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2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 1 Progress on Gigatracker Pixels • Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration • Cooling • Simulations Based on GTK Working Group meeting of 3 April 06 and latest updates
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2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

Jan 18, 2018

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Denis Walters

2/5/06P. Riedler3 Diodes - Pre-Irradiation Tests I-V and C-V measured in RD50 lab at CERN Total leakage current at 23.7°C C-V indicate V fd ~15V One diode (B1) with higher current (~4µA)
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Page 1: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 1

Progress on Gigatracker Pixels• Sensors• Bump bonding• Pixel ASIC and readout electronics• Detector configuration• Cooling• Simulations

• Based on GTK Working Group meeting of 3 April 06 and latest updates

Page 2: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 P. Riedler 2

IRST-itc Sensor Wafer

T

B

C. Piemonte, A. Pozza, M. Boscardin

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2/5/06 P. Riedler 3

Diodes - Pre-Irradiation Tests

• I-V and C-V measured in RD50 lab at CERN

• Total leakage current at 23.7°C

• C-V indicate Vfd~15V• One diode (B1) with higher

current (~4µA)

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2/5/06 P. Riedler 4

Diodes Irradiation in Ljubljana• TRIGA reactor, 250kW, irradiation with fast neutrons• All diodes biased at 30V during irradiation• Guard and pad contact connected together• Fluence levels from 1.0x1012 to 2.0x1014 ( 1 MeV n eq/cm2) - including 2x safety factor• Immediately after irradiation stored in freezer (-20°C)

A1,B1

A2

B4

B3

B2

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2/5/06 P. Riedler 5

Study of Radiation Damage in Diodes• Annealing measurements (CERN + Ferrara)

– According to ROSE standards with I-V and C-V– Measurements last week on 5 irradiated diodes at 80 degC– Bias voltage up to 400V in order to verify the current stability– One diode also measured after full annealing with bias up to

1,000V ===> no indication of breakdown– The current behaviour at low bias voltage needs further study

• Measurements just completed, analysis under way

• Further work– More irradiations at the T7 facility at CERN

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3/4/06 P. Riedler 6

Sensor Wafers Processing

• Two sensor wafers sent to VTT for processing (end 2005)• Visual inspection showed excellent quality• Both wafers showed strong bow (~60-70µm)

– potential problem for bump bonding process (requires < 30µm)• Both wafers broke up in the photo-resist track at VTT

– probably due to the bow of the wafers combined with tight dimensional tolerances in the automated centering stage

• The limit settings have been changed• More wafers reworked by IRST ==> smaller bow

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3/4/06 P. Riedler 7A. Pozza

Page 8: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

3/4/06 P. Riedler 8A. Pozza

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2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 9

Wafer Processing and Bump Bondingat VTT (II)

• In week 9: fire incident in one of the VTT clean rooms

• Electroplating benches (Ni and Pb-Sn deposition), reflow oven (bump bonding) and CMP machine (thinning) were affected

• Equipment cleaned, inspected and moved to second clean room

• First ladders delivered this week

Page 10: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 10

• Readout wafers (200mm diameter) target thickness: 100µm or less, to reduce material budget– sensor wafers thickness is constrained by signal amplitude

• One blank wafer thinned successfully to 100µm

• Upcoming tests: thin (dummy) bumped wafer to 100µm

• Discussion with VTT end of March on thinning - several points of concern (e.g. stress effects) discussed and tests planned

Thinning at VTT (I)

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2/5/06 11

1st GTK chip design meetingWhere, when, who

• Torino, 21.03.2006• People attending the meeting:

– Ferrara: A. Cotta Ramusino, R. Malaguti– Torino: A. Rivetti, G. Mazza, S. Martoiu, A. La Rosa– CERN: A. Kluge, S. Tiuraniemi, G. Anelli

G. Anelli

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2/5/06 12

First important decision taken• We made the choice of using a 0.13 um CMOS technology. The main

reasons behind the choice are:– The 0.25 um technology might not be available to us at the time of

production of the chip;– The design kit of the 0.25 um technology is not maintained anymore;– The 0.13 um technology will be available to us for many years in the

future;– The 0.13 um technology offers a superior performance for digital

circuits;– Most of the problems of using this technology are solved or being

solved: more and more people in the community are using it, a design kit is going to be prepared soon, CERN will have a frame contract with a vendor and will organize frequent MPWs as it has been done for the 0.25 um technology in the past.

