-
LG.PHILIPS DISPLAYS STANDARDISATION MECHANICAL CONSTRUCTIONS
PRODUCTION TECHNOLOGY & ENGINEERING
UTILITY & CHEMICAL STANDARDS 00-04-15 99-07-16
CONTENTS Page
Utility standards 2 medium group : Air 3
code : A.. 3 medium group : Gasses 5
code : B.. 5 medium group : Water 6
code : C.. 6 medium group : cooling medium 9
code : D.. 9 medium group : heating medium 9
code : E.. 9 medium group : Exhausts 10
code : F.. 10 medium group : Fuels 11
code : H.. 11 medium group : Waste water drains 12
code : J.. 12 medium group : Power supply 12
code : T.. 12 code : TX.. 12
Chemical standards 14 medium group : Chemicals 15
code : K.. & L.. 15 medium group : Chemicals to Separation /
Regeneration. 17
code : M.. 17 medium group : Chemicals PVA & Acids 19
code : N.. 19
Page - 1kk Tab 11
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Utility standards (appendix to groupnumber sheet 411)
Key & definitions:
first piping
second piping
third piping
first piping Main supply/drain piping (also called main piping).
From utility building or chemicals preparation department to
production area.
second piping From first piping to production machine, chemicals
preparation installation or utility installation, and is situated
not further than 50 cm away from connection point on the equipment:
50 cm through the floor in case piping is situated under the
machine floor 50 cm through ceiling incase piping is situated above
machine floor the piping ends with a valve, and is ready for
further connection.
third piping From second piping to machine connection.
Note: Second piping should be engineered and installed in such a
way that the third piping length is minimized. The third piping
should not obstruct the freedom of action for operators and
maintenance people. To meet this requirement, the holes in floor or
ceiling for the second piping should be drilled just before
equipment installation but after the equipment is marked on the
floor. Piping & appendage material used should meet the
specifications as standardized in this chapter
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coding:
XXY-00
serial number (only if the number of connections of the same
medium on one machine > 1)
S for supply and R for return (only if the medium is regenerated
or separated)
medium code
example:
DAS-03: The third chilled water 6 C supply connection on the
machine.
AC-05: The fifth filtered compressed air connection on the
machine.
medium group : Air
code : A.. code medium unit physical properties chemical
composition preferred pipe material and treatment AA
see
remark
compressed air
Nm3
/h pressure at point of use = 6 bar (g)
pressure dewpoint = -30 C
10 ! temperature ! 30 C
oil free seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted AC
see
remark
filtered compressed
air dry
Nm3
/h pressure at point of use = 6 bar (g)
pressure dewpoint = -30 C
10 ! temperature ! 30 C
particles < 1 m
dust load < 1 mg/m3
oil free AISI SS316L
AD blower air Nm3
/h pressure at point of use = 350 +/- 10 mbar(g)
10 ! temperature ! 30 C
particles < 5 m
dust load < 5 mg/m3
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted sealed with Loctite 570 or 577
exclusively
AE blower air dry Nm3
/h line pressure = 350 +/- 10 mbar (g)
pressure at point of use = 0.2 bar (g)
10 ! temperature ! 30 C
particles < 45 m
dust load < 1.3 mg/m3
abs. humidity < ..... ppm
AISI SS316L
sealed with Loctite 570 or 577 exclusively
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code medium unit physical properties chemical composition
preferred pipe material and treatment AF
see
remark
vacuum Am3
/h pressure at point of use = 0.2 bar (abs.) seamless
St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted piping from process equipment
to main header AISI SS316L
AG compressed air
blow-off
Nm3
/h
AH ambient air Nm3
/h
filter &drying unit
flange &gasket
St.37.0
SS316L
AA
CA
factory utillity buildingRemark compre
ssed air installation
:
Filtered compressed air dry to be generated from raw compressed
air by filter and drying unit
located in factory. Piping for:
raw compressed air seamless St.37.0. filtered compressed air dry
from filter unit to machine AISI SS316L To avoid tension corrosion,
stainless steel filter unit coupled to steel piping with flanges
and rubber gasket.
