2-14-19 Community Update presentation FINAL · CRSP Review / Approval 8. Determine Final Pricing ($$) • Construction documents • Funding sources verified • Review and approval

MIT.nanoCommunity Update

February 14 and 15, 2019

A presentation and conversation with Vladimir Bulović,

founding faculty director

PROTOTYPING SYNTHESIS

TEACHING labs

2-levelCLEAN ROOM

complex

IMAGINGMETROLOGY

ENGAGED BY 2000+ USERS

Facility Update

• Tool Installations Scope and Dates

• Criteria for Identifying the Next Tools

• Toolset Management Options

• Tool Talks

• • • • • • • • • • • • • • • • • • • • • • •

PROJECTED INSTALLATION SCHEDULEIS DEPENDENT ON FUNDING AND TOOL CONDITIONS

Expected Tool Installation: Scope/Dates

PLUG & PLAY TOOLS

SIMPLETOOLS

COMPLEX TOOLS

TOTAL PRIMARY

TOOLSTOTAL

EQUIPMENT

PHASE 1 (FY19) 22 27 16 65 119

PHASE 2 (FY20) 3 14 8 25 63

PHASE 3 (FY21) 5 5 16 26 91

PHASE 4 (FY22) 2 4 11 17 62

PROPOSED (TBD) 11 17 4 32 76

TOTAL: 165 411

The Phase 1 equipment consists of:

• x2 Cryo-TEMs• X-ray Lab (Bldg. 13)• Solar Frontiers Lab (Bldg. 13)• AIM Photonics Lab (Bldg. 35)• EML (5th Floor of Bldg. 39)• x2 New semiconductor tools

(SAMCO PECVD/RIE)• New equipment:

Ovens, hot plate towers, spin rinse drier, tabletop microscopes

• Nanolab (DMSE Bldg 8)• MGH FIB SEM

(New tool in the Imaging Suite)

Tool Status – Phase 1• • • • • • • • • • • • • • • • • • • • • • •

Tools for:

±Structural Biology±X-ray Crystallography±General Microscopy±Chemical and

Structural Analysis

Basement

Imaging Suites & Subfab

E-coli protein from Prof. Bob Sauer Each ring is 15nm in diameter

Cryo TEM - Arctica

Training in progress

Gold nanorods and nanocrystals with PEG surfactant from Prof. Farnaz NirouiEach rod is 10nm in diameter

Cryo TEM - Arctica

Lower Cleanroom

Lower Cleanroom

±Semiconductor Tools

±Materials Growth

± Lithography Suites

± High-Performance Cleanroom Metrology

First Floor

Upper Cleanroom & Immersion Lab

Upper Cleanroom & Immersion Lab

Third Floor

±Semiconductor Tools± Nanostructures Lab• Tool Building• Interference Lithography

± E-Beam Writers± Roll-to-Roll Deposition

& Processing± Soft Lithography± NanoMat Growth/Deposition

± Immersion Lab (CAVE) • Augmented Reality (AR) &

Virtual Reality (VR) • Space designed for

learning and discovery

Prototyping Space & Chemistry Labs

Prototyping Space & Chemistry Labs

± Prototyping Space• AIM Lab for Education

and Application Prototypes (LEAP)

± Chemistry Teaching

Fifth Floor

Shared FacilitiesMIT.nano coordinates with existing centers and facilities

Shared CleanroomsØ Integrated Circuits LaboratoryØ Technology Research LaboratoryØ Exploratory Materials Laboratory

Shared Lithography facilityØ Electron-Beam Lithography

Shared Experimental Facilities Ø Materials Analysis

(Surface, Thermal, Optical)Ø Electron MicroscopyØ X-ray DiffractionØ Nanostructure Materials

