A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes

Page 1 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=1' data-page='1' class='cut-thumb lazyload' alt='Page 1: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/1.jpg' width='140' height='200' /> Page 2 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=2' data-page='2' class='cut-thumb lazyload' alt='Page 2: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/2.jpg' width='140' height='200' /> Page 3 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=3' data-page='3' class='cut-thumb lazyload' alt='Page 3: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/3.jpg' width='140' height='200' /> Page 4 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=4' data-page='4' class='cut-thumb lazyload' alt='Page 4: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/4.jpg' width='140' height='200' /> Page 5 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=5' data-page='5' class='cut-thumb lazyload' alt='Page 5: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/5.jpg' width='140' height='200' /> Page 6 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=6' data-page='6' class='cut-thumb lazyload' alt='Page 6: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/6.jpg' width='140' height='200' /> Page 7 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=7' data-page='7' class='cut-thumb lazyload' alt='Page 7: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/7.jpg' width='140' height='200' /> Page 8 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=8' data-page='8' class='cut-thumb lazyload' alt='Page 8: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/8.jpg' width='140' height='200' /> Page 9 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=9' data-page='9' class='cut-thumb lazyload' alt='Page 9: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/9.jpg' width='140' height='200' /> Page 10 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=10' data-page='10' class='cut-thumb lazyload' alt='Page 10: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/10.jpg' width='140' height='200' /> Page 11 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=11' data-page='11' class='cut-thumb lazyload' alt='Page 11: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/11.jpg' width='140' height='200' /> Page 12 <img data-url='document/a9r9738-harvard-university-new-liquid-precursors-for-cvd-of-metal-contaning.html?page=12' data-page='12' class='cut-thumb lazyload' alt='Page 12: A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader034.cupdf.com/reader034/viewer/2022050214/5f5fe36d59b5897f8d6e3e33/html5/thumbnails/12.jpg' width='140' height='200' />

A9R9738 - Harvard University...NEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G. Gordon Harvard University 12 Oxford Street, Cambridge, MA 02138 USA ABSTRACT CVD processes

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