ACS Customers Seminar Presentation , SPS 2013

Innovative Motion Control Solutions

SPS, Nov. 2013

November 2013

Agenda

10:00 – 10:05 Gathering & seminar introduction (Z'eev)10:05 – 10:30 450mm wafer handling (Z'eev)10:30 – 11:15 Look-ahead algorithm, G&M-codes,

Network cable failure detection & recovery (Shura)11:15 – 11:30 Break 11:30 – 12:15 Motion enhancements new features (Boaz)12:15 – 13:00 Motion enhancements new features-cont. (Maksim)

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450mm Wafer Handlingand Inspection

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State of the Art Motion Control Solutions 450mm (& 300mm) Wafer Inspection

> 450mm wafer inspection challenges and general motion system structure

> System/subsystem motion control requirements> ACS technologies and solutions to meet specific requirements> Complete solution summary

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Agenda

Challenges in 450mm Wafer Production / Inspection

Extremetech.com

> Larger work envelope, higher speeds and larger masses> Equal or better level of precision and accuracy!

Wikipedia.com6

Motion System Structure

> High precision wafer positioning stage> Gantry (XX’Y) structures preferred over basic XY> Higher performance

› stand-still jitter and better constant velocity› High resolution laser based encoders or interferometers› May require multiple feedbacks with real-time feedback switching› Control algorithms become more complex (servo, homing, etc.)

> Inspection heads> Relatively small linear/rotary motors (brushless, brush, or stepper)> Digital and Analog I/O> Synchronization with motion (camera, laser, etc.)

> Auxiliary axes and I/Os> Transport/handling, alignment, optics focus> Safety interlocks, GP digital/analog I/O

> User interface & high level machine control typically resides on PC

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> Large Gantry – 750 x 750 mm or more travel area> Typical Motion Performance Specs

> High speed >1 m/sec> High accuracy <50nm over 450mm> Fastest possible Move & Settle to ±1nm window> Smooth velocity

(±3nm following error @ 100mm/sec)

> Typical Stage Components> Air or precision mechanical bearing> Linear servomotors> High resolution optical and/or laser interferometer and

laser encoder

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Wafer Stage Motion Control Requirements

> Dynamic Z auto-focus> Multiple low power motors and feedback types> Camera/Optic triggering based on XY or XYZ position> Focus accuracy of 100nm> Automatic, smooth switching to & from focus error sensor

and position encoder feedback> Mount driver and I/O on moving heads to simplify cabling

cables

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Inspection HeadsMotion Control Requirements

> Multiple motor and feedback types, wide range of power levels

> Wide range of I/O types, fast response time (=sub-millisecond)

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Auxiliary Axes & I/OMotion Control Requirements

> MC4Unt integrated multi-axis drive chassis> Includes

› Controller & EtherCAT master› Modular drives› Power supply

> Revolutionary NanoPWMTM drives offer performance better than linear drives

> MIMO gantry control> Advanced ServoBoostTM algorithm for optimal

performance and stability> Additional advanced features

› 2D/3D Error Mapping› Profile Shaping› Kinematics transformations

Wafer Stage SubsystemControl Solution

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> SPiiPlus EtherCAT Motion and Machine Controller> Up to 32 (64) synchronized axes & 1000’s I/Os> Multitasking with 64 threads / programs> Flexible programming

> Real time ACSPL+> IEC61131-3 PLC> Host libraries

> Other possible controllers> SPiiPlusSC PC based Soft Controller> SPiiPlusNTM standalone controller

MC4UNT Complete System Motion and Machine Controllers

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> Based on ACS’ proprietary PWMBoostTM technology developed over the last 5 years

> Replaces linear drives, providing:> Better performance> Sub-nano jitter> Smooth velocity (velocity

error<<1%)> Higher voltages and higher

currents

NanoPWMTM Drives Better than Linear Drives

1nm steps

±0.4nm jitter

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NanoPWMTM Drives Better than Linear Drives