Shared Nano-MechnicalTechnology Laboratory MIT.nano GALLERIES

Candidate Proposals for Space Use

1. Requires performance of space available in MIT.nano

2. Provides long-term benefit for the MIT community

3. Cost to facilitate at another MIT location is prohibitive

4. Extends an existing intellectual thrust of MIT.nano

5. Significant number of PIs are interested in this capability

6. Opens new educational opportunity

Faculty may propose to add new equipment or transfer existing equipment to MIT.nano’s facilities. Proposals review process considers the following:

1. Proposal for Candidate Instrument/Tool/Space

• First contact made to MIT.nano Director• Identification of tool/instrument type: shared, mission

critical, new (capacity or capability), private, directed• One-on-one discussions to gather compatibility/need

(substrate size, deposit /etch/measure, history, contamination, maintenance budget, financial model, user history, staffing, process data, user base, age, and vendor support) with MIT.nano Director andManaging Director

2. Candidate Instrument/Tool/Space• List of tools or instruments• One-on-one discussions to gather facilities and space

needs data (environment, power, water, gas, and ventilation) with Managing Director (or delegate)

3. Preliminary Layout• Interactive / iterative process with

Managing Director (or delegate)• Feasibility established and proposed site located

4. Preliminary Approval to Move Forward• 5-Day review period• MIT.nano Director and Managing Director• Scope of Work funds identified• Allows inclusion into grant proposal• Assigned as a project and tracked

5. Scope of Work ($)• Complete SAFE form• Design firm creates schematic design drawings• CM generates budgetary cost and schedule

estimates (non-binding)

6. Interim Approval (3 paths)• MIT.nano Director• MIT.nano Director with input from Leadership• MIT.nano Director with input from

Tool / Space Committee

7. CRSP Review / Approval8. Determine Final Pricing ($$)

• Construction documents• Funding sources verified• Review and approval by DoF and EH&S

9. Final Approval by MIT.nano Director10. Execution ($$$)

Methodology for Evaluating Instrument/Tool/Space Use Candidates

Two Types of Toolsets in MIT.nano

CENTRALLY MANAGED:Shared tools & instruments, open to the entire research community.

PRIVATELY STEWARDED:Tools & instruments for specific projects and capabilities,stewarded for a limited time by faculty stewards on behalf of MIT.nano.

• All areas within the MIT.nano building are overseen by MIT.nano staff.• Users of the shared toolset and privately stewarded tools are subject to oversight bythe MIT.nano staff and agree to adhere to MIT.nano rules, procedures and policies.

1. Between 1 and 6 years initial agreement on STEWARDED tools2. MIT.nano compensated to offset incurred costs for install and maintenance3. Joint discussion with CRSP on space needs

… MIT.nano EQUIPMENT SUPPORT PROGRAM (ESP) for PRIVATLY STEWARDED TOOLS:

MIT.nano Equipment Support Plan Tiers

1. These are coarse descriptors, delineating the type and intensity of operations and associated costs for different types of equipmentthat may be located in MIT.nano but excluded from the shared tool set. Supported equipment fees (ESP) include deliverables suchas operational non-research staffing (as appropriate to the space), chilled water, DI-water, compressed dry air. ESPs do not includeconsumables (e.g., specialty gases including nitrogen, liquid nitrogen) and fee-for-service (e.g., design, installation, moving, de-installation of equipment, equipment maintenance by vendor); these will be billed separately by MIT.nano.

2. For the safety of all facility users, MIT.nano staff must establish all gas connections and provide any specialty gas. This also allowsMIT.nano to manage the quantity of the stored dangerous gases in the building. All gasses delivered and consumed in the ESP planfor each PI will be metered; the PI will be charged only for the gasses they consume, not the entire gas bottle. Cost of installationof needed piping (from gas cabinets to the PI’s tools) and gas meters will be billed separately.

3. These fees are set as fixed for transparency and simplicity on an annual PI basis, and are based on operating costs including staffresponse, toxic gas monitoring, and other deliverables. As some equipment operating costs scale with physical volume, if a facultyproposal for an ESP plan significantly exceeds operating costs represented in these ESPs, fees could be increased incrementally toreflect that. However, these are expected to be rare cases due to the finite and shared resources of MIT.nano.

