© Etalon AG The LaserTRACER and LaserTRACER-MT Calibration and Testing of machines with highest accuracy A technology overview
Dec 02, 2014
© Etalon AG
The LaserTRACER and LaserTRACER-MTCalibration and Testing of machines with highest accuracy
A technology overview
© Etalon AG
Accuracy for measuring machines and machine tools
For machine tools and measuring machines geometrical accuracy is a key performance feature
Highest accuracy cannot be achieved economically without numerical compensation
Full error compensation is used for measuring machines since 15 years successfully, now it is available also in the machine tool industry
Classical methods for error mapping are time consuming and need operators with years of experience
Etalons technology combines superior accuracy, short measuring times, semi automated operation, universal application and complete information
© Etalon AG
Geometry deviations of a 3 axes machine: 21 deviations (notation according to ISO 230-1)
(Squareness for a kinematic X, Y, Z - system)
© Etalon AG
Systematic geometric deviations (here for X axis)
Position
Roll
Straightness 1 Straightness 2
Pitch Yaw
© Etalon AG
Geometry deviations of a rotary axis: 6 deviations per axis + 5 locations(notation according to ISO 230-1)
© Etalon AG
The progress in metrology: Comparison of machine calibration with navigation
conventional new: Multilateration
Navigation
Calibration and testing of
machines
GPS
© Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT
© Etalon AG
Interferometer with 0.001 µm resolution (1)
Patented reference sphere (2) with form deviation < 0.050 µm on a solid stem (3)
Environmental compensation for temperature, pressure, humidity
Length measurement uncertainty: U95%= 0.2 µm + 0.3 µm/m
The LaserTRACER-NG
© Etalon AG
The LaserTRACER specification
Weights and dimension
LaserTRACER weight approx. 9.5 kg
Controller weight approx. 14 kg
LaserTRACER height 230 mm
Height of reference sphere above machine table 165 mm
Operating range
Angular range elevation axis - 38° up to + 85°
Angular range azimuth axis ± 225°
Measuring range 0.2 m up to 15 m
Angular range reflector (cateye) 120° respectively 160°
Environmental temperature for accuracy specification 15 °C – 35 °C
Dynamics
Maximal permissible acceleration of the reflector 8 m/s²
Maximal permissible velocity of the reflector 20 m/min
Accuracy
Frequency stability laser 24 h 2∙10-8
Stability of the reference sphere at ∆T = ±1 K ± 0.1 µm
Resolution interferometer 0.001 µm
Spatial displacement measurements U(k=2) = 0.2 µm + 0.3 µm/m
Power supply
Input power 50 W – 100 W
© Etalon AG
New: The LaserTRACER-MT (MT: Mechanical Tracking)
Passive tracking mechanism of the laser interferometer
For small to medium sized machines
Based on the same principles as the LaserTRACER
Light weight (< 2500 g)
For machine axes up to 1.5 m
Angular working range from -35° to +80 °(elevation) and >360° (azimuth)
The entire software options from Etalon are usable
© Etalon AG
LaserTRACER-MT in detail
Telescope 275 mm to 965 mm (1)
Active beam steering (2)
Stabilized Interferometer (3)
2 nest with precision spheres with concentric reflectors (4,5)
© Etalon AG
The LaserTRACER-MT specification
Weights and dimension
Weight measuring unit 2.8 kg
Weight controller box 8 kg
Minimal height above machine table 120 mm
Transportation box (water and dust-proof) 63 cm x 60 cm x 33 cm (11 kg)
Operating range
Angular rang elevation axis - 30° up to + 80°
Angular range azimuth axis (restricted only by the interferometer cable) ± 270°
Radial measuring range 260 mm up to 940 mm
Cable length 5 m
Accuracy
Frequency stability laser 24 h 2∙10-8
Resolution interferometer 0.001 µm
System accuracy over the full working range 2 µm
Temperatur measurement accuracy / 3 Channels 0.1 K
© Etalon AG
XYZ-axis with the LaserTRACER-MT
© Etalon AG
A-axis with the LaserTRACER-MT
© Etalon AG
C-axis with the LaserTRACER-MT
© Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT
© Etalon AG
Interferometric length measurement from at least 3 positions (no alignment necessary!)
Evaluation of all errors entirely based on highly accurate displacement information
Position of LaserTRACER position and dead path doesn’t need to be known
The Principle:
© Etalon AG
How TRAC-CAL works on linear axes
© Etalon AG
Evaluation of 21 geomtrical deviations
© Etalon AG
How TRAC-CAL works on rotary axes
Measurement of rotary table Measurement of rotary head
© Etalon AG
Calibration of rotary axes
Determination of
Angular positioning
Axial error motion
Radial error motions
Tilt error motions
Angular location in the machine volume
Solely based on interferometric measurements of the LaserTRACER
No additional hardware necessary
Very high accuracy
Easy application
Tilt error EAC
[µra
d]
−20
−10
0
1000 200 300Angular position [°]
Tilt error EBC
[µra
d]
1000 200 300Angular position [°]
−10
0
10
Position error ECC
[µra
d]
1000 200 300Angular position [°]
0
10
[µm
]
Radial error motion EXC
1000 200 300Angular position [°]
−2
0
Radial error motion EYC
[µm
]
1000 200 300Angular position [°]
−4
−2
0
[µm
]Axial error motion EZC
1000 200 300Angular position [°]
−2
0
© Etalon AG
Generation of an error map for volumetric compensation
Today most controllers offer volumetric compensation options
TRAC-CAL generates the compensation data by one click after measurement
Implementation leads to a significant accuracy enhancement in the entire volume (typically by a factor of 3-4)!