Remark vacuum installation:
Preferred piping material: productionmachine
flange &gasket
floor
AFSt.37.0
SS316L
from production machine to main header AISI SS316L mainheader
AISI SS316L or St.37.0 (to be defined by supplier vacuum unit) To
avoid tension corrosion, stainless steel piping coupled to steel
piping with flanges and rubber
gasket.
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medium group : Gasses
code : B.. code medium unit physical properties chemical
composition preferred pipe material and treatment BA oxygen Nm
3/h pressure at point of use = 5.5 +/- 0.2 bar (g) O2 > 99.5%
vol.
CxHy < 20 vpm
N2 < 100 vpm
H2O < 5 vpm
Ar < 4000 vpm
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted sealed with Loctite 570 or 577
exclusively All parts made oil- and greese free
BB nitrogen Nm3
/h pressure at point of use = 1 bar (g) N2 > 99.98% vol.
CxHy < 0.1 vpm
O2 < 5 vpm
H2O < 5 vpm
Ar < 200 vpm
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted
BC hydrogen Nm3
/h pressure at point of use = 500 mbar (g) H2 > 99.98%
vol.
CxHy < 1 vpm
N2 < 100 vpm
O2 < 10 vpm
H2O < 10 vpm
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted
BD IFG
(nitrogen/hydrogen)
Nm3
/h pressure at point of use = 500 mbar (g) H2 = 5 % vol.
N2 = 95 % vol.
CxHy < 0.20 vpm
O2 < 10 vpm
H2O < 10 vpm
Ar < 200 vpm
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted
BE carbondioxide gas m3
n/h pressure at point of use = 700 mbar (g) CO2 = 98.5% vol.
CxHy < 0 vpm
O2 < 0 vpm
H2O < 0 vpm
N2 < 0 vpm
seamless St.37.0
Used for fire extinguishing in lacquering room and lacquer
separation.
BF nitrogen Nm3
/h pressure at point of use = 6 bar (g) N2 > 99.98% vol.
CxHy < 0.1 vpm
O2 < 5 vpm
H2O < 5 vpm
Ar < 200 vpm
seamless St.37.0:
external & internal: grit blasted, hot dip galvanized or
phosphated and externally painted
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medium group : Water
code : C.. code medium unit physical properties chemical
composition preferred pipe material and treatment CA cold tap
water
(only for process,
non-potable)
m3
/h line pressure = 3 1 bar(g)
6 ! PH value ! 9
hardness < 20 DH = 3.57 mmol
(to be confirmed and specified by supplier)
toxic substance ! 1000 mg/m3
dissolved O2 < 10 mg/l
Iron (Fe) < 10 microg/l
seamless St.37.0:
external: coated internal: grit blasted & galvanized
threaded connections and vapourtight insulations
CB
see
remark
warm tap water
(for general use
only, for process
see ED)
m3
/h (to be confirmed and specified by supplier) according to
local regulations
Remark warm tap water:
Warm tap water only for genera
l use (showers, etc.). For production purpose ED (warm water
supply) is prefered.