ESP Tier Descriptor1 ESP Fee

($/day)3ESP Fee ($/year)

1 Cleanroom intensive and gas-delivery intensive services2 $136 $50k

2 HVAC intensive; includes cleanroom services without specialty gas and chemical delivery $76 $28k

3Noise isolation intensive;

imaging/metrology/prototyping usesoutside cleanroom in gas monitored locations, without use of specialty gasses and chemicals

$30 $11k

• Thermo Fisher/FEI – September 21, 2017 (8 talks), Next Generation Electron Microscopy Technology and Applications (~80 attendees)

• Carl Zeiss Microscopy – October 21, 2017 (4 talks), Technical Innovations in Electron, X-ray, and Ion Beam Microscopy Applications for both Materials and Life Sciences (~40 attendees)

• Raith Nanofabrication – December 13, 2017 (6 talks), Advancing Nanoscale Science and Engineering with EBL, FIB, and SEM Nanofabrication (~60 attendees)

• Ametek: EDAX, Spectro, Zygo, Cameca, and TMC –January 25, 2018 (6 talks), Advanced Technologies for Analysis and Metrology in Nanotech, Life Science, and Material Science Applications (~30 attendees)

• Protochips – February 22, 2018 (3 talks), Accelerating Research With In Situ Microscopy (~45 attendees)

• Physical Electronics – March 1, 2018 (TT Express) Mass Spectrometry Imaging Beyond "Show & Tell:" 2D & 3D Imaging and Identification of Chemistry by Parallel Imaging MS/MS (~25 attendees)

• Hitachi High Technologies – April 9, 2018 (TT Express), Nano-Alchemy and the Art of Observation in SEM, STEM and TEM (~25 attendees)

• SAMCO – April 17, 2018 (TT Express), High Performance Etch and Thin Film Deposition Solutions (~25 attendees)

• Bruker – May 2, 2018 (7 talks), Next Generation Instrumentation for Nanoscale Research using AFM, XRD, XRF, X-ray, uCT, EDS, EBSD, NanoIndentation, White Light Interferometry and Fluorescence Microscopy (35 attendees)

• Neaspec – May 7, 2018 (TT Express), Optical Imaging and Spectroscopy with s-SNOM: From Nanoscale Chemical Identification of Polymers to Real-Space Visualization of Exotic Waves in 2d Materials (18 attendees)

• Nanoscribe – June 28, 2018, Two-photon Polymerization in 3D Printing Sets New Standards in Micro and Nanofabrication

• NION – September 28, 2018; Aberration-corrected STEM: past, present and future. (20 attendees)

• Oxford and Asylum Research – October 16, 2018; Pushing the Boundaries of Nanoscale Processing, Characterization and Analysis. Approx. (25 attendees)

• Tescan – November 8, 2018; Beyond Gallium: Analytical |FIB-SEM with focus on TOF-SIMS and lithium battery research. (~20 attendees)

• Kurt Lesker - December 5, 2018; Vacuum technologies and applications (~20 attendees)

Upcoming:• Bruker AFM - March 4, 2019• TEL - March 18, 2019

Series Launched in the

Fall of 2107

Ready, Set, Go …

Events & Programs

SENSE.nano – June 5, 2018

Two Seed Grants awarded:• Prof. Jennifer Rupp: “Environmental SOx Sensors

Based on Solid-State Lithium Garnet Devices”• Prof. Luqiao Liu: “Sensitive Hybrid Magnetic Field

Sensor for Biological Imaging”Next SENSE.nano is in the Fall 2019

Sensing our most precious resources: Water, the Environment, and Agriculture systems

Community Update – June 6, 2018Over 400 attendees

October 4, 2018

“At the Dawn of the Nano Age” Symposium• Energy Systems• Health and Medicine• Integrated Systems• Quantum Computing• Materials at Nanoscale• Frontiers of Design

