2007 SoCArchitecture using MEMSleti.congres-scientifique.com/annualreview2009/AnnualReview/AR09... · Initially developped for telecom applications 802.15.4 / Zigbee, Bluetooth low

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

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Power Reduction in RF

SoC Architecture using

MEMS

Eric MercierEric MercierEric MercierEric Mercier

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

RF domain overview

RF module architecture MEMS & Si co-integration Digital-oriented RF design Opportunistic Radio Low power consumptionxxparadigm

RF CMOS design Ultra-Low Power RF for WSN mmW 60 GHz full-CMOS High data rate contactless Impulse UWB

RF MEMS High-Q Passives RF switches Filters & Duplexer Time references Resonators

Technologies Piezoelectric materials Acoustic systems Ferroelectric materials Meta materials Magnetic materials

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

MEMS in RF front-end Possible technologies of interest

Initially developped for telecom applications 802.15.4 / Zigbee, Bluetooth low energy ….

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

AlN process - Packaging

Initial uniformity = 0.4%

Kt² = 7.1% (state of the art)

Trimming of frequency

σ improvement = 6X , ∆∆∆∆f target < 1 MHz

AlN 1µm

Mo

Mo

P03

0102030405060708090

100

<2.0

6

2.06

5

2.07

5

2.08

5

2.09

5

2.10

5

2.11

5

2.12

5

2.13

5

2.14

5

2.15

5

>2.1

6

Resonant frequency

Fré

qu

ence

Target=2.11GHzAfter

σ = 2,5 MHz

P03

0

5

10

15

20

25

<2.0

25

2.03

2.04

2.05

2.06

2.07

2.08

2.09 2.1

2.11

2.12

>2.1

25

Resonnant frequency

Fré

qu

ence

Target=2.11GHz

σ = 15 MHz

Before

Air cavity protected by SiO2 and BCB membranes

Overmolding

BGA substrate or IPD

Underfill BAW filter

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

36 filters sampling on 200mm wafer containing

20 000 filters

100Ω - 100Ω differential filter for WCDMA Rx

Resonator Quality factor

= 1800

200mm Si wafer

Bragg

Piezo stack

PackagingTrimming

SMR BAW filters

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

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40 filters sampling on 200mm wafer containing

40 000 filters

Filter 50 Ω diff / 12 Ω diff

Filter 50 Ω sing /200 Ω diff

Bragg

Bot Piezo

Top Piezo

Coupl Bragg

Filter 50 Ω sing / 50 Ω sing

CRF Filters

ESSDERC ‘09 Ability to design the filter for

various impedance matching

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

BAW Duplexer / full-duplex communications

Ensure a good rejection of TX band in RX mode High rejection of TX filter in RX band High rejection of RX filter in TX band

to avoid saturation effect in RX chain helps power consumption reduction

Low Insertion Losses Correct impedance matching

on each side Overall filter response impacted by

the matching Mismatch means less rejection / more

insertion loss

very encouraging first results Workshop IMS ‘09

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

Multi-frequency AlN patterning

Process several frequency on a single wafer

Approach investigated AlN patterning

Bragg mirror

AlN Tx(1270 nm)

AlN Rx (1110 nm)

0.5 mm

Workshop IMS ‘09

9

2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

BAW VCO and filters

ISSCC`082 x IMS `091 patent

Current L/C-based integrated VCO Low-Q / high current consumption for phase noise reduction

Piezo-electric resonator High-Q / lower current consumption for better phase noise Passives : lower cost technology than advanced CMOS for passives

High performance broad band BAW VCO for UMTS Increased tuning range thanks to negative capacitor

Impedance

FrequencyFseries Fshunt

CnegCneg

CvarCvarCvar

C0

Lm Cm

BAW

C0

Lm Cm

BAW

)(2

CnegCoLmCm

CnegCmCoShunt +

++=ω

FTR with Cneg

Qseries:700 Qshunt: 600 Qshunt : 220

160MHz

0pF

0.1pF0.2pF

0.3pF0.5pF

0.7pF1.4pF

2.8pF

resonator without Cneg

resonator with Cneg

2.25

Q fa

ctor

Frequency GHz2.3 2.35 2.4

700

600

500

300

400

200

100

10

2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

Digital-oriented TX Architecture

ANALOG RFICBiCMOS

DAC

DAC

SAW DUPL.PA

DIGITAL RFICCMOS

BPF DUPL.

SIGNALSOURCE

SIGNALSOURCE

ANALOG RADIO

DIGITAL RADIO

LOW FSAMPLINGHIGH RESOLUTION

LO

DAC

DAC

SINGLE-STANDARD USAGE

OPPORTUNISTIC USAGE

DIGITAL MODULATOR

LOW RESOLUTION

PA

HIGH FSAMPLING

From analog to digital TX architecture Compatible with advanced CMOS technologies Easy reconfiguration for multi-standard purposes

Use of BAW to recombine the signals LINC architecture Filter out Σ−∆ DAC noise ULP RF under investigation

CogArt`08VTC `092 x patents

0 (fCH)

SIGNALSPECTRUM

fS/2-fS/2 Freq.0 (fCH)

SIGNALSPECTRUM

fS/2-fS/2

BAWFiltering

Freq.

