malaysia Tel : 60-4-644 9490 Fax : 60-4-645 1294 ASM MUAR 17 Tingkat Satu, Jalan Mulia Satu Taman Sri Mulia, Sungai Abong 84000, Muar, Johor, Malaysia Tel : 60-6-951 5713 Fax : 60-6-951 5786 Thailand 泰國 ASM ASSEMBLY EQUIPMENT BANGKOK LTD. 51/3, Vibhavadi Tower, 18/2 Floor Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 Japan 本 ASM ASSEMBLY TECHNOLOGY CO LTD 5F, Tachikawa F-Bldg, 1-7-18, Nishiki-cho Tachikawa-shi, Tokyo 196-0022, Japan Tel : 81-42-521-7751 Fax : 81-42-521-7750 Korea 韓國 ZEMOS KOREA INC./ ASM PACIFIC KOR LTD 3F, 628-6, Deung Chon Dong Kangseo Gu, Seoul, 157-030, Korea Tel : 82-2-538 5900 Fax : 82-2-561 5905 ASM PACIFIC KOR LTD. Rm501, 5F., Hi-Tech Center, 958-14 Daechon-dong, Buk-gu, Gwangju 500-470, KOREA Tel : 82-62-973 4174 Fax : 82-62-973 4216 Philippines 菲律賓 CAPITAL EQUIPMENT DISTRIBUTION LTD 2108 Prime Street Corner Enterprise Street Madrigal Business Park Alabang, Muntinlupa City Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547


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Table Of Contents

CHAPTER 1 INTRODUCTION....................................................................... 1-1 1.1 AD898 Main Module List .......................................................................................... 1-1 1.2 Overhaul Flowchart ................................................................................................. 1-2

CHAPTER 2 MODULE ASSEMBLY................................................................ 2-1 2.1 Bond Head Table .................................................................................................... 2-1

2.1.1 Bond Head Specification Check List ..................................................................................2-1 2.1.2 Bondhead Table Assembly.................................................................................................2-2

2.2 Bond Optic Table .................................................................................................. 2-10 2.2.1 Bond Optic table Specification Check List........................................................................2-10 2.2.2 Bond Optic Table Assembly..............................................................................................2-10

2.3 Workholder .......................................................................................................... 2-15 2.3.1 Workholder Specificaitons Check List ..............................................................................2-15 2.3.2 Workholder Assembly .......................................................................................................2-15

2.4 Epoxy Table ......................................................................................................... 2-27 2.4.1 Epoxy Writer Table Specification Check List....................................................................2-27 2.4.2 Epoxy Writer Assembly.....................................................................................................2-27

2.5 Ejector................................................................................................................. 2-32 2.5.1 Ejector Specification Check List .......................................................................................2-32 2.5.2 Multiple Ejector Assembly.................................................................................................2-32

2.6 Wafer Table ......................................................................................................... 2-42 2.6.1 Wafer Table Specification Check List ...............................................................................2-42 2.6.2 Wafer Table Assembly......................................................................................................2-42

2.7 Wafer Ring Assembly (8” Wafer Ring)..................................................................... 2-45 2.7.1 Wafer Ring Specifications Check List...............................................................................2-45 2.7.2 Wafer Ring Assembly .......................................................................................................2-45

2.8 Wafer Expander Assembly ..................................................................................... 2-48 2.8.1 Wafer Expander Specifications Check List.......................................................................2-48 2.8.2 8 inches wafer expander assembly procedures ...............................................................2-48

2.9 Leadframe Loader................................................................................................. 2-51 2.9.1 Leadframe Loader Specification Check List .....................................................................2-51 2.9.2 Leadframe Loader Assembly............................................................................................2-51

2.10 Stack Loader ........................................................................................................ 2-54

CHAPTER 3 TOOL LIST ............................................................................. 3-1

CHAPTER 4 GREASE AND LUBRICANT......................................................... 4-1 4.1 Tools for Preventive Maintenance ............................................................................. 4-2


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CHAPTER 5 LOCTITE AND WHERE TO USE .................................................. 5-2

CHAPTER 6 STANDARD LM GUIDE/CROSS ROLLER WAY ASSEMBLY .............. 6-2 6.1 Cross Roller Way..................................................................................................... 6-2 6.2 LM Guide ............................................................................................................... 6-5 6.3 A/C Bearing............................................................................................................ 6-7 6.4 Ballscrew ............................................................................................................... 6-9 6.5 Timing Belt........................................................................................................... 6-11 6.6 Coupling .............................................................................................................. 6-12

CHAPTER 7 VOICE COIL & LINEAR MOTOR RESISTANCE .............................. 7-1

CHAPTER 8 SCREW USAGES AND REQUIREMENTS ....................................... 8-1


Revision History Record

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Revision History Record

Revision Revision Description Amended Section

A Initial Release

B Add tools and grease/ oil pictures Ch3, Ch4 & Ch5

C Update the procedure and pictures on Ch2 and add voice coil and linear motor resistance on Ch7 Ch2 & Ch7

AD898 Overhaul Manual

Ch1 – Introduction

Part III 1-1

Chapter 1 Introduction Overhaul is a part of Machine Preventive Maintenance which refers to thorough examination followed by any necessary repairs. The need of overhaul mainly depends on machine utilization, requirements, operating condition and etc. In general, it could be done when the machine has been servicing for long time. It includes dismantle and assembly of main modules or the whole machine. This manual shows the overhaul procedures of main machine modules. 1.1 AD898 Main Module List

• Bondhead Table • Bond Optic Table • Wafer Optic Table • Workholder • Epoxy Writer Table • Ejector Table • Wafer Table • Wafer Expander • Wafer Loader • Stack Loader • Leadframe Loader

Bond Head

Ejector Table

Wafer Expander

Epoxy Writer Table

Stack Loader

AD898 Overhaul Manual Ch1 – Introduction

Part III 1-2

1.2 Overhaul Flowchart Below flowchart gives the general procedure of overhauling AD898.

Design the overhaul plan

End

Perform modules disassembly, parts replacement and assembly

Machine integration and module alignment *Please refer to Intermediate Machine Setup Manual

Device setup for bonding quality check *Please refer to Operation Manual

Are all the spare parts and

tools ready? Order necessary parts and tools

Yes

No

Check the key parts of modules and sub-modules and see if repair or replacement is needed

AD898/AD8912 Key modules for overhaul • Bondhead Table 2.1 • Bond Optic Table 2.2 • Wafer Optic Table • Workholder 2.3 • Epoxy Table 2.4 • Ejector 2.5 • Wafer Table 2.6 • Wafer Ring 2.7 • Wafer Expander 2.8 • Wafer Loader • Leadframe Loader 2.9 • Stackloader 2.10

Is there any other module for

overhaul?

Yes

No

AD898 Overhaul Manual Ch2 – Module Assembly

Part III 2-1

Chapter 2 Module Assembly 2.1 Bond Head Table 2.1.1 Bond Head Specification Check List Item Description Specification/requirement Result Y axis LM Guide Note: Use THK AFF Grease 1 Y LM Guide parallelism <10µm 2 Y LM Guide Block sliding force 100-400gf (each) 3 Y With YZ bracket sliding force 250-650gf Z axis LM Guide Note : Use THK AFF Grease 4 Z LM Guide parallelism <10µm 5 Z LM Guide Block sliding force 30-130gf 6 Z LM Guide with loading (Z Back

Plate) 200-450gf

Y axis Ballscrew assembly Note : Use NSK LG2 Grease 7 Y axis ball screw forward preload A1=100-400gfcm, ∆<=150gfcm A1=

∆<= 8 Y axis ball screw backward preload A2=100-400gfcm, ∆<=150gfcm A2=

∆<= 9 With loading (forward) A11= A1+(150-200gfcm),

∆<=150gfcm A11= ∆<=

10 With loading (backward) A22=A2+(150-200gfcm), ∆<=150gfcm

A22= ∆<=

11 Y axis and Z guide rail parallelism <=0.04mm Z axis Ballscrew assembly Note: Use NSK LG2 Grease 12 Z axis ball screw forward preload B1=100-400gfcm, ∆<=150gfcm B1=

∆<= 13 Z axis ball screw backward preload B2=100-400gfcm

∆<=150gfcm B2 ∆<=

14 With loading (forward) B11=B1+(150-200)gfcm, ∆<=150gfcm

B11= ∆<=

15 With loading (backward) B22=B2+(150-200)gfcm, ∆<=150gfcm

B22= ∆<=

Z front guide LM Guide plate Note: Use THK AFF Grease 16 LM Guide preload 30-130gf (each) 17 No gap between the bearings and the Z

guide plate Visual Check. The bearings should move at the same time and the torque increment cannot more than 20gfcm

18 Z moving distance 32-34mm Micro X cross roller ways Use: Staburags Grease NBU12/300KP 19 Cross roller ways sliding force 22-32gf Micro X play 20 Check play between cross roller way

using 2kgf applied at one cross roller ways

<0.002mm gap

21 Locking force for the M3 screw >= 15kgfcm


Part III 2-2

22 Y axis Toque after install the Z front guide link with the Z bar

The Y axis torque will be increase less than 20µm

Others 23 Check wiring and cable No folding 24 Vacuum reading <=-85Kpa 25 Micro X calibration Refer to setup manual 26 Bond head Y encoder calibration Refer to setup manual 2.1.2 Bondhead Table Assembly Tools and Equipment Preparation

1) Grease gun 2) 6” G clamp 3) 100-1000gf gram gauge 4) 50-500gf gram gauge 5) 25-250gf gram gauge 6) 5-50gf gram gauge 7) Loctite #222 8) 4” & 6” Spanner 9) 1200gfcm torque driver 10) dial gauge: resolution 1um 11) Torque Driver (50 kgfcm) 12) MicroX Calibration Equipment

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Add AFF grease into the Y and Z LM Guide Block as Figure 2-1 and Figure 2-2. 3) Check the Y LM Guide Block preload force with a gram gauge for each side should

be 100-400gram and on Z LM Guide Block preload force should be 30-130gram. 4) Add LG2 grease into the Z ballscrew and Y ballscrew.

