IONIX 2“UHV Magnetron Assemblies Specifications and reference dwg ® IONIX MAGNETRON SPUTTERING TECHNOLOGY
IONIX 2“UHV Magnetron Assemblies
Specifications and reference dwg
®
IONIXMAGNETRON SPUTTERING TECHNOLOGY
›› INTRODUCTION
ION`X®
09/15www. thfc.de
Rely on • quality • know-how • performance
• metallic vacuum sealing• mounts on DN 63 / 16 CF• adjustable target clamping• bakeable 200 °C• magnet array for ferromagnetic targets
PLANAR MAGNETRON SPUTTERING SOURCEION`X-2”UHV
2
®
IONIXquality · know-how · performance
2www. thfc.de 09/17
6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB
Bakeout temperature
max. temperature < 60 °C
Magnetron dimensions
diameter < 192 mm
height < 70 mm
weight < 9 kg
Interface DN 50 KF
Proposed mounting style tube Ø1” x 300 mm
Construction materials stainless steelOFHC - type copper
PTFETypical rates
Mo, 8 Å/s, 1 kW DC, 150 mm
Cu, 24 Å/s, 1 kW DC, 150 mm
Accessories & Options
mounting option < tube Ø 3/4” x 300 mm
quick coupling <feedthrough
for tube Ø 1” and Ø 3/4”
argon injection < model no. IX6_A135-xx
power connector < 7/16-type
magnet array for <magnetic materials
on request
± 30° tilt <
fl ange mounting <
SS target clamps for <specifi ed thicknessSS target clamps for <bond targets
* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.
** RF-Version requires special connector and installation. More details on request.
5
ULTRAHIGH VACUUM MAGNETRON ITEM SIZE PART
NUMBER DESCRIPTION VACUUMINTERFACE
1.1
2” Ø IX2U_9107
2” UHV magnetron on DN 63 CF• targets 2–6 mm thick, sfliding anode• threaded target clamp • SmCo magnets, bakeable 200 °C• sputters ferromagnetic targets Ni 2 mm, Fe 1 mm• power connector 7/16-type• reference drawing IX2U_8107•
DN 63 CF
1.2
2” Ø IX2U_9201_CF16
2” UHV magnetron with DN 16 CF, internal mounting• targets 1–6 mm thick, sliding anode • SmCo magnets, bakeable 200 °C• sputters ferromagnetic targets Ni 2 mm, Fe 1 mm • reference drawing IX2U_8201•
DN 16 CF
OPTIONS2” Ø argon injection• 2” Ø chimney• 2” Ø ± 30° tilt• 2” Ø extended fl ange mounting•
›› PRODUCT OVERVIEW
www. thfc.de
Rely on • quality • know-how • performance
ION`X®
09/153
®
IONIXquality · know-how · performance
3www. thfc.de 09/17
6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB
Bakeout temperature
max. temperature < 60 °C
Magnetron dimensions
diameter < 192 mm
height < 70 mm
weight < 9 kg
Interface DN 50 KF
Proposed mounting style tube Ø1” x 300 mm
Construction materials stainless steelOFHC - type copper
PTFETypical rates
Mo, 8 Å/s, 1 kW DC, 150 mm
Cu, 24 Å/s, 1 kW DC, 150 mm
Accessories & Options
mounting option < tube Ø 3/4” x 300 mm
quick coupling <feedthrough
for tube Ø 1” and Ø 3/4”
argon injection < model no. IX6_A135-xx
power connector < 7/16-type
magnet array for <magnetic materials
on request
± 30° tilt <
fl ange mounting <
SS target clamps for <specifi ed thicknessSS target clamps for <bond targets
* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.
** RF-Version requires special connector and installation. More details on request.
5
www. thfc.de 09/15
2” ULTRAHIGH VACUUM MAGNETRON Model No. IX2U_9107 IX2U_9201
2” UHV FLANGE MOUNTED 2” UHV INTERNAL
Target
form < circular/planar
diameter < 2” ± 0.1mm
thickness < 2 to 6 mm
cooling < indirect
Operating pressure argon
nonmagnetic targets < 3 x 10 -3 to 10 -1 mbar
best performance < 5 x 10 -3 to 5 x 10 -2 mbar
vacuum sealing < welding, brazing, CF
Electrical specifi cations
max. power, watts DC/RF < 400 W DC / 400 W RF * **
max. voltage DC < 1000 V
max. current DC < 5 A
rec. power supply < 500 W DC / 600 W RF
Power connector
DC/RF < 7/16 type custom type
Cooling water
fl ow < 1 l / (min x kW)
min. fl ow < 1 l/min
max. inlet temperature < ≤ 30 °C
max. pressure < ≤ 2 bar open drain
water tubes < Ø 6 x Ø 4 mm PTFE
» SPECIFICATIONS
2” UHV3” UHV4” UHV5”UHV6” UHV8” UHV
44www. thfc.de 09/17
6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB
Bakeout temperature
max. temperature < 60 °C
Magnetron dimensions
diameter < 192 mm
height < 70 mm
weight < 9 kg
Interface DN 50 KF
Proposed mounting style tube Ø1” x 300 mm
Construction materials stainless steelOFHC - type copper
PTFETypical rates
Mo, 8 Å/s, 1 kW DC, 150 mm
Cu, 24 Å/s, 1 kW DC, 150 mm
Accessories & Options
mounting option < tube Ø 3/4” x 300 mm
quick coupling <feedthrough
for tube Ø 1” and Ø 3/4”
argon injection < model no. IX6_A135-xx
power connector < 7/16-type
magnet array for <magnetic materials
on request
± 30° tilt <
fl ange mounting <
SS target clamps for <specifi ed thicknessSS target clamps for <bond targets
* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.