G. Anelli

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2/5/06 13

Second important decision• We plan to submit a test chip containing several test structures and

basic blocks in August – October 2006. An exact date has not been fixed yet, this depends also on the outcome of CERN’s call for tender. One option could be to submit a 10 mm^2 chip on the 7th of August through Mosis (IBM 0.13 um LM technology).

• We decided to share the responsibilities as follows:– Preamplifier: Giovanni A., Angelo R., maybe Sakari T.;– Current mode CFD: Sorin M.;– One TDC per pixel: Angelo R., Sorin M.;– Time over threshold: Alex K., Giovanni A.;– CFD: Angelo C.R., Roberto M., Stefano C.;– General architecture, trigger: Alex K., Gianni M.;– T.D.C.: Gianni M., Sakari T.;– Substrate noise: Sakari T., Giovanni A.;– LVDS buffers: Sakari T.;– RC delay and jitter in lines: Angelo C.R., Roberto M., Stefano C.

G. Anelli

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2/5/06 14

Issues still under discussion• Time-walk cancellation is a very critical issue to get the necessary

timing resolution. This is also why we will investigate in parallel several possibilities (2 CFD architectures and TOT);

• In the first test chip we might not be using enclosed transistors, if this gives problem with the extraction. Nevertheless, all the designs have to be made keeping in mind the limitations of using ELTs;

• LVDS drivers: what is the C of what we are going to drive with them? Question about DC or AC coupling;

• Having two power supplies implies more lines and more material budget;

• How will we test the blocks. We stress the importance of thinking about how to test what we design when we design it. Also, whenever it is possible, we should include testability features;

• How to cover the beam area is a hot topic. The solution with a 21 mm long chip biased on one side only seems not feasible. Power drops on the power distribution lines will be important. Also, we all agree that 3 mm are not enough to fit all the circuitry we need outside the matrix.

G. Anelli

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2/5/06 A. Kluge 15

General: Chip SpecificationsChip Parameter

Specification Preliminary Design parameter

Time resolution

160/200 ps 160/200 ps (bin size?)

Beam size(a x b)

48 x 36 mm2 48 x 36 mm2

Pixel size(a x b)

300 x 300 µm2 300 x 300 µm2

Matrix size(a x b)

32 x ?

Active area/per chip(a x b)

9.6 x ? mm2

# chip/module(a x b)

5 x 2 / 5 x 3 / 4 x 3

Calculation,simulation Working parameters

Page 16: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 16

General: Chip SpecificationsChip Parameter

First ideas Specification Preliminary Design parameter

Avg Rate: avg/max

60/173 MHz/cm2 Depends on TDC, segmentation

Efficiency 99%98% for center??

Number of pixels/segment

1 (analog TDC)7-20 (digital TDC)

Dead time of segment

100 ns for 1 TDC/pixel

7 -10 ns for shared TDC

Buffer size per segmentReadout speed/Trans-mission speedNeeds to operate in vacuum

Yes/no ??

Page 17: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 17

QuickTime™

and aTIFF (Uncom

pressed) decompressor

are needed to see this picture.

Configuration

Page 18: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 18

Chip size

Readout and supply

21 mm18 mm

3 mm• Readout needs

possibly more space ->not leaving 18mm active area

• Supply from one side has strong power drop

• Thinning of long narrow chips more difficult

Readout and supply

Page 19: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 19

QuickTime™

and aTIFF (Uncom

pressed) decompressor

are needed to see this picture.

Configuration

• Highest rate

Page 20: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 20

QuickTime™

and aTIFF (Uncom

pressed) decompressor

are needed to see this picture.