Figure 2-1 Add grease to Y LM Guide Block Figure 2-2 Add grease to Z LM Guide Blocks

5) Use a G Clamp to clamp the Bond Head Y table LM Guide rail. Check the parallelism

of the LM Guides if it is less than 10um and then tighten the six M4X14 with spring lock screws at 42kgfcm added with loctite#222 as Figure 2-3.


Part III 2-3

6) Use a G clamp to clamp the Bond Head Z table LM guide rail. Check the parallelism of the LM Guides if it is less than 10um and then tighten the four M3X12 with spring lock screws at 20kgfcm added with loctite#222 as Figure 2-4.

Figure 2-3 Use G clamp to fix Y LM Guide Rails Figure 2-4 Use G clamp to fix Z LM Guide Rail

7) Install the YZ Bracket on the LM Guide Blocks using four M4X12 screws with springs added with loctite#222.

8) Check the sliding force on the Y LM Guide with the YZ Bracket with a gram gauge as Figure 2-5. The specification should be within 250 to 650gram.

9) Similarly, install the BH Back Plate on the Z LM Guide Blocks using sixteen M4X8 screws with springs added with loctite#222.

10) Tighten the Z table mount set screw with 2.5kgcm force. 11) Measure the Z LM Guide with gram gauge and the specification is within 200 to

450gram as Figure 2-6.

Figure 2-5 Check the YZ Bracket sliding force Figure 2-6 Check the BH Back Plate sliding force

12) Assemble the parts in A as B shown as Figure 2-7 13) Measure the Y ballscrew preload force with a torque gauge. The specification is 100-

400gfcm and the variation is less than 150gfcm. 14) Install sub-assembly parts and the ballscrew as Figure 2-8. 15) Mount the part B onto the BH table.


Part III 2-4

Figure 2-7 Assembly the Y stopper Figure 2-8 Assembly the Y ballscrew sub-assembly

16) Install the parts as shown in Figure 2-8 into the Y table LM guide as shown in Figure 2-9.

17) Do not tighten the screws. Slightly tighten the lock screws as shown in Figure 2-9 and then measure the torque with torque gauge. Rotate the ballscrew and then tighten the lock screws slowly if you get the lowest torque reading (250-600gram). The specifications for the torque variation within 150gfcm.

Figure 2-9 Check the driving torque of Y ballscrew

18) Similarly, install the Z ballscrew parts as shown in Figure 2-10 and Figure 2-11 to the Z base plate as Figure 2-12.

19) Rotate the Z ballscrew and slightly tighten the lock screw and monitor the torque and then tighten the lock screw to get minimum torque. The torque specification for the back and forth motion is within 100 to 400gfcm and variation is 150gfcm.

Figure 2-10 Assembly the Z ballscrew sub-assembly Figure 2-11 Assembly the Z stopper

B A

Lock screws


Part III 2-5

Figure 2-12 Install the Z ballscrew and stopper

20) After installing the ballscrew in the BH Z base plate and put the Z base plate assembly to the BH table base and rotate the ballscrew and adjust all the related lock screws so that the torque is within the specification.

21) Mount a dial gauge at the Y motion assembly as Figure 2-13. 22) Measure the parallelism of the Z guide rail respective with the Y LM guide. The

specification is within 40um.

Figure 2-13 Check parallelism of Z Guide Rail respect to Y LM Guide

23) Assemble Figure 2-14 parts as shown in Figure 2-15.

Figure 2-14 Assembly the Z front guide CRW Figure 2-15 Check the CRW sliding force


Part III 2-6

24) Adjust the set screw by torque driver and then measure the sliding force with a 50g gram gauge. The specification is between 22 to 32gf.

25) Assembly the LM guide onto the parts as Figure 2-16. Be careful of the LM Guide Block won’t come out from the LM Guide. Or adding the stopper at both ends.

26) Put the Z clamp bearing assembly shown in Figure 2-16 onto the Figure 2-17. 27) Adjust the clamp bearing on the X plate guide. The gap should be zero between the

bearings and the guide. After adjusting the clamp bearing, check the Y motion ballscrew torque again. The increased torque should not be larger than 20gfcm.

Figure 2-16 Assembly the LM Guide to Z front guide Figure 2-17

28) Install the Micro X read head and the electronic ruler shown in Figure 2-18 onto the Micro X position as shown in Figure 2-19.

Figure 2-18 Micro-X Encoder and Linear Scale Figure 2-19 Check the Micro-X Waveform

29) Adjust the gap between the electronic ruler and read head to 1mm. 30) Connect the read head cable to PWM 8 and oscilloscope. 31) Adjusting the read head position until we can get required specification. (Note: the

details calibration may refer to the setup manual) 32) Assemble pneumatics tube and parts as shown in Figure 2-20 and tighten set screws to

avoid pressure air leakage. 33) Assemble the parts and wiring as Figure 2-21 to Figure 2-23.

Linear encoder read head

Read head

Electronic ruler

Clamp bearing

Stopper


Part III 2-7

Figure 2-20 Figure 2-21


34) Connecting all the wiring and pneumatics tubes in sequence as shown in Figure 2-24 to Figure 2-28.


Set screws position


Part III 2-8



35) Install the AC servo motor to the BH assembly as Figure 2-30.

Figure 2-30 Finished BH Table Assembly

36) Adjust the BHY Scan Head and Encoder Scale position by inserting a 0.8mm spacer between the scan head and encoder scale and then lock the screw and remove the spacer.

Figure 2-31 0.8mm Spacer


Part III 2-9

37) Adjust the following two screws of the encoder yaw adjustment block in up/down direction, until the gap is 0.8mm as in Figure 2-32.

Figure 2-32 Adjust the gap is 0.8mm

38) Adjust the following two screws of the encoder pitch adjustment block in left/right direction, until the green LED (of encoder) is ON throughout the traveling range of encoder scale as in Figure 2-33.

Figure 2-33 Adjust position until green LED is all the way ON

39) Adjust the reference mark such that when homing the read head to the reference mark should light red.


Part III 2-10

2.2 Bond Optic Table 2.2.1 Bond Optic table Specification Check List Item Description Specification/requirement Result Y Optic table assembly Note: use AFF grease for LM Guide, NBU 12/300 KP grease for cross roller ways 1 LM Guide rail parallelism <10µm 2 LM rails leveling <10µm 3 LM Guide block preload 40-90gfcm (each) 4 LM Guide with loading (forward or backward) 150-400gfcm 5 Gap between linear motor and magnet 1.1~1.4mm 6 Cross roller ways sliding force 140-180gf 7 Y Table sliding force with loading ≤800gf 8 Leadscrew torque with loading 200-400gfcm 9 Y direction traveling distance <84mm 2.2.2 Bond Optic Table Assembly Tools and Equipment Preparation

1) Gram gauge 2) Dial indicator 3) Feeler gauge 4) Torque gauge 5) Torque driver

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Use 6 M4X12 screws with springs to mount the (OB) Magnet Mount onto the (OB)

Table Base as Figure 2-34.

Figure 2-34 Mounting of Magnet Mount onto the Table Base

3) Use 4 M4X18 screws with springs to mount the (OB) Adj. Hard Stopper (L & R) to the (OB) Table Base as Figure 2-35.


Part III 2-11

Figure 2-35 Mounting of Adjustment Hard Stopper

4) Add AFF grease into the Y and Z LM block as Figure 2-36.

Figure 2-36 Greasing on the LM Guide Blocks

5) Check the LM preload force with a gram gauge. The specification should be within 40 to 90gf.

6) Use 10 M3X12 screws with springs to mount the LM Guide onto the (OB) Table Base. LM Guide with “KB” mark should put on the reference side. LM Guide Blocks without “KB” mark and with smooth side should face out. Parallelism of LM Guide should <10um. Leveling of LM Guide should <10um.