code medium unit physical properties chemical composition
preferred pipe material and treatment
CC
see
remark
raw demin water m3
/h pressure at point of use = 4 0.1 bar (g)
15 ! temperature ! 20 C
conductivity < 0.5 S/cm (@ 25 C)
filtration = 10 m
SiO2 < 0.2 ppm
Cu < 0.01 ppm
Pb < 0.01 ppm
Fe < 0.01 ppm
indoor: PP PN10 outdoor: PP PN10
CD
see
remark
cold demin water m3
/h pressure at process equipment = 5 0.1 bar (g)
19 ! temperature ! 21 C
conductivity < 0.5 S/cm (@ 25 C)
filtration = 5 m
SiO2 < 0.2 ppm
Cu < 0.01 ppm
Pb < 0.01 ppm
Fe < 0.01 ppm
indoor: PP insulated PN10
CE
see
remark
warm demin water m3
/h pressure at process equipment = 5 0.1 bar (g)
29 ! temperature ! 31 C
conductivity < 0.5 S/cm (@ 25 C)
filtration = 5 m
SiO2 < 0.2 ppm
Cu < 0.01 ppm
Pb < 0.01 ppm
Fe < 0.01 ppm
indoor: PP insulated PN10
CF
see
remark
exposure demin
water
m3
/h pressure at process equipment = 2 0.2 bar (g)
16 ! temperature ! 24 C
conductivity < 10 S/cm (@ 25 C)
filtration = 5 m
SiO2 < 0.2 ppm
Cu < 0.01 ppm
Pb < 0.01 ppm
Fe < 0.01 ppm
indoor: PP PN10
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Remark demin water installation:
Main target for the demin water installation is to achieve a
stabil pressure on each process consumer independent of flow
fluctuations. This goal can only be
guaranteed by a break tank system. The by-pass system is
sensitive for flow fluctuations but cheaper compared to the break
tank system. The decision wich
system to use is an investment / risk issue and therefor to be
decide
raw deminpreparation
consumerconsumer
CA
drain drain
same as20C demin
by pass system
20C deminpreparation
30C deminpreparation
exp. deminpreparation
exp. deminbreaktank exp. table
FI
exp. table
FIP
regulation valve
consumer
FI
consumer
FI
drain drain
raw deminpreparation
CA
break tank system
30C deminpreparation
30C deminbreaktank consumer
exp. deminpreparation
exp. deminbreaktank exp. tableexp. table
consumer
regulation valve
regulation valve
d by the project.
break tank system:
Demi water system based on break tanks
to avoid pressure fluctuations, regulation valve for stabile
pressure and closed loop systems. For more detailed information see
equipment documentation.
Remark: 20C demin water will be generated from 30C demin water
by a local cooler
To secure stable pressure:
each demin water loop (except raw demin) equipped with:
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break tank with return connection and level control Items to be
defined in preliminary consultation with architect and
customer:
capacity of demin water installations specification (capacity)
of break tanks and pumps
By pass system:
Demin water system based on closed loop systems with by pass and
regulation valves on each process consumer. Stabile pressure is
achieved by constant flow
from main header to return. The system (and pressure at point of
use) is sensitive for flow fluctuations. For more detailed
information see equipement
documentation.
To secure stable pressure:
20 & 30C demin water loop equipped with: Samson regulation
valve between supply and return flow measuring instrument on supply
to each consumer regulation valve in supply and by pass at each
consumer
exposure demin water loop equiped with: break tank with return
connection and level control flow measuring instrument on supply to
each consumer frequency controlled pump
Items to be defined in preliminary consultation with architect
and customer:
capacity of demin water installations specification (capacity)
of 20 & 30C regulation valves specification (capacity) of
exposure break tanks and pumps
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medium group : cooling medium
code : D.. code medium unit physical properties chemical
composition preferred pipe material and treatment DAS chilled water
6 C,
supply
m3
/h 6 ! temperature ! 7 C seamless St.37.0:
external: painted & vapourtight insulation internal: grit
blasted
DAR chilled water 12
C, return
m3
/h temperature ! 12 C seamless St.37.0:
external: painted & vapourtight insulation internal: grit
blasted
DBS
see
remark
cooling water 16
C, supply
m3
/h temperature = 16 2 C
2 ! pressure ! 3 bar(g)
seamless St.37.0:
external: painted & vapourtight insulation internal: grit
blasted
DBR
see
remark
cooling water 21
C, return
m3
/h temperature ! 21 C seamless St.37.0:
external: painted & vapourtight insulation internal: grit
blasted
Remark cooling water 16C, supply:
If cooling water supply of the ILEs is very critical, separate
systems (partly
stand by) for ILEs and other consumers should be considered.
chilled water 6Cinstallation
consumer cooling water16C installation
consumer
regain installation
CA
Remark cooling water 21C, return:
Cooling water can be re-used in a closed loop. In this case the
21C return will
be regained for chilled water 6C use. The chemical composition
of cooling
water 21C return must therefor be specified by the regain
apparatus supplier
(for example: maximum pollution level).