> A much smaller package> Improved reliability> Better price

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> ServoBoostTM is a proprietary real time servo algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates for it and attenuates its impact> Predicts the disturbances anticipated and prevents their negative effects

> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability, lower jitter,

smoother velocity> Excellent robustness

› Large changes in load › Varying system parameters

> Automatic compensation of disturbances, resonances, axes interaction, cogging and more

Wafer Stage Control TechnologyServoBoostTM

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> UDMLC – 2 , 4-axis compact EtherCAT drive module for small motors > Designed for remote mounting (100x75x48mm3)> 12 to 48Vdc, 1.25/2.5A, 2.5/5A, 5/10A per axis (dual

axis)> Brush, brushless, stepper, voice coil motors> Incremental and absolute digital encoders> Autofocus control algorithm> Multiple GP I/Os

> IOMNT> Compact (101x65x59mm3)> Up to 32/32 I/O per module> 24Vdc, 0.5A per output

Inspection Heads SubsystemControl Solution

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> Proprietary autofocus algorithm developed for wafer inspection> On the fly switching between multiple feedback sources> Maintain focus accuracy while moving (high bandwidth)

Inspection Head Control TechnologyAutofocus

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> UDMxx – Multi-axis EtherCAT drive modules for various motor sizes> Wide power ranges (100W to 3kW peak)> Brush, brushless, stepper, voice coil motors> Incremental, absolute digital, SinCos encoders> Multiple GP I/Os

> IOMNT (if additional I/O needed)> EtherCAT modules for interfacing to

standard drives > UDIxx - +/-10V commands, encoder inputs> PDMnt - Step/Dir stepper and servo drives

> 3rd Party EtherCAT drives and I/O

Auxiliary Subsystem Axes & I/O

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4 232/32

MC4U EC Master

with NanoPWM

DrivesUDMLC IOMNT IOMNTUDMXX

Wafer Stage Inspection Heads Auxiliary Axes & I/O

Additional optional drives

and I/O

32/323-8

A Complete Control Solutionfor Wafer Inspection

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> Highest Performance> Advanced algorithms ServoBoost, MIMO Gantry, Autofocus, feedbacks switching> NanoPWM drives to handle larger loads with higher dynamics needs

> Scalability & Flexibility> Standard Industrial EtherCAT Network> 64 axes & 1000’s of I/Os> Support of 3rd party devices

> Short time to market> One common platform for many machines and system configurations > Single development environment for entire system with full simulator

> Suitable for many other demanding applications> Electronic Mfg Pick/Place, Flat Panel Display Inspection, Wide Format Inkjet

Printing, SEM, CMM

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Summary

Look-Ahead Algorithm

G&M-Codes Programming Support

Network Cable Failure Detection & Recovery

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Look-ahead in SPiiPlusNTAgenda

> Market needs> Look-ahead advantages> SPiiPlusNT XSEG capabilities> Corner processing> Example> Further XSEG extensions

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Look-ahead in SPiiPlusNT Market Needs

> Markets:> Cutting applications (especially laser cutting)> High-speed precise machining

> Applications that challenge to perform a process more efficiently and with better quality

> Technically, it means to pass trajectory with higher velocity and smaller tracking (position) error

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Look-ahead Advantage

> Look-ahead is an ability of the motion controller to detect conditions that cause exceeding of the machine limits and correct the motion profile automatically and in advance

> Thus, with Look-ahead algorithm better performance and accuracy of the trajectory following is achieved

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Look-ahead Algorithm in SPiiPlusNT

> Look-ahead algorithm in SPiiPlusNT is implemented as part of the new segmented motion - XSEG

> Main capabilities of XSEG:• Automatic detection of corners and segments, where

required velocity exceeds axis limits (maximal acceleration, jerk)

• Automatic velocity reduction at such segments• Building-up velocity profile using multi-segment look-ahead

algorithm• Segments adding “on-the-fly” (competitive advantage)• Velocity override (competitive advantage)• Outputs synchronization (competitive advantage)