Figure 2-37 Mounting of LM Guide onto the Table Base

7) Install the LM guide on the Y table. Tighten the lock screws with 20kgfcm force. 8) Use 16 M4X16 screws with springs to mount the (OB) Y Sliding Plate onto the LM

Guide as in Figure 2-38. Parallelism of the (OB) Y Sliding Plate to the LM Guide should <0.01mm. Gap between them should be 1.1~1.4mm. Sliding force of the (OB) Y Sliding Plate should ≤800g.

5 screws to KB side


Part III 2-12

Figure 2-38 Mounting of Y Sliding Plate onto the LM Guide

9) Install the magnet onto table. Be careful of the direction of the magnet. The five screw hole should be close to the reference surface as Figure 2-37.

10) Use 4 M4X12 screws with springs to mount the (OB) Fixed Hard Stopper (L & R) to the (OB) Table Base as in Figure 2-39.

Figure 2-39 Mounting of Fixed Hard Stopper

11) Use 2 M3X6 flat screws to mount the cable clamp onto the (OB) Table Base.

Figure 2-40 Mounting of Cable Clamps

12) Use 2 M4X12 screws with springs to mount the (OB) Y-Sensor Holder onto the (OB) Table Base as in Figure 2-41.

Figure 2-41 Mounting of Y-Sensor Holder


Part III 2-13

13) Use 2 M3X8 screws with springs to mount the (OB) Y Sensor Flag onto the (OB) Y Sliding Plate as in Figure 2-42.

Figure 2-42 Mounting of Y Sensor Flag

14) Assemble the linear motor as Figure 2-43. 15) Check the lighting of the linear encoder. Green light should be observed along the

way. If red LED is on, adjust the linear encoder lock screw as shown Figure 2-43.

Figure 2-43 Checking of Linear Encoder

16) Assemble the part A into part B through the cross roller as adjustment table as in Figure 2-44. Check the sliding force if within 140-180gf with the gram gauge. Set the force by adjust the set screws (let say 0.8kg) on the adjustable cross roller way. After that, use the torque driver to tighten all the screws. The torque should be 20kgfcm.

17) Assemble X-leadscrew and X-nut. The torque specification should be within 200-400gfcm with the use of torque gauge as Figure 2-45.

18) Install all the parts as shown in Figure 2-46. 19) Make sure all the sensor flags cannot be crashed with the sensor. There should be

signal only sensor flag cut in the middle of the sensor. The traveling distance of sensor flag Y should be kept less than 84mm.

Figure 2-44 Assembly of Cross Roller Way

Part A

Part B

Lighting position

Set screw for encoder adjustment


Part III 2-14

Figure 2-45 Assembly and Check the Torque of the X Leadscrew

Figure 2-46 Finished Module

X leadscrew


Part III 2-15

2.3 Workholder 2.3.1 Workholder Specificaitons Check List Item Description Specification/requirement Result Left Workholder stand Note: NBU 12/300KP for cross roller ways and NSK Grease PS2 for ballscrew 1 Y Cross roller way sliding force 250-350gf 2 Z Cross roller way sliding force 150-250gf 3 Y leadscrew torque with loading 150-300gfcm 4 Z leadscrew torque with loading 150-300gfcm 5 Play check ≤10um Right Workholder stand Note: NBU 12/300KP for cross roller ways and NSK Grease PS2 for ballscrew 6 Y Cross roller way sliding force 250-350gf 7 Z Cross roller way sliding force 150-250gf 8 Y ballscrew torque with loading 150-300gfcm 9 Z ballscrew torque with loading 150-300gfcm Indexer Assembly Note: AFF Grease for LM Guide 10 LM Guide preload A1=30-100gf (each) 11 LM Guide after equipped with linear

motor A11=A1+(0-100gf)

12 LM guide parallelism between datum ≤10um 13 LF support lower than the lower claw

jaw 10-30um

14 Indexer lower jaw leveling with the LM guide

<5um

15 Torque for the LM Guide lock screw 18kgfcm with some loctite#222 16 Torque for the Indexer lower jaw

lock screw ≥8kgfcm

17 Torque for the Indexer Clamp screw ≥18kgcm 18 Torque for the Indexer wire clamp ≥15kgcm 19 Indexer clamp force in X direction

(Use SOIC LF) ≥800gfcm

20 Indexer clamp force in Y direction (Use SOIC LF)

≥400gfcm

21 Indexer cable tension Move the indexer to the stopper and then release and the indexer cannot bound back more than 30mm

22 Gap between upper and lower jaw 1.6mm 2.3.2 Workholder Assembly Tools and Equipment Preparation

1) Gram gauge 2) Dial gauge 3) Torque gauge 4) Torque driver


Part III 2-16

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Check the preload force of LM guides. The specification should be less than 30-

100gfcm for each LM guide. 3) Install the LM guides onto the index base. Tighten the screws. 4) Use the dial gauge to measure the parallelism which should be less than 10um as in

Figure 2-47 and Figure 2-48.

Figure 2-47 Check the parallelism of the LM Guide

Figure 2-48 Method of measuring parallelism

5) Install the four indexer clamps onto the LM guides. Tighten the screw with torque at 18kgfcm.

Figure 2-49 Sticking the Golden Scale

6) Install the linear encoder into the indexer clamp. Adjust the lock screw such that the encoder have green light without blinking all the way of the encoder.

7) Install the coil with the clamp and tidy up all the wires using wire support as Figure 2-50. Tighten the 2 M3X14 with spring lock screws with torque equals to 15kgfcm.

LM guide

Indexer clamp

LM guide

Linear encoder


Part III 2-17

Figure 2-50 Install the coil with the clamp

8) Install all the parts and wiring as shown in Figure 2-51 and Figure 2-52.

Figure 2-51 Connect the cables Figure 2-52 Tide up the cables

9) Install two magnet bars as Figure 2-53 such that the coil is surrounded by the two magnets

Figure 2-53 Install the magnet bars

10) Measure the parallelism of the three lower jaws. Use the lowest one as the reference as shown from Figure 2-54 to Figure 2-57. Adjust the other lower jaws in order to meet the specification. For single jaw, the parallelism should be less than 5um. The parallelism for all the lower jaw throughout the workholder should be less than 20um

Coil

Wire support

Lock screws (2 M3X14 with spring washers)

Magnet bar

Coil is located between two magnet bars

Reference mark

2 M3X8 Flat Screw


Part III 2-18

Figure 2-54 Check the level on Input Indexer Figure 2-55 Check the level on Dispense

Indexer

Figure 2-56 Check the level on Dispense

Indexer near mid way Figure 2-57 Check the level on Bond Indexer

Figure 2-58 Check the parallelism of the Input Indexer lower jaw

Dial gauge

Input clamp lower jaw


Part III 2-19

Figure 2-59 The parallelism of the single lower jaw should less than 5um

11) Install the leadframe support into the workholder as Figure 2-60. The leadframe support should be lower than the lower jaws by 10-30um.

Figure 2-60 Checking the LF Support Level

12) Install the upper jaw with clamp plate using six M3 screws. 13) Install the clamp plate with index clamp such that the gap between upper jaw and

lower jaw should be 1.6mm.

Figure 2-61

Leadframe support

Clamp plate

2 M3X8 Flat Screw


Part III 2-20

14) Adjust the linear encoder mount such that the encoder will off the light when pass the reference mark but green light throughout the workholder.

15) Check the distance between the reference mark and the home sensor should be 1mm ±0.2mm. If not, adjust the home sensor mount to achieve the specification.

Figure 2-62 Adjust the Home Sensor Position

16) Install the double leadframe sensor and the sensor mount as Figure 2-63.

Figure 2-63 Mount the Double LF Sensor

17) The wiring of the workholder was shown in the following Figure 2-64.

Double lead frame sensor and sensor mount

The right most wire is number 1 while the left most wire is number 5

Home sensor

Position of reference mark


Part III 2-21

Figure 2-64 Wiring for the indexer clamp


Wire 1 Black colour Clamp coil Wire 2 Red colour Clamp coil Wire 3 Green/Black colour Linear motor Wire 4 Blue/Black colour Linear motor Wire 5 Red/Black colour Linear motor


Part III 2-22

For the LF adjust assembly: There are two parts for the assembly. Y direction control the track width while the Z direction control the downset.

1. Clean all mechanical parts with alcohol and dustless paper or clothes. 2. Add grease into the cross roller with NBU 12/300KP. 3. Install two pairs of cross roller into the module as Figure 2-67. The force for Y

direction should be 250gf-350gf while Z direction should be 150gf-250gf. Force can be adjusted by set screw at the side of cross roller.

Figure 2-67

4. Add grease to A/C bearing with NBU 12/300KP. 5. Install Y direction leadscrew into the table as Figure 2-68.

Figure 2-68 Install the Y direction leadscrew

6. Add grease PS2 into the leadscrew. Install the Z direction leadscrew and A/C bearing. The torque should be within 100-300gfcm. Make sure the left bed and right bed have the same height.

A/C bearing

Y direction cross roller

Z direction cross roller

Table Y

Table Z

Bed


Part III 2-23

Figure 2-69 Z direction ballscrew

7. For Y direction: Add grease NBU 12/300KP into MC bearing. Tighten one side of bearing cover and then adjust the other side such that the worm shaft have torque between 150-300gf.