medium group : heating medium
code : E.. code medium unit physical properties chemical
composition preferred pipe material and treatment EA
see
remark
steam
(saturated)
kg/h pressure at point of use = 4 0.5 bar (g) originate from:
raw demin water [CC]
or softened water
seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
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code medium unit physical properties chemical composition
preferred pipe material and treatment EB condensate kg/h
temperature < 100 C seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
ECS
see
remark
hot water, supply m3
/h temperature = 140 C
hardness < 5.6 DH = 1 mmol
originate from:cold tap water [CA] seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
ECR hot water, return m3
/h temperature = 120 C seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
EDS warm water,
supply
m3
/h 70 ! temperature ! 90 C originate from:cold tap water [CA]
seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
EDR warm water, return m3
/h 50 ! temperature ! 70 C seamless St.37.0:
external: painted and thermal insulated internal: grit
blasted
Remark: hot water or steam supply:
Separate boiler preferred for hot water to prepare PVA. Also
steam is used. To be decided in project w
hich heating medium will be chosen.
medium group : Exhausts
code : F.. code medium unit physical properties chemical
composition preferred pipe material and treatment
FA exhaust (fan
included in
production
equipment)
m3
/h pressure at point of use and temperature to be
specified by equipment supplier
temperature depending
galvanized sheet metal
FB exhaust (fan not
included in
production
equipment)
m3
/h pressure at point of use and temperature to be
specified by equipment supplier
temperature depending
galvanized sheet metal
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code medium unit physical properties chemical composition
preferred pipe material and treatment FC exhaust to
scrubber
m3
/h pressure at point of use to be specified by
equipment supplier
20 ! temperature ! 40 C
plastic piping PP
flanged piping butterfly valves at each process exhaust
FD chimney m3
/h natural draft
temperature to be specificated by equipment
supplier
temperature depending
galvanized sheet metal
FF exhaust to
incinerator
m3
/h pressure at point of use and temperature to be
specified by equipment supplier
temperature depending
galvanized sheet metal
medium group : Fuels
code : H.. code medium unit physical properties chemical
composition preferred pipe material and treatment HA natural gas
Nm
3/h pressure at point of use = 340 +/- 10 mbar (g)
net caloric value: = 31.7 MJ/Nm3
seamless St.37.0:
external: gritt blasted and painted internal: grit blasted
sealed with Loctite 570 or 577 exclusively
HB LPG Nm3
/h pressure at point of use = 340 +/- 10 mbar (g)
net caloric value = 108.56 MJ/Nm3
wobbe number = 81 8
mixture of propane C3H8 and
butane
C5Hx content < 0.5 Vpm
seamless St.37.0:
external: gritt blasted and painted internal: grit blasted
sealed with Loctite 570 or 577 exclusively
HC water gas Nm3
/h
HD
see
remark
heavy oil kg/h to be specified by plant engineering. to be
specified by plant engineering. to be specified by plant
engineering.
HE
see
remark
light oil kg/h to be specified by plant engineering. to be
specified by plant engineering. to be specified by plant
engineering.
HF propane Nm3
/h pressure at point of use = 100 mbar (g)
net caloric value: = 93.575 MJ/Nm3
seamless St.37.0:
external: gritt blasted and painted internal: grit blasted
Remark heavy oil & light oil:
Alternative fuel, not preferred by Philips DCE.
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medium group : Waste water drains
code : J.. code medium unit source & chemical composition
concentration Waste Water Treatment (WWT) line
JA HF drain Chrome/(Phosphor) drain
m3
/h Screen processing: HF/HNO3 Screen processing: Phosphor, Cr
Reclaim: HF
max. 800 mg/l n.a. max. 500 mg/l
Fluoride
JB Lead (Pb) drain m3
/h Reclaim: Pb, Zn, Ba, HNO3 max. 300 mg/l Lead
JD Acid/Alkaline drain m3
/h Several: acid, alkaline, demin water Thermal: softflash
pH:1-13
Neutralization - Fluoride
JF Domestic drain m3
/h Several
JH Organic drain m3
/h Screen processing: Toluene, Acetone, PVA, PVP max. 35 g/l
Organic
JJ Chrome/(Phosphor) drain
m3
/h Thermal: Cr, Pb, Zn, Isopropanol Screen processing: Phosphor,
Cr
max. 80 mg/l n.a.