** RF-Version requires special connector and installation. More details on request.
5
www. thfc.de 09/15
2” ULTRAHIGH VACUUM MAGNETRON Target 2” UHV FLANGE MOUNTED 2” UHV INTERNAL
Magnet array permanent SmCo
Bakeout temperature
max. temperature < 200 °C
Magnetron dimensions
diameter < 62 mm 64 mm
height < 43 mm 82 mm (+ 40 mm CF 16)
weight < 2 kg 1.5 kg
Vacuum interface DN 63 CF DN 16 CF
Proposed mounting style DN 63 CF DN 63 CF / DN 100 CF
Construction materials stainless steelOFHC - type copper
Al2O3
Typical rates
Al, 8 Å/s, 300 W DC, 100 mmCu, 15 Å/s, 300 W DC, 100 mm
Accessories & Options
target diameter < 50 mm
argon injection <
power connector < N-type, HN-type custom type
magnet array for <magnetic materials
Fe 2 - 3 mm, Ni 5 mm Fe 2 - 3 mm, Ni 5 mm
± 30° tilt < n.a.
fl ange mounting < DN 100 CF DN 63 CF / DN 100 CF
SS target clamps for <specifi ed thickness n.a. n.a.
SS target clamps for <bond targets n.a. n.a.
* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.
** RF-Version requires special connector and installation. More details on request.
55www. thfc.de 09/17
6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB
Bakeout temperature
max. temperature < 60 °C
Magnetron dimensions
diameter < 192 mm
height < 70 mm
weight < 9 kg
Interface DN 50 KF
Proposed mounting style tube Ø1” x 300 mm
Construction materials stainless steelOFHC - type copper
PTFETypical rates
Mo, 8 Å/s, 1 kW DC, 150 mm
Cu, 24 Å/s, 1 kW DC, 150 mm
Accessories & Options
mounting option < tube Ø 3/4” x 300 mm
quick coupling <feedthrough
for tube Ø 1” and Ø 3/4”
argon injection < model no. IX6_A135-xx
power connector < 7/16-type
magnet array for <magnetic materials
on request
± 30° tilt <
fl ange mounting <
SS target clamps for <specifi ed thicknessSS target clamps for <bond targets
* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.
** RF-Version requires special connector and installation. More details on request.
5
www.thfc.de
PLANAR MAGNETRON SPUTTERING SOURCEION‘X-6“HV
6“ H
V
6www.thfc.de
REFERENCE VIEW IX2U_8107
REFERENCE VIEW IX2U_8201
TARGET
43 m
m
Ø 50.8 mm (2”)
Ø 62 mm
Target thickness2…6 mm
Target clamp
DN 63 CF
Target thickness2…6 mm
Target clamp
69 m
m12
.5 m
m40
mm
Ø 50.8 mm (2”)
Ø 64 mm
DN 16 CF
Flange assembly
CF seal
TARGET
www.thfc.de
REFERENCE VIEW IX2U_8107
REFERENCE VIEW IX2U_8201
TARGET
43 m
m
Ø 50.8 mm (2”)
Ø 62 mm
Target thickness2…6 mm
Target clamp
DN 63 CF
Target thickness2…6 mm
Target clamp
69 m
m12
.5 m
m40
mm
Ø 50.8 mm (2”)
Ø 64 mm
DN 16 CF
Flange assembly
CF seal
TARGET
www.thfc.de
REFERENCE VIEW IX2U_8107
REFERENCE VIEW IX2U_8201
TARGET
43 m
m
Ø 50.8 mm (2”)
Ø 62 mm
Target thickness2…6 mm
Target clamp
DN 63 CF
Target thickness2…6 mm
Target clamp
69 m
m12
.5 m
m40
mm
Ø 50.8 mm (2”)
Ø 64 mm
DN 16 CF
Flange assembly
CF seal
TARGET
www.thfc.de
PLANAR MAGNETRON SPUTTERING SOURCEION‘X-6“HV
6“ H
V
7
www.thfc.de
REFERENCE VIEW IX2U_8107
REFERENCE VIEW IX2U_8201
TARGET
43 m
m
Ø 50.8 mm (2”)
Ø 62 mm
Target thickness2…6 mm
Target clamp
DN 63 CF
Target thickness2…6 mm
Target clamp
69 m
m12
.5 m
m40
mm
Ø 50.8 mm (2”)
Ø 64 mm
DN 16 CF
Flange assembly
CF seal
TARGET
www.thfc.de
REFERENCE VIEW IX2U_8107
REFERENCE VIEW IX2U_8201
TARGET
43 m
m
Ø 50.8 mm (2”)
Ø 62 mm
Target thickness2…6 mm
Target clamp
DN 63 CF
Target thickness2…6 mm
Target clamp
69 m
m12
.5 m
m40
mm
Ø 50.8 mm (2”)
Ø 64 mm
DN 16 CF
Flange assembly
CF seal
TARGET
www.thfc.de
2“U
HV
PLANAR MAGNETRON SPUTTERING SOURCEION‘X-2“UHV
6
32
11.1.