Figure 2-70

8. For right side Z direction, assemble MC bearing and add grease with NBU 12/300KP. Adjust bearing cover such that the torque within 150-300gf.

A/C bearing

Worm shaft


Part III 2-24

Figure 2-71 Z direction right side

9. Install Z direction left side as mention in procedure 8.

Figure 2-72 Z direction left side

10. Check the parallelism of Y and Z table. The left and right stand maximum difference should be less than 0.03mm and the leveling should be less than 0.03mm as well.

11. As Figure 2-73, install the Z direction worm gear by using C-clamp to adjust the worm gear position such that the worm shaft and worm gear work smoothly.

Figure 2-73 Z Direction Worm Gear

Worm shaft

Worm gear


Part III 2-25

12. Install Y direction worm gear as mention in procedure 11.

Figure 2-74 Install the Y direction worm gear

13. Check the total torque of the table should be within 150-300gfcm. If out of specification, adjust the position of worm gear.

Figure 2-75 Check the torque of the worm gear

14. Add PS2 grease into worm gear and worm shaft. Install the motors and sensors as Figure 2-76.

Figure 2-76 Left and right WH stand

Worm gear

Worm shaft

Left table

Right Table


Part III 2-26

For the front track: 1. Assemble drop-off alignment clamp as shown in Figure 2-77.

Figure 2-77 Drop off alignment clamp

2. Install the dowel pin and flat screw onto the front track as Figure 2-78.

Figure 2-78 Install the dowel pins and flat screws

3. Install the platform blocks.

Figure 2-79 Different Platform Blocks

4. Install the anvil blocks and measure the parallelism of the surface should be within 0-0-0.03mm.

5. Finished module as shown in Figure 2-80.

Figure 2-80 The finished front track module

Dowel pin Flat screw


Part III 2-27

2.4 Epoxy Table 2.4.1 Epoxy Writer Table Specification Check List Item Description Specification/requirement Result X table Installation Note: AFF grease for LM, NSK PS2 or LG2 grease for ballscrew 1 X LM Guide parallelism <10um 2 LM Guide preload 50-150gf (each) 3 LM with loading 200-500gf 4 X ballscrew preload (forward) A1= 100-400gfcm, Max Range ≤150gfcm

Variation ≤100gfcm

5 X ballscrew preload (backward) A2= 100-400gfcm, Max Range ≤150gfcm Variation ≤100gfcm

6 X ballscrew with loading (forward)

A11=A1+50gfcm, Max Range ≤150gfcm Variation ≤100gfcm

7 X ballscrew with loading (backward)

A21=A2+50gfcm, Max Range ≤150gfcm Variation ≤100gfcm

Y table Installation Note: AFF grease for LM, NSK PS2 or LG2 grease for ballscrew 8 Y LM Guide parallelism <10um 9 LM Guide preload 100-400gf (each) 10 LM with loading 400-1000gf 11 Y ballscrew preload (forward) B1=100-400gfcm, Variation ≤150gfcm 12 Y ballscrew preload (backward) B2=100-400gfcm 13 Y ballscrew with loading

(forward) B11=B1+50gfcm, Variation ≤150gfcm

14 Y ballscrew with loading (backward)

B22=B2+50gfcm, Variation ≤150gfcm

Z LM Guide Note: Use AFF grease for Z LM 15 LM guide block with loading 100-200gf 16 Z Spring force 3.1 - 4.65 KG 17 XY table leveling ≤30um 2.4.2 Epoxy Writer Assembly Tools and Equipment Preparation

1) Gram Gauge (25-250gf, 50-500gf, 100-1000gf) 2) Torque Driver 3) Torque Gauge 4) Push & Pull Gauge 5) G Clamp

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Add AFF grease into the LM Guide Block as Figure 2-81.


Part III 2-28

Figure 2-81 Adding grease to the LM Guide

3) Add NSK grease PS2 or LG2 into the ballscrew. 4) Check the parallelism of the two sides of the Y table. The parallelism should be less

than 10um. 5) Check the preload force of the both X and Y LM guide by gram gauge. The X LM

guide should be between 50-150gf for each LM guide block while the Y direction LM guide should be within 100-400gf.

6) After install the table, the table X sliding force is between 200gf-500gf while the Y table is 400-1000gf.

7) Check the torque of the ballscrew for both X and Y direction. For the X direction, the torque for clockwise and anti-clockwise direction should be between 100-400gfcm while variation less than 150gfcm. For Y direction, the torque for both clockwise and anticlockwise direction is 100-400gfcm while variation less than 150gfcm.

8) Install the LM guides with torque force 42kgfcm as Figure 2-82.

Figure 2-82 Install the LM guides

9) Assemble part A onto the LM guide as Figure 2-83. 10) Install the A/C ball bearing. Check the torque again and the specification is the LM

guide torque plus 50gfcm while the variation is less than 150gfcm as Figure 2-84.

Figure 2-83 Put on the X table over the Y table

11) Install the ballscrew and then check the torque. The total torque should be A/C bearing torque plus 150-200gfcm while the variation less than 100gfcm as Figure 2-85.

Part A

Testing point


Part III 2-29


12) Install the two LM guide on the X table as Figure 2-86. Tighten all the screws with torque at 20kgfcm.

Figure 2-86 Check the Y driving torque with loading

13) Assemble part B onto the LM guide. Check the force of the table in X direction in both clockwise and anti-clockwise direction as the specification should within 200-500gfcm as Figure 2-87.

Figure 2-87 Check the X driving torque with loading

14) Install the ballscrew and bearing and check the torque. The specification is ballscrew preload torque plus 50gfcm with variation less than 100gfcm.

15) Check the overall torque. The specification is ballscrew preload torque plus 100-150gfcm with variation less than 100gfcm.

16) Assemble the A/C bearing as Figure 2-88.

Testing point for torque

Testing point for table X direction

Part B

Testing point for table Y direction


Part III 2-30

Figure 2-88 Assembly the A/C bearings

17) Check the preload force of the Z LM guide with specification between 100-200gf. 18) Install the Z-axis LM guide onto the table and tighten all the screws. The torque of the

screws should be 20kgfcm. 19) Install Z-eccentric shaft and part C as shown in Figure 2-89.

Figure 2-89 Install the Z-eccentric shaft

20) Install part D onto the LM guides. Be careful that part D should stay near the reference side and then tighten all the screws. Check the force with the use of gram gauge. The specification should be within 100-200gf.

Figure 2-90

21) Install all the parts as shown in Figure 2-91. The spring force specification is 3.10-4.65kg.

Figure 2-91

Part D

Spring

Z-direction testing point

Part C


Part III 2-31

22) Push the X, Y table to the limits and check the parallelism of the Z-bracket should less than 0.03mm.

23) Assemble all the parts as shown in Figure 2-92 and Figure 2-93. Check the preload force of the cross rollers should within 130-170gf.


24) Arrange all the wires. 25) The below Figure 2-94 and Figure 2-95 show the finished epoxy writer.

Figure 2-94 Epoxy writer (1) Figure 2-95 Epoxy writer (2)


Part III 2-32

2.5 Ejector 2.5.1 Ejector Specification Check List Item Description Specification/requirement Result XY Table Assy Note: JoJoba oil for leadscrew, NBU 12/300 KP for cross roller ways 1 X and Y Table cross roller ways

parallelism 10um

2 XY Table sliding force 200~600gf 3 Timing belt tension 230-300Hz (for 73-10522 grey one)

500-600Hz (for 73-10055 black one)

4 Z Up down mount Sliding force 65-85gf 5 Ejector pin up down sliding force 18-25gf 6 Up down cylinder cross roller

ways sliding force 35-45gf

7 No play after installing the ejector pin

Visual check by camera or use dial gauge to check

8 Ejector Vacuum -35KPa or 50cmhg 9 Ejector cam adjust to lowest

position When home sensor flag block the sensor, the cam should at the lowest position. When turn 90° clockwise, it should be at the highest position.

2.5.2 Multiple Ejector Assembly Tools or Equipment Preparation

1) Belt tension meter 2) Grease 3) Gram Gauge 5~50 Gram 4) Gram Gauge 10~100 Gram 5) Gram Gauge 50~500 Gram 6) Allen Keys (Metric) include 1.0mm one 7) Spanner 8) Hook 9) Shim Paper 10) Loctite# 222

Assembly Procedures

1) Clean all the part and cross roller ways with alcohol and dustless paper. 2) Add some anti-rusting grease on the cross roller way and appropriate grease on the

cross roller. 3) Add small amount of loctite# 222 on set screws and lock screws. 4) Use 10 M3X10 screws with springs to mount the Cross Roller Way CRW2-75 (inner

part) onto the (EJ) X-Plate Offset Knob as in Figure 2-96.


