1 2D and 3D Geometries produced 2D and 3D Geometries produced by by Ultrashort Ultrashort Laser Pulses Laser Pulses http://ssll.inflpr.ro INFLPR, Bucharest, Romania Marian Zamfirescu Workshop on high school physics (12 - 18 July 2010) , Cheia, Romania
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2D and 3D Geometries produced by Ultrashort Laser Pulseseducation.inflpr.ro/res/DescConf2010/MZamfirescu_2Dand3D... · 2010. 8. 2. · The laser set-up is compatible with laser processing
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2D and 3D Geometries produced 2D and 3D Geometries produced
by by UltrashortUltrashort Laser PulsesLaser Pulses
http://ssll.inflpr.ro
INFLPR, Bucharest, Romania
Marian Zamfirescu
Workshop on high school physics (12 - 18 July 2010) , Cheia, Romania
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Angstrom10-10
Nanometer10-9 Micrometer
10-6
Atoms MoleculesCells
Insects
Millimeter10-3
1m
Meter
1 µµµµm300 nm
Nanostructures produced by laser
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Watt1 W
Kilo Watt103 W Giga Watt
109 W
Light bulb
Hydroelectric Power Station
Extreme light Infrastructure
CO2 Laser
Tera Watt1012 W
TEWALAS Laser at INFLPR
Attoseconds10-18
Seconds
Processor's clock time
High speed photographyChronometer Chemical
reactionsElectrons movement
Femtoseconds10-15Nanoseconds
10-9Milliseconds
10-3
Peta Watt1015 W
Lasers with high power and ultrashort pulse duration
P=E/t=E/tP
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Applications of femtosecond lasers
Low pulse energy (Low pulse energy (nJnJ))
-- Dynamics of chemical reactions;Dynamics of chemical reactions;
-- High resolution laser scanning microscopy.High resolution laser scanning microscopy.
Medium pulse energy (Medium pulse energy (mJmJ))
-- laser laser microprocessingmicroprocessing: laser ablation or photo: laser ablation or photo--induced induced
chemical reactions (material modification by nonlinear chemical reactions (material modification by nonlinear
absorption);absorption);
-- generation of THz radiation.generation of THz radiation.
Microstructures fabricated by femtosecond laser ablation
Laser ablation of alumina target(100 µm thickness)
200 µµµµm
50 µµµµm
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Laser ablated holes on gold film 100 nm. Diameter ~ 830 nm.
Structures on Co/Cu/Co filmsGrooves width < 500 nm
Laser ablation with sub-micrometer resolution
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100 nm gold thin-film deposited on glass. Structures period of 2 µm. Laser wavelength 775 nm, duration 200 fs.
Structures such as interdigital capacitors, electrodes for micro-sensors, etc. can be produced by laser ablation on metallic films, semiconductors, or ceramics usually difficult to be processed by chemical etching.
Laser ablation with sub-micrometer resolution
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Interdigital capacitors fabricated by femtosecond laser
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Microwave devices fabricated by femtosecond laser ablation
Pass-Band Filter Directional coupler
Microwave antenna
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Direct Laser Writing in photopolymers: 3D micro-lithography
Parallel processing of photopolymers using colloidal particles
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Spheres of polystyrene (1.5 µm diameter) are deposited of SU-8 thin film.
The monolayer of PS spheres are irradiated by fs laser beam.
TPP occurs in optical near-filed enhancement regime.
Numerical FDTD simulation shows an optical field enhancement with a factor of 9.
3 µµµµm
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Acceptor Film
Donor film
d <10d <10µµmm
Laser Induced Forward Transfer (LIFT)
Semiconductors, polymers, biological tissues can be transferred by laser from a donor substrate to an acceptor substrate. The size of transferred material is at the order of few microns.
50 µµµµm
Droplets of polymers and lines of semiconductor are transferred by laser.
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Two-Photon Excitation Spectroscopy
In the confocal configuration, the DLW workstation is connected through an optical fiber to a spectrometer. A 100 µm optical fiber gives about 5 µm lateral resolution on the sample.
By scanning the sample surface the TPE microscopy image can be recorded.
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Set-up for TPE-Spectroscopy
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Typical TPE-PL spectra
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TPE Microscopy – work in progress
Reconstructed images of a biological sample at different depths inside the sample.
By scanning the sample in XY, a map of TPE-PL intensity can be recorded.
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� A laser direct writing system was configured for laser processing with femtosecond laser pulses.
� The laser set-up is compatible with laser processing and characterisation techniques, such as laser ablation, near-field lithography, LIFT, TPP, TPE Spectroscopy.
� The system allows us to obtain 2D and 3D structures with submicrometric precision.
� The obtained structures have applications for micro-sensors, micro-optics, metamaterials, micro-fluidics, etc.
Conclusions
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Thank you for your attention!
http://ssll.inflpr.ro/
Solid State Lasers Group
This work is supported by National Agency of Scientific Research trough the projects:CNCSIS IDEI268, FEMAT, METALASER, FOTOPOL
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Self-organization of mono-layers of colloidal nanoparticles