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Corner Processing

> The controller automatically detects the corner and can automatically calculate the corner velocity in order to pass it with no acceleration/jerk jumps

> As alternative option, the corner velocity can be set by the application

Path Corner

Corner angle Exact path option

Corner velocity Corner

Required velocity Velocity profile

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Corner ProcessingScope Graph

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XSEG- Further Extensions

> Different geometry processing> Smooth path with permitted deviation/curvature> Smooth path with minimal velocity

> 3D segments

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RS274 Numerical Control Language (G-code)Agenda

> Market needs> Implementation> Execution> Integration with ACSPL+

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G-code Market Needs

> Market Needs:> G&M-codes language is the de-facto standard for CNC

machines> CAD/CAM systems produce G&M-codes programs for

many other markets, such as› cutting applications › different high-speed precise machining

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G-code in SPiiPlusNT

> SPiiPlusNT implements many common G&M codes, specifically motion-related commands, tool and offset compensation commands, absolute/increment programming, digital outputs control, etc.

Main advantages:> Sophisticated look-ahead algorithm for segments

processing> Outputs synchronization with the motion> Integration of G-code program with ACSPL+> Ability to implement unknown G-codes by the user

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G-code Program Execution

> Editing, debugging and execution of G-code program is done the same way as ACSPL+ program

CAD/CAM SW

N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2

G-code program as text file

SPiiPlusNT controllerSPiiPlusNT controller


ACSPL+ bufferACSPL+ buffer

G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program

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G-code with ACSPL+

> ACSPL+ commands and G-code commands can be mixed within the controller buffer

CAD/CAM SW




N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90

N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2

ACSPL+ bufferACSPL+ bufferG-code program is downloaded to the controller either by SPiiPlus MMI or by the user program

OUT0.0=1 ! ACSPL+ line

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Implementing G-code Commands by the User

> Unknown G-code commands support can be easily added by implementing G-code subroutine

CAD/CAM SW

N10 G0 X-90 Y-100N11 G54N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2



N10 G0 X-90 Y-100

N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2

ACSPL+ bufferACSPL+ buffer

G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program

N11 G54 G54:N10 G10 X10 Y20 Z30RET

D-bufferD-buffer

N11 G54

Unknown G-code command

implementation

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Network Cable FailureDetection & RecoveryAgenda

> Demonstration movie> Advantages> Prerequisites> Functionality

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Network Cable Failure Detection & Recovery - Demonstration

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Network Cable Failure Detection & Recovery - Advantages

> In case of cable or connector failure: > the machine can be immediately recovered without a need

to repair the broken part> the location of broken cable or connector is detected by the

controller that simplifies the machine repair

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Network Cable Failure Detection & Recovery - Prerequisites

> In order to support Enhanced Network Failure and Recovery, the machine setup should provide:> Additional (2nd) EtherCAT port in the EtherCAT Master

module> Additional cable that connect the 2nd EtherCAT port to the

network> Currently, only SPiiPlusSC with two EtherCAT ports can be

used as EtherCAT Master> In the future also SPiiPlusNTM and MC4U with 2nd EtherCAT

port will be available

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Network Cable Failure Detection & Recovery - Functionality

> Detection of the location of the failure> The system reactivation in the simple and quick way, with no

need for the machine re-initialization> Ability to save the configuration after the failure, so at the

subsequent power-up, the system will be initialized correctly (even if the cable is still broken)

> Quick and simple way to reinitialize the network after the failure repair

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New Servo & Motion Features

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Agenda

> ServoBoostTM – for enhancement of servo performance> Cogging compensation – for smoother motion> Profile shaping – for reduction of vibrations > Smooth Feedback switching – for systems with multiple feedback

devices> Enhanced fast Sin-Cos – for high resolution Sin-Cos encoders, up to

6[MHz]

> MotionBoostTM – for faster motion> One parameter tuning – for simpler high performance servo tuning> BiQuad filters – for solving resonance issues> NanoPWMTM – for ultimate jitter performance

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ServoBoostTM

Better Servo Performance

> ServoBoostTM is a real time algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates it and attenuates its impact

> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability,

lower jitter, better constant velocity> Automatic adaptation to large changes in load and system

parameters> Automatic compensation of disturbances, resonances, axes

interaction, cogging and more> Applicable to all ACS high performance (HP) products

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Adaptation to Load Changes

No loadTotal moving mass is increased x 3

• System performance may deteriorate or even become unstable due to significant load changes.

