· 1990 Fir) (Atomic Force Microscope, AFM) (Scanning Tunneling Microsccpe, ST M) 30Å, 1987 ± "AFM STM AFM 1982 IBM • (Gerd Beinnig) • (Heinrich Rohrer)

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· 1990 Fir) (Atomic Force Microscope, AFM) (Scanning Tunneling Microsccpe, ST M) 30Å, 1987 ± "AFM STM AFM 1982 IBM • (Gerd Beinnig) • (Heinrich Rohrer)

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