Interfaces for conventional compensations are also available
© Etalon AG
Example 1: Horizontal precision machining center
Comparison without and with compensation with Siemens VCS
0
5
10
15
20
25
30
35
40
EZ
Z (
ztz
)
EX
Z (
ztx
)
EY
Z (
zty
)
EZ
X (
xtz
)
EX
X (
xtx
)
EY
X (
xty
)
EZ
Y (
ytz
)
EX
Y (
ytx
)
EY
Y (
yty
)
EC
Z (
zrz
)
EA
Z (
zrx
)
EB
Z (
zry
)
EC
X (
xrz
)
EA
X (
xrx
)
EB
X (
xry
)
EC
Y (
yrz
)
EA
Y (
yrx
)
EB
Y (
yry
)
B0
Z (
xw
z)
A0
Z (
yw
z)
C0
Y (
xw
y)
Vorher Nachherwithout with
© Etalon AG
Middle-class machining center
High-end machining center
without with
without with
Example 2: Machining centers with Fanuc control and 3D-Error-Compensation
© Etalon AG
Example 3:Large Gantry machine with FIDIA control
XY
XZ
YZ
© Etalon AG
Supported controllers for machine tools
Siemens
Heidenhain
Fanuc
Mazatronik
Fidia
Fagor
Supported protocols for CMMs
Zeiss CMMOS
I++
Leitz
DEA
Brown&Sharp
Wenzel
OGP
© Etalon AG
Measurements in practice
Measurement of linear axes
Measurement of rotary axes
Measurement of linear axes
Measurement of rotary axes
Lase
rTR
AC
ER
Lase
rTR
AC
ER
-MT
© Etalon AG
Summary: Error Mapping with TRAC-CAL
Highest accuracy
All deviations solely based on the wavelength of a stabilized laser
For linear axes: linear position, straightness, pitch, yaw, roll, squareness
For rotary axes: angular positioning, axial motion, radial motions, tilt motions, angular positioning
Suitable for error mapping of machine tools and measuring machines
Applicable for almost any size of working volume
Fast execution: 1 – 6 hours, depending on machine size
Simple setup and data handling
Interfaces and error mapping format for many machine tools and CMM controllers available
© Etalon AG
Application examples
© Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT
© Etalon AG
Machine Testing with TRAC-CHECK
Principle:
The LaserTRACER operates in “fix interferometer mode” but the measurement direction is automatically aligned by machine motion
Laser displacement measurement in any direction without manual alignment
No cosine error
Measurement procedure and data evaluation according to - ISO 10360 - 2 for CMM (linear axes, axis parallel and diagonal) - ISO 230 - 2/6 or for machine tools (linear axes, axis parallel and diagonal)- VDI/DGQ 3441 or for machine tools (linear axes, axis parallel and diagonal) - ISO 230 - 4 (machine tools, circular testing)
© Etalon AG
How TRAC-CHECK works – LINE MEASUREMENT
© Etalon AG
TRAC-CHECK results
© Etalon AG
Circular test (for the LaserTRACER/-MT)
Following the ISO 230-4:
Bi-directional deviation
Circular deviation
Radial deviation
…
Solely based on interferometric measurements of the LaserTRACER
No additional hardware necessary
Highest accuracy
Easy use
Radius up to 15 m
© Etalon AG
Additional functions in TRAC-CHECK
Dynamic analysis of machine motions(for the LaserTRACER/-MT)
(time domain) (frequence domain) Simple geometrical
analysis
Scale factor
Squareness
Velocity
Acceleration
Jerk
Length
© Etalon AG
Summary: Machine Testing with TRAC-CHECK
Highest accuracy
Semi-automated execution
No alignment of interferometer required
Application for machines of almost any size
Fast execution: Full geometry test in 30 minutes
Complete report function satisfying highest traceability demands
For measuring machines: In accordance to the latest revision of ISO 10360-2
For machine tools: Testing according to ISO 230-2, -4 and 6 and VDI/DGQ 3441
Simple and fast determination of scale and squareness errors
© Etalon AG
Extract from ETALONs customer list
Customers in 3D metrology Customers in the machine tool industry
• Zeiss IMT / Germany
• Leitz Messtechnik / Germany
• OGP (Optical Gaging Products INC.) / USA
• Volkswagen AG / Germany
• Audi AG / Germany
• BMW AG / Germany
• Schaeffler AG / Germany
• PTB / Germany
• NIST / USA
• NPL / Great Britain
• CERN / Switzerland
• SLAC Stanford Accelerator Laboratory / USA
• Fundação CERTI / Brazil
• INTI / Argentina
• INRIM / Italia
• CMTI / India
• Heller / Germany
• Deckel Maho Gildemeister (DMG) / Germany
• Mazak / Japan
• Röders / Germany
• Dixie / Switzerland
• Heidenhain / Germany
• Agie Charmilles / Germany
• Mori Seiki/ Japan
• Fermat / Czech Republic
• Tecnalia / Spain
• WIA/ South Korea
• Waldrich Coburg / Germany
• Shaanxi Qinchuan Machinery Development / China
• SNK / Japan
• Pratt & Whitney / USA
• Toshiba Heavy Industry / Japan
• Konecranes Machine Service / Finland
• Alzmetall / Germany
© Etalon AG
Partners of ETALON
Companies with cooperation formachine compensation
System-partner for the testing oflarge machines
Official partner companiesfor machine compensation
© Etalon AG
ETALONs distribution and service partner
© Etalon AG
www.etalon-ag.com
Visit us at