06/06/22 06/06/22 1 A STUDY OF LOW LEAKAGE A STUDY OF LOW LEAKAGE FAILURE MECHANISM FAILURE MECHANISM OF MULTILAYER 7XR CERAMIC CAPACITOR OF MULTILAYER 7XR CERAMIC CAPACITOR Zhaofeng Wang Zhaofeng Wang International Rectifier International Rectifier Corp. Corp. ISTFA 2006
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04/09/2304/09/23 11
A STUDY OF LOW LEAKAGE A STUDY OF LOW LEAKAGE FAILURE MECHANISM FAILURE MECHANISM
OF MULTILAYER 7XR CERAMIC OF MULTILAYER 7XR CERAMIC CAPACITORCAPACITOR
Zhaofeng Wang Zhaofeng Wang
International Rectifier Corp.International Rectifier Corp.
ISTFA 2006
04/09/2304/09/23 22
Presentation Presentation OutlineOutline
IntroductionIntroduction Hot Spot DetectionHot Spot Detection Precision localizationPrecision localization SEM, STEM AnalysisSEM, STEM Analysis SummarySummary AcknowledgementAcknowledgement
ISTFA 2006
04/09/2304/09/23 33
Illustration of a leaky capacitor in application circuit
and its IV behavior
04/09/2304/09/23 44
Sectioning and thermal imaging to
confirm/localize the hot spot in x-direction
x
zy
04/09/2304/09/23 55
Illustration of approaching the failure site through y-direction sectioning and photon
emission micro-probing
X - direction y-direction
04/09/2304/09/23 66
Laser marks
Illustration of precision localization using Laser marking, sectioning and photon emission micro-probing
ISTFA 2006
04/09/2304/09/23 77
failure site SEM: there is no observable physical defect
ISTFA 2006
04/09/2304/09/23 88SEM close-up showing a grain boundary micro-fracture
04/09/2304/09/23 99
High leakage (mA range) failure sites showing micro-fractures
intergranular transgranular
ISTFA 2006
04/09/2304/09/23 1010
STEM image of a failure site showing compositional contrast
ISTFA 2006
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