Part III 2-33

Figure 2-96 Install the Cross Roller Way onto the X Plate

Figure 2-97 Install the Fixed and Adjustable CRW

5) Use 5 M3X16 screws with springs to mount the Fixed Cross Roller Way CRW2-75 on the left hand side of the (EJUD) Ejector Base Offset Knob. And put the together with the adjustable CRW on the right and use 5 M3X16 screws with springs to fix its position as in Figure 2-97.

Figure 2-98 Adjust the set screw to get the correct sliding force

6) Use 5 M3X6 set screws to adjust the sliding force of around 200~600g as in Figure 2-98. After adjusting the sliding force, tighten the lock screw with torque at 20kgfcm.

Figure 2-99 Install the CRW onto the X-Adjust Screw and Y-Block Assy.


Part III 2-34

7) Use 6 M3X10 screws with springs to mount the Cross Roller Way G2-45 (inner) onto the (EJ) X-Adj. Screw and Y-Block Assy as in Figure 2-99.

8) Install springs and leadscrew at the ejector base as shown in Figure 2-100.

Figure 2-100 Install the spring and leadscrew

Figure 2-101 Install the fixed and adjustable CRW

9) Use 3 M3X8 screws with springs to mount the Fixed Cross Roller Way G2-45 onto one side of the (EJ) X-Plate Offset Knob. Then, put together the (EJ) X-Adj. Screw and Y-Block Assy. with the adjustable Cross Roller Way G2-45 on the other side and use 3 M3X8 screws with springs to fix its position as in Figure 2-101.

10) Use 3 M3X6 set screws to adjust the sliding force of around 200~600g as in Figure 2-102.

Spring

Leadscrew


Part III 2-35

Figure 2-102 Adjusting the sliding force by these 3 set screws

11) Use 2 M4X16 screws with springs to mount the (EJ) X-Adj. Screw onto the Y-Block Assy. as in Figure 2-103

Figure 2-103

12) Insert the (EJ) Y-Adj. Screw with 2 springs mount onto the (EJUD) Ejector Base as in Figure 2-104.

Figure 2-104

13) Use 2 M3X10 screws with springs to mount the Nut Assy. onto the (EJUD) Ejector Base as in Figure 2-105.


Part III 2-36

Figure 2-105

14) Use 2 M4X16 screws with springs to mount the (EJ) Y-Adj. Screw onto the (EJUD) Ejector Base as in Figure 2-106.

Figure 2-106

15) Use 6 M4X12 screws with springs to mount the Cross Roller Way 3-75 (inner) onto the (EJ) Z-Base as in Figure 2-107.

Figure 2-107 Mount the CRW onto Z-Base Figure 2-108 Check the sliding force

16) Use 6 M4X12 screws with springs to mount the Cross Roller Way 3-75 (outer) to the (EJ) Z-Slide Plate. Use 3 M4X8 set screws to adjust the sliding force of around 65~85g as in Figure 2-108.

17) Install the up-down controlling cross roller ways as Figure 2-109. Use 2 M4X8 set screws to adjust the sliding force of around 35~45g as in Figure 2-110.


Part III 2-37

Figure 2-109 Up/down control CRW assy Figure 2-110 Adjust the set screw for the sliding force

18) Use 2 M4X12 screws with springs to mount the (EJ) Up/Down Wedge (Figure 2-111) to the Cross Roller Way CRWM 3-50 (inner) as in Figure 2-112.

Figure 2-111 Up-down wedge Figure 2-112

19) Insert the (EJ) Up/Down Sensor with Cylinder Module to the (EJ) Up/Down Wedge and lock the 2 nuts as in Figure 2-113.

Figure 2-113 Lock the cylinder module

20) Use 4 M5X18 screws with spring to mount the (EJ) Z-Base to the (EJ) X-Adj. Screw and Y-Block Assy.

Figure 2-114 Mounting the Z-Base


Part III 2-38

21) Use 2 M5X10 screws with springs to mount the (EJ) Up/Down Sensor with Cylinder Module to the (EJ) Z-Base as in Figure 2-115.

Figure 2-115 Lock the cylinder

22) Assembly the ejector pin (sliding base) module and mount to the Column Body from Figure 2-116 to Figure 2-121. Adjust the cross roller ways sliding force to 18-25gf. Put some grease on the shaft and around the O-ring.




23) Use 4 M3X8 screws with springs to mount the spacer (left), CAM (A), spacer (right), lock nut, cam shaft, flag mount 270deg to the (EJ) Column Body as Figure 2-122.


Part III 2-39

Figure 2-122 Install the cam shaft

24) Use 2 M3X8 flat screws to mount the (EJ) Fork Sensor Mount onto the (EJ) Column Body as in Figure 2-123.

Figure 2-123 Mount the sensor on the column body

25) Use 4 M3X6 screws with springs to mount the Cover to the (EJ) Column Body as in Figure 2-124.

Figure 2-124 Mount the cover Figure 2-125 Mount the Top Flange

26) Use 3 M3X6 screws with springs to mount (EJ) Top Flange onto the (EJ) Column Body as in Figure 2-125.

27) Put on the (EJUD) MP Ejector Kit over the (EJ) Top Flange and use 2 M4X5 set screws to fix it as in Figure 2-126.


Part III 2-40

Figure 2-126 Put on MP Ejector Kit

28) Use 4 M4X14 screws with springs to mount the (EJ) Column Body to (EJ) Z-Slide Plate as in Figure 2-127 and Figure 2-128.

Figure 2-127 Figure 2-128 Mount the column body to Z-Slide Plate

29) Use 2 M3X5 set screws to mount the (EJ) Driven Pulley (AT3/40) to the Cam Shaft.

Figure 2-129 Mount the Driven Pulley Figure 2-130


Part III 2-41

30) Use 2 M4X12 screws with springs and 2 M4X6 flat screws to mount the (EJ) Motor Mount (Servo) to the (EJ) Z-Slide Plate as in Figure 2-130.

31) Use 4 M4X14 screws with springs to mount the (EJSV) 8912 Electrical Assy. to the (EJ) Motor Mount (Servo). Note: New module will equip with servo motor instead of stepper motor as in Figure 2-131.

Figure 2-131 Mount the motor

32) Align the pulleys with timing belt so that they are parallel with each other. 33) Adjust the timing belt tension until the belt tension meter reading is from 230-

300Hz.(note: If you have no belt tension meter, you may use a cable tie round on the motor body and pull it with 5 to 6 kg force and then tighten the screws).

34) Install all other ejector parts as Figure 2-132 and Figure 2-133.

Figure 2-132 Ejector table (1) Figure 2-133 Ejector table (2)


Part III 2-42

2.6 Wafer Table 2.6.1 Wafer Table Specification Check List Item Description Specification/requirement Result XY Table Assy Note AFF Grease for the LM Guide 1 X LM rail parallelism ≤10um 2 X LM guide preload 100-450gf (each) 3 X LM guide with loading Initial sliding friction 1000-2000gf

Dynamics sliding friction 1000-1400gf

4 Y LM rail parallelism ≤10um 5 Y LM guide preload 100-400gf (each) 6 Y LM guide with loading Initial sliding friction 1000-2000gf

Dynamics sliding friction 1200-1600gf

7 Check the linear encoder Refer to manual 2.6.2 Wafer Table Assembly Tools and Equipment Preparation

1) Gram gauge 2) Feeler gauge 3) Torque gauge 4) Torque driver

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Install the LM guide onto Y-table base. Tighten all the screws with torque at 40kgfcm.

Be careful that the KB mark of the LM guide should face to the reference side. 3) Check the LM guide preload force should be within 100-450gf (each block) with

gram gauge.

Figure 2-134 Y table

4) Install the LM guide onto X table. Reminded that the LM guide without KB marks should face the reference side. Tighten all the screws with torque at 40kg.

5) Check the preload force of the LM guides should be between 100-450gf. 6) Turn the X table upside down and then install the coil as shown in Figure 2-136. 7) Put the X table onto the LM guides of the Y table.

Stopper

KB


Part III 2-43

8) Install two magnet bars into the Y table as shown in Figure 2-137. Tighten the screws with torque at 40kg. The gap between the coil and magnet bar should between 1.1-1.4mm

9) Check the sliding force of LM guide on Y table. The specification should be within 1200gf-1600gf.

Figure 2-135 X table

Figure 2-136 Y direction linear motor coil

Figure 2-137 Y direction magnet bars

KB

Wafer table left coil

Wafer table right coil Reference side

Magnet bar

X table

Coil


Part III 2-44

10) Turn expander table upside down and install the coil onto the table. 11) Install expander table onto the LM guides of the X table and put the magnet bar into

X table. The gap between the coil and magnet bar should between 1.1-1.4mm. 12) Check the force of the X table with gram gauge. The specification is within the range

1000gf-1400gf.

Figure 2-138 X direction magnet bar

13) Install the linear encoders on both X and Y table. The gap between the encoder and the electronic ruler should be equal to 0.8mm. Adjust the linear encoder mount such that green light must observe through the whole traveling distance and no blinking should be seen.

Figure 2-139 Linear encoder and golden ruler

14) Connect all the wires and check the sensors flag should cut the sensor exactly at the middle of the fork sensor.