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

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Linear Amplification using Non-Linear Components

I

Q

sI,1(t)

s I,2(t)

)(tϕ−

s I(t)

)(tϕ )(tθ

FILTER

&

COMBINER

SAT.PA

ANTENNA

I

Q

I&QSIGNAL:

GSM/EDGE/

WCDMA/OFDM

PI

SAT.PA

LINC

PQ

NI

NQ

Σ−∆Σ−∆Σ−∆Σ−∆MOD

PA MODULE

DSP

Σ−∆Σ−∆Σ−∆Σ−∆MOD

Σ−∆Σ−∆Σ−∆Σ−∆MOD

Σ−∆Σ−∆Σ−∆Σ−∆MOD

ANALOGUEPASSBAND

FILTER

POWERCONTROL

DIGITAL CIRCUIT

ANALOGUEPASSBAND

FILTER

0 fCH

SIGNALSPECTRUM

fS/2-fS/2 Freq.

0

SIGNALSPECTRUM

-fS/8 0

SIGNALSPECTRUM

fS/8 Freq.-fS/8fS/8

fC = R.fS/2

+

Non-linear PA Whatever the modulation scheme Very interesting power reduction

…. But still some limited bandwith issues ~ 5 % providing 80 MHz

Bandpass Filter Bandwidth

TX Band

Sigma Delta Filter Bandwidth

fCfB1

SPECTRUM

TX FrequencyfB2

NON-LINEAR PA

LINEAR PA

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

LAMB wave filters for channel filtering

1st demonstration of BAW Lamb wave filter for IF use

Coupling acoustic filter &air gap isolation

SimulatedMeasured.

fc = 156.5 MHz I.L. = -7,3 dBZ0 = 1 kΩ

ESSDERC‘07

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

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In progress on Lamb filters

Synthesis of band pass filters Electrical connections between resonators

Acoustic coupling between resonators

2 poles ladder filter 2 poles lattice filter

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

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RX Intermediate Frequency

Bulky external filter Good rejection but high cost / low integration

Integrated Gm/C filters Good integration factor / power consumption but not sharp enough

High input / output impedance Reduction of the power consumption at moderate frequencies

High-Q channel filter Enhanced performance Relaxed linearity specifications Low cost technologies

As low frequency as possible Sub-sampling process for digital-oriented architecture Much better performance with comparable power consumption Better scalability for power reduction improvement

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

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Interest in bringing the digital world towards the analog chain No compromise on quality of the filtering New architecture of ADC to limit the power consumption

Digital robustness and technology scaling Small number of analog IC blocks to design

fs = 4 x fc to simplify demodulation Multi-standard RF receiver for the 2.4-2.5 GHz band

Co-existence of several standards : BT low energy, WiFi, ZigBee…

A 2nd order band-pass Σ-∆ BW = 25 MHz at 2.45 GHz carrier

Band-pass filtering ADC

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

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Mismatch between antenna and PA Optimum matching for maximum power transfer Compensate for hands effects on the antenna

Result : some 100s µs process for 30 dB improvement

more output power

better power consumption MEMS use for better efficiency

Impedance matching in real time

Tunablemachingnetwork

PA

Attenuator

Mixer

RF IF

C

C

Processor

Filter

LO

v1 v2 ZantZ1

Down conversionmodule

Magnitudecalculator

Phasecalculator

Z1

impedancecalculator

MatchingNetworkcontroller

Antennaimpedancecalculator

TunableMatchingNetwork

PROCESSORIFv _1

IFv _2

IF

IF

v

vmag

_2

_1

IF

IF

v

v

_2

_1arg

( )1Re Z

( )1Im Z

( )antZRe ( )antZIm

dcba

antZ1Z

ResetRegistrycontrol

NEWCAS ’08

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2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

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BAW Reference frequency

Miniaturization and integration issue Highly required for cost / integration improvements Temperature behavior of the resonator

Predictive and reproducible Monotonic and low temperature drifts

On-going design by STm, compensating for temperature drifts Actual compensation of the temperature Major improvement for use in wireless applications

IMS `09

18

2007200720072007

Power Reduction in RF SoC Architecture using MEMS Eric MERCIER – 22th June 2009

© CEA 2009. All rights reservedAny reproduction in whole or in part on any medium or use of the information contained herein

is prohibited without the prior written consent of CEA

MEMS in ULP RF front-end Conclusions on technologies of interest for ULP RF

Some good results on frequency, Q, bandwidth, technologies Sampling architectures under study for RX

Considerations on resonators for reference frequency Multi-standard also for WSN

802.15.4 / Zigbee, Bluetooth low energy ….