Fluoride
medium group : Power supply
code : T.. code medium unit frequency tolerance current
tolerance
TA 230 Volt (-10% / +6%) - 50 Hz, fixed connection kVA 0.1 Hz 5
%
TB 230 Volt (-10% / +6%) - 60 Hz, fixed connection kVA
TC 400/230 Volt (-10% / +6%) - 50 Hz, fixed connection kVA
TD 400/230 Volt (-10% / +6%) - 60 Hz, fixed connection kVA
TE 480/277 Volt - 50 Hz, fixed connection kVA
TF 480/277 Volt - 60 Hz, fixed connection kVA
TK 230 Volt (-10% / +6%) - 50 Hz, socket outlet kVA
TL 230 Volt (-10% / +6%) - 60 Hz, socket outlet kVA
TM 400/230 Volt (-10% / +6%) - 50 Hz, socket outlet kVA
TN 400/230 Volt (-10% / +6%) - 60 Hz, socket outlet kVA
TP 480/277 Volt - 50 Hz, socket outlet kVA
TQ 480/277 Volt - 60 Hz, socket outlet kVA
code : TX.. TXA 230 Volt (-10% / +6%) - 50 Hz, emergency power
fixed connection kVA
TXB 230 Volt (-10% / +6%) - 60 Hz, emergency power fixed
connection kVA
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TXC 400/230 Volt (-10% / +6%) - 50 Hz, emergency power fixed
connection kVA
TXD 400/230 Volt (-10% / +6%) - 60 Hz, emergency power fixed
connection kVA
TXE 480/277 Volt - 50 Hz, emergency power fixed connection
kVA
TXF 480/277 Volt - 60 Hz, emergency power fixed connection
kVA
TXK 230 Volt (-10% / +6%) - 50 Hz, emergency power socket outlet
kVA
TXL 230 Volt (-10% / +6%) - 60 Hz, emergency power socket outlet
kVA
TXM 400/230 Volt (-10% / +6%) - 50 Hz, emergency power socket
outlet kVA
TXN 400/230 Volt (-10% / +6%) - 60 Hz, emergency power socket
outlet kVA
TXP 480/277 Volt - 50 Hz, emergency power socket outlet kVA
TXQ 480/277 Volt - 60 Hz, emergency power socket outlet kVA
Remark emergency power: The total electric power as needed by an
equipment(group) should be listed coded: T..
The part of this total electrical power that needs to be
connected to the emergency power should be listed coded: TX..
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Chemical standards (appendix to groupnumber sheet 411)
Key & definitions:
first piping
second piping
third piping
first piping Main supply/drain piping (also called main piping).
From utility building or
chemicals preparation department to production area. second
piping From first piping to production machine, chemicals
preparation installation or
utility installation, and is situated not further than 50 cm
away from connection point on the equipment: 50 cm through the
floor in case piping is situated under the machine floor 50 cm
through ceiling incase piping is situated above machine floor the
piping ends with a valve, and is ready for further connection.
third piping From second piping to machine connection.
Note:
Second piping should be engineered and installed in such a way
that the third piping
length is minimized.
The third piping should not obstruct the freedom of action for
operators and maintenance
people. To meet this requirement, the holes in floor or ceiling
for the second piping should
be drilled just before equipment installation but after the
equipment is marked on the floor.
Piping & appendage material used should meet the
specifications as standardized in this
chapter.
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coding: XXY-00
serial number (only if the number of connections of the same
medium on one machine > 1)
S for supply and R for return (only if the medium is regenerated
or separated)
medium code
example:
DAS-03: The third chilled water 6 C supply connection on the
machine.
AC-05: The fifth filtered compressed air connection on the
machine.
medium group : Chemicals
code : K.. & L.. code medium unit physical properties
chemical composition preferred pipe material and treatment appendix
KAS
KAR
green suspension m3
/h pressure 2 to 4 bar
temperature 20 C
Phosphors.
Deminwater.
PVA 5.4 %.
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
KBS
KBR
red suspension m3
/h pressure 2 to 4 bar
temperature 20 C
Phosphors.
Deminwater.
PVA 5.4 %.
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
KCS
KCR
blue suspension m3
/h pressure 2 to 4 bar
temperature 20 C
Phosphors.
Deminwater.
PVA 5.4 %.
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
KE Butanol m3
/h pressure 1 to 2 bar,
temperature 20 to 30 C
Butanol Stainless steel welding.