Expander table

Magnet bar

Linear encoder

Electronic ruler


Part III 2-45

2.7 Wafer Ring Assembly (8” Wafer Ring) 2.7.1 Wafer Ring Specifications Check List Item Description Specification/requirement Result 1 Ring rotation timing belt 110-150Hz (by belt tension meter) 2 Theta motor timing belt tension 250-400Hz (by belt tension meter) 3 Rotational sliding force 500-1000gf

2.7.2 Wafer Ring Assembly Tools or Equipment Preparation

1) Gram gauge 100-1000gfcm 2) Belt tension meter 3) Grease 4) Loctite# 222

Assembly Procedures

1) Clean the (WE) 8” rotational ring as in Figure 2-140 and Figure 2-141. 2) Put on the bearing onto the bottom part of the rotational ring and make sure the

bearing direction such that the balls of the bearing can be seen on bottom of the rotational ring as in Figure 2-142 and Figure 2-143.

Figure 2-140 (WE) 8” Rotational Ring – Top View

Figure 2-141 (WE) 8” Rotational Ring – Bottom View

Figure 2-142 Bearing KC-110XPO

Figure 2-143 Balls of the Bearing

3) Put the (WE) bearing clamp plate 2 on the bottom of the rotational ring as in Figure 2-144 and tighten the 16 M3X4 flat screws with Loctite# 222 as in Figure 2-145.


Part III 2-46

Figure 2-144 Put on the (WE) Bearing Clamp Plate2

Figure 2-145 Tighten the 12 M3X4 Flat Screws

4) Put the rotational ring onto the expander frame as in Figure 2-146 and Figure 2-147. Make sure the timing belt is already attached to the rotational ring.

Figure 2-146

Figure 2-147 Put on the Rotational Ring

5) Put on the 12 (WE) bearing mount plates to fix the rotational ring by using M3X4 flat screws (2 for each plate) with Loctite# 222 to tighten it as in Figure 2-148 and Figure 2-149.

6) Check the rotational sliding force using the gram gauge if it is within 500 to 1000gf as in Figure 2-150.

Figure 2-148 Put on the bearing mount plates

Figure 2-149 Put on the M3X4 Flat Screws

Figure 2-150 Check the Rotational Sliding Force

M3X4 Flat Screw

Ring Home Sensor Flag

(WE) Bearing Clamp Plate 2


Part III 2-47

7) Mount the (WE) theta motor assembly and the (WE) idler bracket on the expander frame as in Figure 2-151.

8) Adjust the idler bracket position until the timing belt tension is within 110-150Hz as shown in Figure 2-152.

9) Install the theta motor timing belt and then adjust the belt tension so that it can be within the range 250-400Hz as in Figure 2-153.

Figure 2-151 Mount the Theta Motor Assy and the Idler

Bracket

Figure 2-152 Adjust the Timing Belt Tension (Large)

Figure 2-153 Adjust the Timing Belt Tension (Small)

Figure 2-154 Finished Wafer Ring Assembly


Part III 2-48

2.8 Wafer Expander Assembly 2.8.1 Wafer Expander Specifications Check List

Item Description Specification/requirement Result 8 Inch Wafer Expander 1 Timing belt tension 165-195Hz 2 Top plate leveling <100um for 4 leadscrew location

2.8.2 8 inches wafer expander assembly procedures Tools or Equipment Preparation

1) Belt tension meter 2) Loctite #222

Assembly procedures 1. Install all the pulleys and timing belt on the wafer expander ring base as in Figure 2-155.

Note: You should add some Loctite #222 onto the pulley screw nuts. 2. Check the timing belt tension with the belt tension meter and adjust the tension by turning

the tensioner shaft shown as in Figure 2-156 to Figure 2-158.

Figure 2-155 Put on the pulleys and timing belt

Figure 2-156

Figure 2-157 Adjust the tension (1) Figure 2-158 Adjust the tension (2)

3. Install the top plate onto the 8” bottom disk as shown in Figure 2-159. Make sure the ring open/close sensor flag sit in the slot on the bottom disk as in Figure 2-160.

Then, turn this screw to adjust the tensioner shaft

Loosen the lock screw first


Part III 2-49

Figure 2-159 Put on the top plate

Figure 2-160 Align the ring open/close sensor flag slot 4. Put on the four leadscrew assembly onto the top plate and screw a little bit onto the

pulleys as shown in Figure 2-161 and Figure 2-162.

Figure 2-161 Put on the leadscrew assy Figure 2-162 Screw in a little bit of the leadscrew assy

5. Put on the leadscrew cover over the leadscrew assembly and tighten a little bit on the 2 M4X5 flat screw as shown in Figure 2-163. Use a screw driver to adjust the height of the top plate by turning the leadscrew such that the level on the top plate is the same on the ring as shown from Figure 2-164 to Figure 2-166.

Figure 2-163 Hand tighten the leadscrew assy

Figure 2-164 Adjust the top plate level

Figure 2-165 Check the level (1)

Figure 2-166 Check the level (2)

6. Put back the top cover of the wafer expander. Align on the 3 guide pins at the back as shown in Figure 2-167 and Figure 2-168. Tighten the eight M3X8 lock screws (4 on left and 4 on right) with spring and flat washers as shown in Figure 2-169 and Figure 2-170.


Part III 2-50

Figure 2-167 Back of the wafer expander

Figure 2-168 Put on the top cover

Figure 2-169 4 lock screws on left

Figure 2-170 4 lock screws on right

Figure 2-171 8” Wafer Expander


Part III 2-51

2.9 Leadframe Loader 2.9.1 Leadframe Loader Specification Check List Item Description Specification/requirement Result Y Pick Arm Assembly Note: AFF 1 Pick Arm LM Guide preload 200-300gf (each) 2 Pick Arm LM Guide with loading 800-1500gf 3 Y Arm Timing belt 80-120Hz 4 Check Solenoid Valve Function Visual Check 5 Check Sensor function Visual Check 2.9.2 Leadframe Loader Assembly Tools and Equipment Preparation

1) Gram gauge 2) Torque gauge 3) Torque driver

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) Assemble A/C bearing as in Figure 2-172. 3) Install the motor and A/C bearing onto the base as shown in Figure 2-173. 4) Install the timing belt. The timing belt and the pulley should be parallel. The timing

belt tension should within 80-120Hz.

Figure 2-172 Install the Motor and A/C Bearing Figure 2-173

Figure 2-174 Install the Timing Belt and check the tension


Part III 2-52

5) Check the preload force of LM guide which between 200-300gf. 6) Add grease AFF onto the LM guide. 7) Install the LM guide onto Y arm and tighten the screw with torque equal to 40kgfcm

as Figure 2-175.

Figure 2-175 Checking the sliding force of the LM Guide without loading

8) Install Y arm onto the base mount. Check force of the LM guide with gram gauge. The force should between 800-1500gf as in Figure 2-176.

Figure 2-176 Checking the sliding force of the LM Guide with loading

9) Connect the Y arm with the timing belt and the motor. Make sure all the parts can move smoothly without missing step.

10) Assemble all the parts shown in Figure 2-177. All the sucking heads should in the same level and no air leakage.

Sucking heads Figure 2-177

11) Install the lead frame and paper sucker onto Y arm. 12) Connect all the wires, sensors and air pipe.

Use gram gauge to check the force


Part III 2-53



Part III 2-54

2.10 Stack Loader Stack Loader Specifications Check List Item Description Specification/requirement Result Stack Loader Assembly 1 LM Guide Preload 50-100gf (each) 2 LM Guide with loading 100-250gf 3 Leadscrew preload 50-250gf, ∆≤150gfcm 4 Leadscrew with loading 100-400gfcm, ∆≤150gfcm 5 Timing belt tension 250-350Hz (by belt tension meter) Tools and Equipment Preparation

1) Gram gauge 2) Tension meter 3) Torque gauge 4) Torque driver

Assembly Procedures

1) Clean all mechanical parts with alcohol and dustless paper or clothes. 2) For the stack loader elevator, check the preload torque of the leadscrew with a torque

gauge. The specification is between 50-250gfcm while variation less than 150gfcm. 3) Assemble the A/C bearing and add NSK grease into the leadscrew as shown in Figure

2-180.

Figure 2-180 Install the A/C Bearing and Leadscrew

4) Check the LM guide preload force with gram gauge. The specification is 50-100gf. 5) Install the LM guide and tight all screws with torque 20kgfcm. 6) Install the L/F plate mount onto the LM guide. 7) Check the torque of leadscrew in both clockwise and anti-clockwise direction that

should be between 100-400kgfcm with variation less than 150gfcm. 8) Assemble all parts as shown in Figure 2-181.

A/C bearing


Part III 2-55

Figure 2-181 Put on the L/F Plate Mount

9) Assemble part A and motor as shown in Figure 2-182 to Figure 2-184. Check the tension of the timing belt should within 250-350Hz.

Figure 2-182

Figure 2-183 Figure 2-184 Mount the motor

10) Assemble Y-rack, Y L/F rear guide onto Y-rear guide base to form Y-rear guide. 11) Install Y-rear guide into the base as Figure 2-185.