Configuration

Max rate on one chip, but chip smaller

Page 21: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 A. Kluge 21

Configuration 3 x 4• Assume matrix of 40 rows x 40 columns:

– 12 mm x 12 mm = 144 mm2

• Chip size– (12 + (2 x 3mm)) x 12 mm = 18 x 12 mm

• Pixel size 300 um x 300 um – => 40 x 40 pixels = 1600 pixels

• Max. Avg Rate of center chip: ~150 MHz/cm2

(for beam with max. 173 MHZ/cm2)– => 135 kHz/pixel– => 216 MHz/chip– => 216 MHz/chip * ~32 bit = 6.9 Gbit/s

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3/4/06 P. Riedler 22

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3/4/06 P. Riedler 23

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2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 24

Material Budget - Cooling• Conflicting requirements on detector configuration• Material budget

– crucial issue - should be minimized (simulations)– 2x4 (or 2x5) detector configuration preferred– long chips with power/readout pads on one short side only

• Chip design– 3x4 (3x5) detector configuration preferred– shorter chips with power/readout pads on both short sides

• Cooling– same considerations as for material budget– average temperature and thermal gradients should be

minimized

Page 25: 2/5/06G. Stefanini/P326 SPC Ref/GTK WG1 Progress on Gigatracker Pixels Sensors Bump bonding Pixel ASIC and readout electronics Detector configuration Cooling.

2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 25

Preliminary Cooling Model & Estimates (I)

GS/P326 SPIBES cooling/draft_v0/180406

Preliminary considerations on the cooling of the P326Gigatracker silicon pixel detector (SPIBES)

GeneralThe aim of this note is to overview the main requirements and constraints for the development ofthe SPIBES, and to outline concepts of possible cooling solutions. It i s a working document;assumptions and estimates need to be carefully cross-checked. It will hopefully be useful to start adiscussion at this stage of the project.

The SPIBES consists of 2 at least (3 probably) hybrid pixel detector planes. The p ixel celldimensions are 300μμ x 300μμ in all planes. The active area, in which the the beaμ is fullycontained, is 36μμ x 48μμ approxiμately; sμall adjustμents in the beaμ cross section, of theorder of ≈ 3μμ , μay still be possible by tuning the beaμ optics.

A μ andatory requireμ ent is that the μ aterial budget in the active area is kept to an absoluteμi niμ uμ. The SPIBES design is based on hybrid pixel detectors, consisting of asseμ blies ofelectronic chips buμ p bonded to sensors. The thickness of the sensor can hardly be reduced to lessthan 200 μμ , as the signal aμ plitude would otherwise be too sμall. In the case of the readout chips,it is planned to thin the 200μμ diaμ eter wafers after buμ p deposition. Froμ the experience gainedwith the ALICE pixels, it is expected that pixel chip die of 100μμ thickness can be obtained; that islikely to be the liμit of what can be achieved in practice within the project tiμescale. Thus theoverall thickness of silicon will be 300μμ corresponding to a μ aterial budget of ≈ 0.32% X0. Thecontribution of the buμ ps (essentially Pb) of 25μμ at the pitch of the pixel cells, sμ eared over thechip area, is well below 0.01% X0.

A μajor challenge derives froμ μ echanical support and services. These include power supply andI/O signal lines, SMD passive coμ ponents for terμination and filtering, cooling systeμ etc. Thecontribution of these iteμs in the active area should be liμited to less than 0.1% X0 or as sμ all asfeasible. These tight μ aterial budget constraints do not apply outside the active area, where the bulkof services could be located.

It is assuμ ed that all stations will be located inside the vacuuμ pipe in order to avoid usingwindows. The sensor layer of each plane μ ust be the downstreaμ side to reduce the effects ofscattering in the detector μ aterial.