• With ServoBoostTM , the performance remains consistent and stable despite of load changes and disturbances.

Position error with PID control

Position error with ServoBoostTM

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Adaptation to Increasing Load by x3

> With standard PID algorithm> The system is still stable> The bandwidth is 3 times smaller

(20Hz instead of 60Hz)> Poor performance

> With ServoBoostTM

> maintains the 60Hz bandwidth > Same performance> It also compensates the resonance

created by the elevated center of gravity

Initial system

With extra loadStandard PID

With extra loadUsing ServoBoostTM

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Crossover Error Elimination-Several Axes, One Machine Frame

> Due to reaction forces of accelerating axes the frame vibrates and deteriorates overall performance. Appears in almost all multi axes machines.

> ServoBoostTM eliminates this interaction, enhancingplacement accuracy

Position Error 5[nm/div]

Without ServoBoostTM

With ServoBoostTM

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Automatic Cogging Compensation

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Cogging and Periodic Disturbances

> Brushless motors may suffer from periodic disturbances that result from imperfections in motor structure or electrical drive.

> These disturbances create speed fluctuations, vibrations, acoustic noise, and an excitation of lightly damped resonances.

> Cogging is an example of a periodic disturbance: non-uniform force that is caused by magnetic interactions between magnets and the rotor slots in the motor.

> Motors with low cogging are usually more expensive.

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Cogging and Periodic Disturbances

> Cogging Compensation algorithm compensates cogging automatically and provides an “electronic upgrade” to inexpensive motors.

> ServoBoostTM provides automatic compensation to cogging and other periodic disturbances.

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Profile Shaping

> If a first impulse starts a vibration, a second impulse can cancel it.

> Timing and magnitude of the second impulse must be accurate.

> Additional pulses may be added to improve robustness.> Several vibration modes can be treated.

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Profile Shaping

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Switching between Multiple Feedback Devices

> In systems with more than one feedback device, it’s possible that some of the feedbacks do not cover the entire travel range

> Maximal length of glass scales/ laser interferometer mirrors is limited and insufficient for some applications

> Encoders with multiple short glass scales can be less costly than one long scale encoder

> In moving magnet applications the encoder scale may be attached to the moving magnet, that moves through multiple encoder readheads

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Multiple Encoder Scales Switching

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Multiple Encoder Scales Switching

> Fast & Smooth switching

Switching

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Fast Sin-Cos Support

> Available for UDMNT, UDIHP> Soon available for MC4U

Old support New support

Sine periods/sec 2.5x106 6x106

Suitable for high resolution feedback With restrictions Yes

Suitable for PWM drives No Yes

> Improved support has been developed for high resolution Sin-Cos feedbacks

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MotionBoostTM – Solution for Fast & Aggressive Motion

> MotionBoostTM technology implements an enhanced motion profile

> Designed to :> Improve settling time by reducing the residual vibrations> Lower peak current, acceleration and velocity values

> Mostly effective in short aggressive moves with aggressive servo

> Ideal for Pick and Place applications and wire bonders> Very short move durations are possible with SPiiPlusSC using

CTIME = 0.2[msec]

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MotionBoostTM Example10[mm] motion in 58[msec]

Regular PTP MotionBoostTM

Move and settle to 1[µm] 170[msec] 84[msec] ~50% improvementof move and settle

Position error with PTP

Position error with Motion Boost

5[µm] div

Zoom In

1[µm] div

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Simplified Tuning forHigh Performance

> One parameter tuning of position and velocity loops> The user:

› Specifies the desired bandwidth of the system> The tool:

› Identifies the characteristics of the system› Automatically calculates the servo parameters

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Easy Interface & Reliable Result

Tuning example:

Resulted FRF

• Tuning is based on a single parameter: system bandwidth

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Inertia Mismatch

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Inertia Mismatch Compensation

> Stability issues may occur when a heavy load is connected to relatively low-inertia motor Inertia motor through a compliant transmission> At low frequencies the system behaves as a rigidly coupled

motor and load> At high frequencies the load is effectively decoupled from

the motor. The gain of the plant significantly increases and reflects the motor inertia only

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High Order BiQuad Filters – for InertiaMismatch Compensation

> ACS offers fully adjustable high order BiQuads filters in the servo loops.

> Examples where BiQuads can be handy:> Inertia mismatch compensation> Frame vibration compensation> Attenuation of resonances

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BiQuad Filters– Inertia MismatchCompensation

> Example: Cardiac CT scanner> Rotation motor connected by a belt to the load > Inertia mismatch of 10,000!

Rigidly coupled motor and load

Decoupling of load raises the plant gain

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> Using a regular PID results in a very low bandwidth with poor stability margins.

Sub-Hertz Bandwidth

Poor Stability marginscauses high resonance

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> A proper selection of Biquad filters results in a high bandwidth with significantly improved stability margins

~30Hz Bandwidth

Sufficient Stability margins

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NanoPWM™ Drives

NanoPWMTM Drive Technology is a brand new state of the art proprietary PWM power stage implementation in select ACS drives, that provides:> As good or better performance than precision linear drives

> Sub-nano jitter> Smooth velocity (velocity error<<1%)

> Higher voltages and higher currents in a much smaller and cost effective package when compared with commercially available linear drives

> Improved reliability over linear drives

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NanoPWM™ - Compact Solution

> Simpler to use:> Integrated into MC4U control module

for full hardware multi-axis systemssolution

> Single bus supply vs. bipolarsupplies in most linear drives

> Digitally adjustable advancedcurrent loop vs. primitivenon-adjustable analog loopsin most linear drives

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NanoPWM™ Drives

> Ultimate solution for:> 450mm / 300mm wafer handling and inspection stages> FPD handling and inspection> Demanding applications that require high performance

> High power output & compact footprint> 100Vdc, up to 15A/30A (continuous / peak)

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NanoPWM™ Technology

> Sub-nanometer position jitter performance> Nanometer stepping:

1nm steps

±0.4nm jitter

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Significantly Lower Standstill Jittercomparing to equivalent 3rd party linear drives

3rd party linear drive

NanoPWMTM drive

NanoPWMTM

(100V, 30Apeak)3rd party linear drive

(±50V, 30Apeak )

Stand still jitter[nm] p-p 1.32 3.56

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NanoPWMTM drive

Better Results at Low Speed comparing to off-the-shelf linear drives

(*) Results taken on an ironless linear stage with cross roller bearings

3rd party linear drive

NanoPWMTM 3rd party linear drive

Position Error[nm] p-p@ 1[mm/sec] 22.3 47.8

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NanoPWM™ is Superior to Any Other Equivalent PWM Drive in the Market

NanoPWMTM drive

Regular PWM drive

NanoPWMTM

100V, 30[A]Standard PWM

100V, 30[A]

Stand still jitter[nm] p-p 1.4 35

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NanoPWM™ the Best PWM Drive One Can Get!

NanoPWMTM 3rd party linear drive

Package size Small Big

Complexity Low High

Performance Very Good Good

Reliability Very Good Problematic

Price Lower High

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Summary

> Algorithms for better system performance were discussed–ServoBoostTM, MotionBoostTM, Cogging compensation, profile shaping and BiQuad filters

> New developments were presented:> Enhanced support for fast Sin-Cos> Support for switching between multiple feedback devices> New tool for advanced and simpler tuning> NanoPWMTM drives – for ultimate jitter performance, better

than cumbersome linear drives

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THANK YOU

ACS Customers Seminar Presentation , SPS 2013

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