Motor

L/F plate mount

Stopper mount

Part A


Part III 2-56

Figure 2-185

12) Assemble Y rack, Y L/F front guide onto Y-front guide base to form Y-front guide. 13) Install Y-front into the base. Make sure the gears of rear guide and front guide work

smoothly as Figure 2-186.

Figure 2-186

14) Assemble X-rack and X L/F left guide onto X-left guide base to form X-left guide. 15) Install X-left guide onto Y-front guide as Figure 2-187.

Figure 2-187

X L/F left guide

X left guide

Y L/F front guide

Y front guide

Y L/F rear guide

Y rear guide


Part III 2-57

16) Assemble X-rack and X L/F right guide onto X right guide base to form X-right guide. 17) Install X-right guide onto X-left guide as Figure 2-188. Make sure the gears for X left

guide and X right guide work smoothly and the height of six platform guide should be the same.

Figure 2-188

18) Install part A onto X right guide as in Figure 2-189.

Figure 2-189

19) Figure 2-190 shown the finished module.

Figure 2-190 Finished Module

Part A

X L/F right guide

X right guide


Ch3– Tool List

Part III 3-1

Chapter 3 Tool List

Item ASM Part No. Description Photo Qty

1 26-E08842 Locking tool (ejector eccentric shaft clamp)

1

2 26-E08868 Torque gauge adaptor (ID10)

1


1


1

5 53-00208 Micro-X Calibration Kit • PWM9 • Interface Adapter

(11uA) • Interface Adapter (TTL) • Interface Adapter

(1Vss) • BNC Cables • 12-Pin Connecting

Cable

6 62-10002 Gram gauge 25-250gf

1

7 62-10003 Feeler Gauge - Metric

1

8 62-10004 Gram gauge 5-50gf

1

AD898 Overhaul Manual Ch3– Tool List

Part III 3-2

9 93-83000 BP Allen key (metric -straight)

1

10 S26-58902 Gauge Block 1

11 S26-58903 Clamp Bar

2

12 SPP-00081 Torque Gauge 1200gfcm

1

13 SPP-00082 Torque Wrench 120 kgfcm

1

14 SPP-00083 Torque driver 12 kgfcm

1


1


1

17 SPP-00087 Dial indicator 513-101-1(8mm stem)

1

18 SPP-00088 Dial indicator (1mm and range 1mm)

1


Ch3– Tool List

Part III 3-3

19 SPP-00089 Dial Height Gauge 192-130

1

20 SPP-00091 Gram gauge 100-1000gf

1


1


1

23 SPP-00096 Holding bar 900321,100mm long

1

24 SPP-00097 Magnetic stand ( Fine adjustment )

1

25 SPP-00098 Push and push gauge 10KG

1

26 SPP-00100 Swivel Clamp 900321 1

AD898 Overhaul Manual Ch3– Tool List

Part III 3-4

27 SPP-00258 Belt tension meter Vendor Name: Clavis Model no. : Belt tension meter type 5

1

28 049-03001 Oil Stone Fine 25MM Flat

1

29 NO ASM part no. and customer can buy this at the market

Ring Piler

1


G Clamp (around 80 mm)

3


Leveling table

1


Oscilloscope

1

Optional Items 1 SPP-00295 6.0MM HEX BIT USE IN

TORQUE DRIVER 1

2 SPP-00296 1.5MM HEX BIT USE IN TORQUE DRIVER

1


1


1


1


1


1


Ch3– Tool List

Part III 3-5

8 SPP-00302 7MM NUT SOCKET USE IN WRENCH

1


1


1

11 SPP-00305 10.0MM NUT SOCKET USE IN WRENCH

1


1

13 SPP-00307 3.0MM SOCKET USE IN TORQUE WRENCH

1


1


1


1


1


CH4-Grease and Lubricant

Part III 4-1

Chapter 4 Grease and Lubricant

Name ASM P/N Remark Usage Qty

NSK grease PS 2, Light duty 00-50019 Ballscrew, leadscrew 80g

NSK grease LG2, Clean Room 00-00145 Ballscrew, leadscrew 80g

Dunwell EP-2 (high temp, lithium soap base, multi- purpose)

00-50020 Bearing , cross roller(slider) 14 OZ

JOJOBA oil (filed test with good anti friction property on lead-screw assy.)

00-50022

Specially for die bonder W/H Table

4" X 8" 6" X 6" 8" X 8"

1 L

THK AFF grease, Clean Room Base Oil: High-grade Synthetic Oil Consistency Enhancer: Lithium-based

00-00144 LM guide 70g

THK AFB grease Base Oil: Refined Mineral Oil Consistency Enhancer: Lithium-based

00-00275 LM guide 400g

Kluber Staburags Grease NBU12/300KP 00-50023 Bond Head X, cross

roller way, bearing 1Kg

AD898 Overhaul Manual Ch4 – Grease and Lubricant

Part III 4-2

4.1 Tools for Preventive Maintenance

Name P/N Usage Photo

THK grease gun unit 00-00146 For ballscrew,

LM guide slider

Syringe Nil For LM guide

Alcohol Nil For cleaning

Dustless / lint-free paper Nil For cleaning

AD898 Overhaul Manual Ch5 – Loctite and Where to Use

Part III 5-2

Chapter 5 Loctite and Where to Use

Loctite Photo Appearance Cure Usage 222

Purple liquid Anaerobic Threadlocking. Particularly suitable for applications such as adjustment of set screws, small diameter or long engagement length fasteners, where easy disassembly is required without shearing the screw. Screws up to ¼” diameters.

243

Blue liquid Anaerobic Threadlocking. Particularly suitable for applications on less active substrates such as stainless steel and plated surfaces, which prevents loosening and leakage from shock and vibration. While disassembly with hand tools is required for servicing. Screws up to ¾” diameters.

406

Transparent liquid

Humidity (Although full functional strength is developed in a relatively short time, curing continues for at least 24 hours before full chemical/solvent resistance is developed.)

Bonding. Designed for bonding of plastics and elastomeric materials where very fast fixturing is required.

409

Clear to slightly cloudy gel


Bonding. Suitable for plastics, rubbers and metals. It prevents adhesive flow even on vertical surfaces.


CH5-Grease and Lubricant

Part III 5-3

498

Transparent liquid


Bonding. Designed for bonding of rubbers, plastics and metals where heat resistance is required.

609

Green liquid Anaerobic Retaining. Designed for the bonding of cylindrical fitting parts and prevents loosening and leakage from shock and vibration.

1401C Red Anaerobic Sealing. Synthetic-resin locking agents that prevent screws and bolts from loosening, leaking, or rusting.

AD898 Overhaul Manual Ch6 – Standard LM Guide / Cross Roller Way Assembly

Part III 6-2

Chapter 6 Standard LM Guide/Cross Roller Way Assembly

The following parts would demonstrate the overhaul procedure of our standard parts. Those parts would include:

• Cross roller way • LM guide • A/C bearing • Ball screw • Timing belt • Coupling

6.1 Cross Roller Way Advantage: Cross roller way can run smoothly in very high accuracy Lubrication: Kluber Lubrication

Figure 6-1

Procedures: 1. Clean the mechanical parts with alcohol or dustless paper. 2. Add grease onto the cross roller way. 3. Usually one pair of cross roller way can be divided into two parts: adjustable and fix

one. Install the fix part onto the module and tighten all the screw from center to the two sides.

4. Install the adjustable part on to the module.

Cross roller way

End screw

Ball cage


Ch6 – Standard LM Guide / Cross Roller Way Assembly

Part III 6-3

Figure 6-2

Figure 6-3

5. Loosen the end screw of either side. 6. Keep moving the module and put the ball cage inside the gap between the two cross

roller way as in Figure 6-4.

Fix side of cross roller way

Adjustable side of cross roller way

Set screw on the adjustable side

No set screw on the fix side


Part III 6-4

7. Put back the end screw into the cross roller way.

Figure 6-4

8. Adjust the set screw at the adjustable side of the cross roller way until the whole module move smoothly and no bouncing during the movement. Also, the force should be within specification. (Different modules have different specification, please refer to corresponding chapter).

End screw



Part III 6-5

6.2 LM Guide Advantage: High efficiency, high accuracy, low cost Lubrication: THK AFB grease or THK AFF grease (for clean room). The grease being used

must be same as the original one and a thin layer of Grease should be added onto the surface of LM guide to prevent rusting.

Reference mark: A KB mark would be shown at the reference side of the LM guide. Procedures:

1. Check the part number of the LM guide and roller if they are the same. The mark on the rollers should be in the same direction.

2. Install the roller onto the LM guide and tighten the screws. The sequence of tightening the screw should follow the figure shown below.

Figure 6-5

3. The torque (kgf.cm) of the screw should follow the below table. M2 M2.5/M2.6 M3 M4 M5 M6 M8 5 12 20 42 90 140 310 4. Clean the LM guide with alcohol and cloth. 5. Use G clamp to fix the LM guide close to the reference side of the module. Tighten all

the screws from center to two sides. 6. If there is no reference side on the module, use the KB side as reference. Check the

parallelism of the LM guide with dial gauge and specification should be within 10um as Figure 6-6.