Earthed. Insulated.
app. 2
KFS
KFR
Photoresist m3
/h pressure 2 to 3 bar
temperature 20 C
Photoresist.
Deminwater 20 C
Plastic piping PP
Butt welded, ball valves. app. 3
KGS
KGR
Prewet Liquid m3
/h pressure 2 to 3 bar
temperature 30 C
xxxxxx
xxxxxx
Plastic piping PP.
Butt welded, ball valves. app. 4
KHS
KHR
Polyetheneoxide
1%
m3
/h pressure 1 to 2 bar
temperature 20 C
Polyox
Deminwater 20 C
Plastic piping PP. Butt welded, ball valves.
app. 4
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KI Ludox m3
/h pressure 1 to 2 bar
temperature 30 C
Ludox
Deminwater
Plastic piping PP.
Butt welded, ball valves. Stainless steel piping 316L
Butt welded, insulated.
app. 5
KJ Isopropanol m3
/h pressure 1 bar
temperature 20 C
Isopropanol Stainless steel piping 316L
Butt welded, insulated. Earthed
app. 6
KK Sorgen. m3
/h pressure 1 to 2 bar
temperature 30 C
Sorgen
PVA 5.4 % 40-80
Deminwater
Plastic piping PP.
Butt welded, ball valves. Stainless steel piping 316L Butt
welded, insulated.
app. 5
KLS
KLR
Soda m3
/h pressure 2 to 3 bar
temperature 30 C
Soda
Deminwater
Plastic piping PP.
Butt welded, ball valves. app. 8
KM Prosol m3
/h pressure 1 to 2 bar
temperature 20 C
Plastic piping PP.
Butt welded, ball valves.
KN Acetone m3
/h pressure 2 bar, temperature 20 C Acetone Stainless steel
piping 316L
Butt welded. Earthed
app. 9
KO photoresist
concentrate
m3
/h pressure 2 bar
temperature 20 C
Toluene
Hardeners
Deminwater
Stainless steel piping 316L
Butt welded, insulated. Earthed.
app. 3
KP Lacquer m3
/h pressure 2 bar
temperature 20 C
Toluene
Hardeners
Stainless steel piping 316L
Butt welded, insulated. Earthed.
app. 10
KQ Lissapol m3
/h pressure 2 to 3 bar
temperature 20 to 30 C
Lissapol xxx %
Deminwater
Plastic piping PP.
Butt welded, ball valves. app. 7
KU Graphite m3
/h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxxxxxxxx
KV Silicate m3
/h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxxxxxxxx
KX Soft Flash m3
/h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxxxxxxxx
KY Bismuth
Suspension
m3
/h xxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxx
xxxxxxxxxxxxxxxxxxxxxxxxxx
KZ Ethanol m3
/h Pressure 1 to 2 bar
temperature 20 to 30 C
Ethanol Stainless steel piping 316 L
Butt welded, ball valves. Earthed
app. 2
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Tab 11 -
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code medium unit physical properties chemical composition
preferred pipe material and treatment appendix
LI Ludox m3
/h pressure 1 to 2 bar
temperature 34 C
Ludox
Deminwater
Stainless steel piping 316L
Butt welded, insulated, earthed. app. 5
LK Sorgen. m3
/h pressure 1 to 2 bar
temperature 30 to 34 C
Sorgen
PVA 5.4 % 40-80
Deminwater
Stainless steel piping 316L
Butt welded, insulated, earthed. app.5
medium group : Chemicals to Separation / Regeneration.
code : M.. code medium unit physical properties chemical
composition preferred pipe material and treatment appendix MA
see
remark
Suspension to
Decanter
m3
/h Pressure 0 to 3 bar
Temperature 20 C
Red, Blue and Green Waste
Phosphors.
Deminwater
PVA 5,4 %
Plastic piping HDPE
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 1
MB Green Suspension m3
/h Pressure 0 to 3 bar
Temperature 20 C
Green Phosphors.
Deminwater
PVA 5.4 %
Plastic piping HDPE
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 1
MC Red Suspension m3
/h Pressure 0 to 3 bar
Temperature 20 C
Red Phosphors.