MIT.nano Celebration• Ribbon-Cutting• Facility Tours• Poster Session• Exhibitions & Reception

Over 1000 attendees

Cryo-EM Center at MIT.nanoOver 100 attendeesOctober 5, 2018

Upcoming• • • • • • • • • • • • • • • • • • • • • • •

MIT.nano Seminar Series

April 11–14, 2019

Starting in March 2019 - led by Prof. Farnaz Niroui, EECS

Perspective SeriesFour talks giving a foundational perspective on development of nanoscience/nanoengineering: materials, biotechnology, devices, metrology

Spring 2019

AY 2019-2020

Technical Talks• Monthly, technical seminars (except November)• Speakers nominated by the MIT.nano community

November 2019

Inaugural Dresselhaus LectureAnnual lecture series named in honor of Millie Dresselhaus

AY 2019-2020

Student/Post-Doc/Staff TalksTalks drawn from within the MIT.nano community

Four year program starting in Spring 2019

Development of Hardware and Software Tools

4 Seed Grants per year� Two software� Two hardware

Upcoming Seed Proposals call on the topics of: • Technology for Gaming in Research and Education• Technology for Communication Paradigms• Technology for Human-level Inference• Technology for Data Analysis and Visualization

MIT.nano Immersion Lab Program

Supported by

Upcoming Events and ProgramsARTS.nano

Launch of the ARTS.nano ProgramFebruary 26, 2019 from 1 to 5pm in Wong Auditorium

A symposium exploring the intersection of the frontiers of science and technology with artistic practice

Campus Preview Weekend (April 11-14, 2019)Cambridge Science Festival (April 16, 2019)

� Tours, demos, and hands-on activities at MIT.nano� Lecture on nanotechnology by Prof. Farnaz Niroui� Galleries and Immersion Lab Exhibits

MIT.nano Weekly Tours

� We are training student tour guides (join a session Tomorrow at 12pm)

� Hosting tours for DMSE and EECS visit weekends

in partnership with CAST

MIT.nano Operations• • • • • • • • • • • • • • • • • • • • • • •

Founding Member Companies

Samantha FarrellAssistant to Director

Tina GilmanPrograms Director

Vladimir BulovićDirector

Brian AnthonyOutreach/Education

Director

Tom GeartyCommunications

Director

Mara KarapetianManager

Media and Design

Mary YoungAdministrative

Officer

Ludmila LeopardeFinancial

Administrator

Shereece BeckfordAdministrative

Assistant

Dennis GrimardManaging Director

Nicholas MenounosAssistant Director

Infrastructure

Anna OsterovAssistant Director

User Services, Metrology

Jorg ScholvinAssistant Director

User Services, Fab.nano

Whitney HessEHS

Coordinator

Kris PayerResearchSpecialist

Annie WangSpecialProjects

Core Team

MIT.nano Extended Team

Chad GaltsCommunications

Director, SoE

Lesley RockCommunications

Officer, SoE

Travis WanatProject Manager

Dept. of Facilities

YumiYasutakeResource

Development

Jonatan ToledoResource

Development

Richard MacMillan

ResourceDevelopment

Marco MuñozResource

Development

Lillie Paquette

Multimedia, SoE

All of the MTL fab staff.MTL fab accounts shifted to MIT.nano on July 1, 2018.

Coordination with MRL SEF staff.

Coordination with DMSE NANO lab staff.Resource Development Team

Facilities SoE Communications

New sections for users and broader community

How to …… access MIT.nano

toolsets … propose tools for

installation in MIT.nano

MIT.nano facilities and specific toolset capabilities …including the present schedule for install of new tools

1 2 3 4

Additional News Feed …created specifically for updates for the community

Follow …… Programs … Tool Talks… Events

TO COME: Training sections, Seminar series, Academics

CHECK IT OUT !mitnano.mit.edu

Thank you!

Questions ?