The detector will be exposed to an integrated fluence of about 2.1014 (1 MeV n equivalent/cμ 2 )during the physics run. These levels are coμparable to those expected in inner layers of the LHCtrackers, and will reached in a μ uch shorter tiμe (a few μ onths). In order to liμ it the leakagecurrent increase induced by radiation daμ age, the operating teμ perature of the sensors should bekept (well) below 10 degC. The systeμ should however be designed to allow replacing the detectorplanes by new ones at regular intervals, if necessary, without breaking the vacuuμ.

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2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 26

Preliminary Cooling Model & Estimates (II)

GS/180406P326 Gigatracker - SPIBES - Cooling

Material properties

density radiation length th. conductivity CTE notesd Xo l k

g/cμ3 cμ W/cμK ppμ/K

Si 2.34 9.36 1.50 2.60 @300K2.60 @200K

CFC support/cooling plane μaterial characteristics μay vary with supplierToray M55J 1.91 23.00 1.50 -1.13 used in ALICE SPDThornel K-1100 2.20 23.00 10.00 -1.45 l longitudinalThornel 8000X panels 1.76 23.00 8.00 -1.70 l longitudinalcarbon-carbon 1.75 23.00 2.50 -1.50 l longitudinal (0.75 transverse)

non-silicone therμal interface coμpound (AOS 52029) 2.80 33.00 1.3E-02 Xo estiμate (not μeasured)

C4F10 1.52 23.00 density at 20 degCC6F14 1.68 21.00 density at 25 degC

Polyiμide (Kapton) 1.42 28.60 1.2E-03 20.00

Be 1.84 35.40 2.00 11.60Al 2.70 8.90 2.35 23.60Cu 8.96 1.43 4.00 16.00Sn 7.30 1.20 0.66 23.40Pb 11.35 0.56 0.35 28.90eutectic tin-lead solder for buμp bonds (63/37 Sn/Pb) 8.94 0.82 0.55 calculated

Pixel ASIClength cμ 2.0width cμ 1.0area cμ2 2.0power dissipation per unit area W/cμ2 2.0thickness cμ 0.01

Sensorthickness cμ 0.02

Material budget (excluding services)

Siliconpixel chip + sensor % of Xo 0.32

Contribution of buμp bonds to μaterial budgetchip active length cμ 1.8chip active width cμ 0.9chip active area cμ2 1.62buμp pitch cμ 3.00E-02nuμber of buμps 1,800buμp diaμeter cμ 2.50E-03voluμe of each buμp cμ3 8.18E-09total voluμe of buμps cμ3 1.47E-05equivalent buμp thickness (sμeared) cμ 9.09E-06μaterial budget of equivalent buμp thickness (sμeared)% of Xo 1.11E-03

Therμal iμpedance of buμpsbuμp height (stand-off) after reflow buμp bondingcμ 0.0007equivalent buμp contact surface cμ2 1.17E-05T-drop at buμp degC 2.44E-01

Configuration (1)

Case A - Single short edge chip coolingtherμal grease strip width cμ 0.5therμal grease strip thickness cμ 0.01T-drop at therμal interface with cooling degC 6.2T-drop along buμp bonded asseμbly 88.9

Case B - Cooling by coupling to a CFC plate cooled at the edgesCFC therμal conductivity (effective) W/cμK 6.00 longitudinalplate thickness cμ 0.02plate height/width cμ 5.00T-drop across half CFC plate (20W/plane) degC 41.67 plate cooled on two opposite sidesoverall μaterial budget % of Xo 0.41

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2/5/06 G. Stefanini/P326 SPC Ref/GTK WG 27

Summary• Progress in all areas

– Sensors: prototyping, radiation testing, bump bonding– Chip design: decision taken on choice of technology, defined sharing of

tasks, MPW submission in preparation– Detector configuration and cooling: evaluation of options– Simulation

• Further progress critically depends on deeper understanding of material budget constraints ( ==> fast simulation, full GEANT simulation)

• Concerns on resources– Manpower: urgently need 2 (3) students at CERN (staff currently fully

booked for LHC experiment)– Funding: cost of materials, wafer processing, bump bonding, MPW

submission