7. Check the preload force of the roller and let this value be A.


Part III 6-6

Figure 6-6 Checking Parallelism of the LM Guide

8. Put the module onto the rollers but not tighten all the screws. 9. Check the loaded force of the LM guide and let this value be B. The vale of B should

be smaller than A+100gf.cm. 10. Also check the loaded force in reverse direction and let this value be C. The value of

C should be smaller than A+100gf.cm.

Figure 6-7 Checking the loaded sliding force of the LM Guide

Remarks: The parallelism of the LM guide for normal purpose is 10um.

Reference side

Testing point

Maximum value

Minimum value



Part III 6-7

6.3 A/C Bearing Lubrication: Kluber lubrication Procedures: 1. Clean the A/C bearing with alcohol. 2. Add Kluber lubrication into the bearing. 3. There is a little circle mark located both in the inner bearing and the outer bearing.

Rotate the bearing such that the two circle marks stand in the same line as Figure 6-8.

Figure 6-8 Locate the marks on the bearings

4. Put the two bearing together as Figure 6-9 so that a V mark would be form on the

surface of the bearing. Usually the arrow would point to the shaft or nut.

Figure 6-9 Position the bearings to form a similar “V” mark


Part III 6-8

5. Install the bearing into the module hole. 6. Install a lock nut into the bearing and measure the torque. Let the value be A. 7. Tighten the lock nut with a specific torque driver and the torque should be smaller than

A+80gf.cm. 8. Install the E ring into the bearing and the torque should have no change. 9. The outer bearing was locked and there should be a gap between the bearing and module.

So tighten the bearing cover screw. Remarks: If there is a large change of torque after tightening the bearing cover screw, may be

• The module bearing hole is not perpendicular with the bearing. • Usually, four screws are used to lock the bearing cover. The screws should not be

tighten in one time but at least to tighten the screws in three times. • The module hole is not match with the bearing.



Part III 6-9

6.4 Ballscrew Advantage: High efficiency, less noise Lubrication: NSK PS2 or LG2 grease Procedures: 1. Check the torque of the ballscrew before adding grease. The torque should not exceed

30gf.cm and variation should be constant. 2. Add grease with grease gun using NSK PS2 or LG2 grease and then run the screw for 5

minutes as Figure 6-11.

Figure 6-10

Figure 6-11

3. Wait for 10 minutes after dry run of ballscrew to prevent the high temperature may affect the operation of ballscrew.

4. Check the torque and torque variation of ballscrew for full traveling distance. As the ballscrew turns, there would be a maximum value and a minimum value for each pitch such as (max1, min1) for the first pitch and (max2,min2) for the second pitch. Take the maximum value only for example the torque range would be max1 to max2 gf.cm.

5. Check the torque variation by comparing the torque difference for every pitch. For example, first pitch have max1 – min1 = 80, second pitch have max2 – max2 = 100. Then 100gf.cm would be the torque variation.


Part III 6-10

Figure 6-12

6. Assemble the ballscrew and the A/C bearing and the module. Do not tighten all the

screw but measure the torque first. 7. Measure the preload torque of ballscrew and A/C bearing and let the values be Tp and

Ta. 8. Measure the force of the module and ballscrew traveling distance. The value would be F

and L respectively. 9. The total torque would be T=Tp+Ta+F*L/(2*3.14) 10. After tightening all the screw, the torque should be smaller than T+100gf.cm.

Torque value



Part III 6-11

6.5 Timing Belt Things to be notice during installation of timing belt: 1. The timing gear should be parallel to each other and not tilted. 2. The timing tension should not be too tight or too loose. 3. The size of timing belt gear is matched to each other such that the size of gears cannot

be changed. 4. The screw should be tightened well. 5. During the operation of timing belt, no noise should be made and movement should be

very smooth.

Figure 6-13 Tension Meter

Figure 6-14 Checking the Timing Belt Position

The timing belt gear is parallel with each other and the tension of timing belt is not too tight or too loose.


Part III 6-12

6.6 Coupling Advantage: Constant angular speed, oil resistance, anti-corrosive Application: Connect 2 shafts which may not be parallel, transmitting the power, reduce the vibration. Marking: DKN20/42-6.35H7-8H7 (DKN20:20 Rated torque is 2Nm; 42:Length of coupling; 6.35H7-8H7:Hole size and tolerance. Procedures:

1. Incoming material inspection: no scratch on surface, no bend, no dirt, gap between pitch is even.

2. Hole size of the coupling should match with the shaft. 2 shafts should not touch each other.

3. When assembly, the 2 shafts should in the same center line, when loosen the locking screws, the coupling can move freely. When tighten the locking screw on one side, while turning the shaft on the other side, the coupling should not turn.

Figure 6-15 Coupling

4. The shafts’ length inside the coupling should exceed the locking screw area toward inward.

5. Locking screws will come with the coupling, tightening force should follow “Screw Usages and Requirements” (screws should add Loctite#222), follow special instruction on special requirement.

6. Follow instruction to add RED Loctite to mark the screws have already tightened. Remarks: Before assembly, don’t extend, compress, bend the coupling with hands to reduce its accuracy.

Gap should be even

Locking screws



Part III 6-13

Figure 6-16

Torque Driver

Red Loctite


Ch7 – Voice Coil & Linear Motor Resistance

Part III 7-1

Chapter 7 Voice Coil & Linear Motor Resistance

Picture Part No. Description Resistance (Ω )

01-20343 (Bond Head Table) Micro-X Coil-4 (MAG6) Assy. (red and white cables with normal value 7.9~8.0Ω )

7.15~9.96

01-25178 (Bond Arm) BF VCM Module (for PF2 bond arm)

11±1

S02-17117 (Bond Optic) 8912 Y Motor Assy. (red and white cables with normal value 1.2~1.3Ω )

1.05~1.89

S01-17906 Indexer Linear Motor Coil Assy. (pairs with red and white, red and black, white and black with normal value 1.1Ω )

0.9~1.2

S01-17752 (Wafer Table) Linear Motor Male: 1-2

2-3 1-3

1±0.2 for X 2±0.3 for Y

01-19158 (Work Holder) Clamp Coil Assy. (red and white cables with normal value 6.2Ω )

6.5±0.3


Ch8 – Screw Usages and Requirements

Part III 8-1

Chapter 8 Screw Usages and Requirements

Item Description Screw Type Washer SpacerLoctite

222 (301-00110-1)

Tightening Torque (kgf.cm)

Loctite 1401C

(SS-00273)Remark

M2 5

M2.5(6) 12

M3 20

M4 42

M5 90

M6 140

1 Cross Roller or LM Guide

M8

ball head

√ * √

310

√ (LM guide

rail not required, LM guide block need to add)

The screw should be in

the hold center

M2 4

M2.5(6) 10

M3 18

M4 40

M5 80

M6

√

130

2 Coupling, Pulley, Clamp Rring, Ball

Screw, Lead Screw, Nut Mount,

Motor

4-40

ball head

X

* √

18

√

3 Sensor Flag , Cover

ALL ball head

√ √ * * Depend on the design

All Screw ball head

√ * X 4 Heating Area

All Screw flat head

X * X

General specification

X Use OKS240

All Screw ball head

√ * X * 5 ≤2 mm Aluminium Board

All Screw flat head

X X X

General specX0.7

*

M2 2

M2.5 4

M3 6

M4 14

M5 29

M6 49

M8

ball head

√ √ X

122

M2 2

M2.5 4

M3 6

6 Non Metal

M4

other screw

X X X

14

*

AD898 Overhaul Manual Ch7 – Screw Usages and Requirements

Part III 8-2

Item Description Screw Type Washer SpacerLoctite

222 (301-00110-1)

Tightening Torque (kgf.cm)

Loctite 1401C

(SS-00273)Remark

M5 29

M6 49

M8 122

M2 4

M2.5(6) 8

M3 13

M4 28

M5 60

M6 94

M8

M10

M12

M14

M16

M20

ball head

√ * *

Tighten with appropriate

torque

*

M2 3

M2.5/M2.6 6

M3 10

M4 18

M5

flat head

X X √(Cover

screw no need to add）

35

All Set Screw X X √ *

*

4-40 13

7 General case

6-32

ball head

√ * *

25

*

√ : Need to add loctite X : No need to add * : Depended on requirement

Note: 1) Non metal screw, no need to add Loctite. 2) Install with specific requirement. 3) NON metal including non metal thread and pressed non metal. 4) General screw selection: Same part and location use same type of screws. The thread

length of screw is larger the twice of outer diameter of the screws and the thread cannot over more than two threads.

5) For Loctite 1401C, only for specific requirement.

~~~ End of Part III ~~~

AD898 Overhaul Part III_Rev C

Documents

linear motor

china post

ad898 overhaul

asm assembly

part iii 1

part iii

module assembly

korea tel