2012 10-19 oled-lighting_semi_conf_public

Confidential and Proprietary

JUSUNG Technology is Innovation, Culture is JUSUNG Product. 1 www.jusung.com

“O”LED Manufacturing

Technology

Kae Huang

SEMI LED Manufacturing Technology

Conference

October 19th,2012


JUSUNG Technology is Innovation, Culture is JUSUNG Product. 2

Solar Why OLED For Display



Performance Comparison of OLED and LCD Displays

OLED Also Allows For Thinner Displays



Cost Estimates for 4” LTPS display

OLED Displays Already Account for 20% in the Smartphone Market



AMOLED Demand vs Supply Forecast

2014 suggest very tight suply driven by an assumed increase of

AMOLED TV shipments.

Source: DisplaySearch July 2012



Typical Structure of an RGB OLED

Bottom Emission Is Most Common



Key Competing Manufacturing Technologies - Display

TFT

LTPS vs. Oxide TFT

Oxide, Lower Organic Deposition Costs and Thin Film Are the Key

Manufacturing Technologies To Focus On

Encapsulation

Metal/Glass Lid, Frit Sealing, Face Seal, Thin Film,…

Organics

Evaporation, RGBW + CF, LITI and Hybrid



Comparison of substrate types

Significant R&D Momentum on Oxide TFT (using IGZO)



Solar Why OLED For General

Lighting



Thin Area Light Source

Glare-free, Directly Viewable

Harmless to Human Eye

Flexible/Bendable Lighting

Environment Friendly

Color Tunable

Transparent Lighting

Energy Efficient

• Highly Efficient Light Source

Environment

• No Mercury, Recyclable

• CO2 Emission Reduction

Sensibility

• Natural Illumination by 3 Primary

Color Mixing [Red, Green and Blue]

• Harmless to Human Eye

Advantages of OLED Lighting



Comparing the Differing Light Sources

OLED Lighting Is Still At Its Infancy of The Evolution

Courtesy: Konica Minolta



OLEDs Forecast Used in General Lighting

November 2011

OLED may account for 3% of total General Lighting by 2020



China Government Support

Specific Target of 80lm/W has already been set as part of its

12th 5-Yr Plan



These targets scale to $30/klm in 2015, $17/klm

in 2017 and $10/klm in 2020.

US Government Support

From DOE SSL Roadmap August 2012

The critical factors include:

Cycle time – target 1 minute;

Area of substrate that is converted into

product – target 80%;

Yield of good product – target 80%; and

Downtime for repairs or maintenance –

target 20%.



Projections For the Costs of OLED Luminaire

OLED Luminaire Will Continue To Lag Behind LEDs in 2020

Source: DOE SSL Aug 2012



OLED Lighting Panel Structure

A Much Simpler Structure Relative to AMOLED

Conventional Encapsulation

Thin Film Encapsulation

Polymer Film

Thin Film

Cathode

Organic

Anode

Glass

Glass

Getter

Cathode

Organic

Sealant Anode

Glass



Total OLED Market Forecast

Source: BCC Research



R2R Technology

Figure 1: Schematic drawing of the

R2R vacuum coater which includes

the winding unit, plasma pre-

treatment with a linear ion source,

organic linear evaporators, a

magnetron and metal evaporators.

Source: IPMS – COMEDD; Courtesy:

EETimes Europe

An Opportunity for Cost Reduction Over Sheet-to-Sheet

Opportunity For:

Higher throughput

Cheaper metal foil

Plastic web as substrates



Type Metal/Glass Lid Type Frit Seal Face Seal

Structure

Concept Organic Sealing Frit Sealing Film Face Sealing

Emission Bottom Emission Top/Bottom Emission Top/Bottom Emission

Size Small Size Panel (<15 inch)

Middle Size Panel (~20 inch)

Large Size Panel (>40 inch)

Advantages Simple Process Simple Process High Shock Resistance Stable Gap

Disadvantages Thicker Panel Low Shock Resistance

OLED Encapsulation

Glass substrate

OLED

Encap. Substrate

Frit

Glass substrate

Encap. Substrate

OLED Film

SiN

Glass substrate

OLED

Encap. Substrate

Getter

Sealant N2 Filling

N2 Filling

In addition, thin film technology is an emerging encapsulation

manufacturing technology



OLED Luminaires – Key Manufacturing Issues

Sizing and brightness

Variability and binning

Light shaping

Standardization of luminaire components

Reliability issues

Search for new technolgies:

Material Improvements, Solutions-based Printing Technology, Spin-Coating

Technology

OLED luminaires are still high-end, high-cost, artistic luminaires,

manufacturers need to incorporate OLEDs cost-effectively into

general illumination applications



Solar Jusung’s OLED Programs



JUSUNG Engineering at a Glance

Korea’s Largest Manufacturer of Production

Technology Equipment for Semiconductors, Solar,

Lighting, and Flat Panel Displays

Founded in 1995

Headquarters: Gyeonggi-Do (Seoul Area), South

Korea

Listed on KOSDAQ in 1999, Ticker Symbol

036930

Global Sales and Service Offices in Algeria,

Middle East, North America, South America,

China, Taiwan, Japan, and Europe

Strong Track Record with Large Customers

– SK Hynix, LG Display, IBM, TSMC, and more

Profitable and Growing



Standardization

LCD &

Solar Thin Film R&D

BIPV R&D

SEMI & LED R&D

Solar c-Si R&D

OLED R&D

Manufacturing

Manufacturing

6 out of 8 JUSUNG Buildings are R&D Centers

Fully Equipped Facilities and Pilot Lines for Device Integration



JUSUNG Product Portfolio

Production Proven Innovative Complementary Markets

① Semiconductor

② Display ③ Solar

④ LED Lighting ⑤ OLED Lighting

Core Technologies Renewable and Energy

Conservation Technologies

Complementary Photo Electricity

Light Emitting Technology



JUSUNG 730*920 OLED Lighting Panel Announcement

The korean semiconductor equipment maker Jusung Engineering released today a OLED lighting panel. The OLED Panel has a size of 730× 920 mm which is deposited on glass substrates. This is a result from the 4th generation of Jusungs OLED production equipment. Jusung want to ramp up a pilot production line in Kwangiu.

920 m

m

730 mm

JUSUNG RELEASED A 730x920MM LARGE OLED LIGHTING PANEL

Source:

http://www.oled-display.net/oled-lighting

http://www.oled-display.net/jusung-released-a-730x920-mm-large-oled-lighting-panel/ http:/www.oled-display.net/how-works-the-oled-technology/

http://www.oled-display.net/jusung-released-a-730x920-mm-large-oled-lighting-panel/ http:/www.oled-display.net/how-works-the-oled-technology/



Decorative Lighting

General Lighting

Transparent/ Flexible Lighting

◊ OLED lighting Evolves from Decorative Lighting into Flexible lighting

OLED Lighting Product Trends



Encapsulation PECVD System Overview

Low Temp. PECVD System (<100℃)

Item Description

Glass Size - 2G (370× 470mm2) ~ 8G (2200× 2500mm2)

System Configuration

- 3 Process Chamber - 1 Transfer Chamber - 1 Load lock & 1 Unload lock Chamber - 1 Mask Stocker

Alignment &

Vision system

- Align Stage: Mask & Glass Alignment (~20㎛)

- Vision System: Confirmation of Alignment

Low Temp

High Quality Film

Process

-Low Process Temp

-Low Wet Etch Rate

-Low Stress

-Low WVTR

Production Proven Low Temp. SiNx Deposition & Alignment Technology

PC

PC PC

Mask Stocker

L/L U/L T/C



JUSUNG IGZO MOCVD Development History

Solar ZnO MOCVD

LED GaN MOCVD

Oxide TFT IGZO MOCVD



Core Technology MOCVD PVD

1. Composition control Ga vs. In Composition : 50~200% Controllable

Not Possible

2. High Temp Deposition < 400 ℃ <100 ℃

3. In-Vacuum Continuous Deposition

G.I/IGZO/ESL In-Vacuum Deposition

Not Possible

Benefits of JUSUNG IGZO MOCVD

A Challenging Process But Has Promising Benefits



■ G.I + IGZO + ESL In-Vacuum Process

Interface Impurities Control

Improved TFT Performance

Minimized Particles

In-Vacuum Continuous Process

In-Vacuum Continuous Process Provides Improved TFT Performance

G.I Active (IGZO) ESL Anneal

JUSUNG IGZO In-situ

Integration

Depo. (PECVD)

Depo. (PECVD)

Depo. (MOCVD)

Anneal

Without Vacuum Break

MOCVD PECVD Integration System



Summary

OLED technology used in display has already taken off;

–Continuosly improving display performance on small devices

–Ramp up of large size TV coming soon

–Monitors and laptops years away

OLED technology used for lighting still evolving

– In the near term, OLED can’t compete with HB-LEDs and fluorescent lights

–OLED Lighting industry will need to meet the expectations of lighting designers,

contractors, regulators as well as end users.

Frost & Sullivan estimates market to reach $7.39 billion in 2016 at a CAGR of 34

percent. (For lighting, difficult to determine consumers willingness to pay)

Oxide, Organic Deposition Process and Materials, Encapsulation



Solar THANK YOU!

Kae Huang

[email protected]

+86-21-6465-5851

mailto:[email protected]

2012 10-19 oled-lighting_semi_conf_public

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