7
7.2.7.1.
54
5
1
7.1.
4
1.1.
7.2.
6
IX2U_9201: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9203: with chimney, gas inlet; O.D. 64 + 8IX2U_9204: with chimney, gas inlet; O.D. 64
IX2U_9250: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9253: with chimney, gas inlet; O.D. 64 + 8IX2U_9254: with chimney, gas inlet; O.D. 64
( * ) Select magnetron model:
1) Standard targets (non-magnetic, Fe 1 mm, Ni 2 mm)
2) Magnetic targets ( Fe 2 - 3 mm, Ni 5 mm)
Parts ListTITLEPART NUMBERQTYITEM
(2-6
)
1
11
CF100_5020-xx
11
RF-DC-connecting box with 7/16-jack
Planarmagnetron 2"UHV with chimney (*)IX2U_9203 (*)
1Cardan shaft, self-adjusting lengthSH2_5021-xx1UHV rotary feedthrough, magnetic coupling Pneumatic shutter, 180° adjustableSH2U_9010-2-xx1
T003_5021-xx Gas tube
RD3_5011111
CF-seal (non-standard)IX2U_0E15
Flange CF100 with 1x CF16, 1x VCR-4 and 1x IX2U
88
245 (
or as
agre
ed)
69
5310
4
31.548.5
Ø6xØ4
© THIN FILM CONSULTING, proprietary data, company confidential. All rights reserved0
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1 2 3 4 5 6
1 2 3 4 5 6
6
38
Ø50.8Ø54.0
100°
8
CF100_5025-xx15 1 Flange CF100 with 2x CF16 and 1x VCR-4
1Cardan shaft, self-adjusting lengthSH2_5021-xx1UHV rotary feedthrough, magnetic coupling
7 Pneumatic shutter, 180° adjustableSH2U_9010-2-xx1
7.2.7.1.
3
1
IX2U_9201: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9203: with chimney, gas inlet; O.D. 64 + 8IX2U_9204: with chimney, gas inlet; O.D. 64
IX2U_9250: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9253: with chimney, gas inlet; O.D. 64 + 8IX2U_9254: with chimney, gas inlet; O.D. 64
( * ) Select magnetron model:
1) Standard targets (non-magnetic, Fe 1 mm, Ni 2 mm)
2) Magnetic targets ( Fe 2 - 3 mm, Ni 5 mm)
16 T003_5021-xx Gas tube
Target
1
1 Planarmagnetron 2"UHV with chimney (*)IX2U_9203 (*)
Parts ListTITLEPART NUMBERQTYITEM
12 ±45°-tilt with CF16 rotatableIFL4_9404-xx11.1. CF-seal (non-standard)IX2U_0E15
RF-DC-connecting box with 7/16-jackRD3_501114
5
2
1
7.1.
4
1.1.
7.2.
6
6
Ø50.8Ø54.0
100°
53
245 (
or as
agre
ed)
6950
5310
4
(2-6
)
31.548.5
Ø88
38.0
Ø6xØ4
© THIN FILM CONSULTING, proprietary data, company confidential. All rights reserved0
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0
1 2 3 4 5 6
1 2 3 4 5 6
9
_9A3
00_9
A303
_9A3
04_9
A305
_9A3
06_9
A307
_9A3
08_9
A309
_9A3
01_9
A302
_9A3
14_9
A315
_9A3
16_9
A317
_9A3
18_9
A319
10
11
_9A3
23_9
A324
_9A3
25_9
A326
_9A3
27_9
A328
_9A3
29
_9A3
31_9
A332
_9A3
34_9
A335
_9A3
36_9
A337
_9A3
38_9
A339
_9A3
20