Deminwater
PVA 5.4 %
Plastic piping HDPE
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 1
MD Blue Suspension m3
/h Pressure 0 to 3 bar
Temperature 20 C
Blue Phosphors.
Deminwater
PVA 5.4 %
Plastic piping HDPE
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 1
ME Rewashed
Suspension
m3
/h Pressure 0 to 3 bar
Temperature 20 C
Blue Phosphors.
Deminwater
PVA 5.4 %
Plastic piping HDPE
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 1
MF Bismuth m3
/h Pressure 0 to 3 bar
Temperature 20 C
Bismuth
Deminwater
Plastic piping PP
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 11
MG Softflash m3
/h Pressure 0 to 3 bar
Temperature 20 C
Softflash
Deminwater
Plastic piping PP
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 11
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Tab 11 -
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MH Dag / anti crack m3
/h Pressure 0 to 3 bar
Temperature 20 C
DAG
Anti crack
Deminwater
Plastic piping PP
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 11
MJ aceton m3
/h Pressure 0 to 3 bar
Temperature 20 C
Aceton
Deminwater
AISI SS316L
Butt welded, ball valves app. 9
MK PVA regeneration m3
/h Pressure 0 bar
Temperature 25 C
Deminwater
PVA 8-88
2.3 ! concentration ! 2.8 % (1)
Plastic piping PP
Butt welded, ball valves. Piping slope to the receiving tanks
1
app. 13
MLS
MLR
green pourback
suspension
m3
/h Pressure 2 to 3 bar
Temperature 20 C
Green phosphor
PVA 5.4%
Deminwater
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
MMS
MMR
red pourback
suspension
m3
/h Pressure 2 to 3 bar
Temperature 20 C
Red phosphor
PVA 5.4%
Deminwater
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
MNS
MNR
blue pourback
suspension
m3
/h Pressure 2 to 3 bar
Temperature 20 C
Blue phosphor
PVA 5.4%
Deminwater
Plastic hose ( protected of light ).
Multibar hose PVC material. app. 1
MP lacquer m3
/h pressure 2 bar
temperature 20 C
Toluene
Hardeners
Deminwater
Stainless steel piping 316L
Butt welded, insulated. Earthed.
app. 10
remark suspension to decanter:
Waste green or red suspension (to decanter) i
s produced on six positions: flowcoat green, flowcoat red,
corner cup washing, separation green, separation red, regeneration
green and regeneration red. The
waste suspension can be transported to the decanter with six
seperate pipes or in one communal. In both cases all connections
are coded MA.
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Tab 11 -
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medium group : Chemicals PVA & Acids
code : N.. code medium unit physical properties chemical
composition preferred pipe material and treatment appendix NAS
NAR
PVA 5.4%
m3
/h pressure 2 to 3 bar
temperature 20 C
viscosity 100 mPa/sec
Deminwater
PVA 40-88
5.0 ! concentration ! 5.8 % (1)
Plastic piping PP.
Butt welded, ball valves.
app. 5
app. 1
app. 12
NES
NER
PVA 0.2% m3
/h pressure 2 to 3 bar
temperature 30 C
viscosity 1 mPa/sec
Deminwater
PVA 40-88
0.16 ! concentration ! 0.24 (1)
Plastic piping PP.
Butt welded, ball valves.
app.12
NBS
NBR
PVA 0.1% m3
/h pressure 2 to 3 bar
temperature 30 C
viscosity 1 mPa/sec
Deminwater
PVA 40-88
0.08 ! concentration ! 0.12 (1)
Plastic piping PP.
Butt welded, ball valves.
app.12
NCS
NCR
PVA 0.05% m3
/h pressure 2 to 3 bar
temperature 30 C
viscosity 1 mPa/sec
Deminwater
PVA 40-88
0.04 ! concentration ! 0.06 % (1)
Plastic piping PP.
Butt welded, ball valves.
app.12
NDS
NDR
PVA 0.02% m3
/h pressure 2 to 3 bar
temperature 30 C
viscosity 1 mPa/sec
Deminwater
PVA 40-88
0.015 ! concentration ! 0.025 % (1)
Plastic piping PP.
Butt welded, ball valves.
app. 12
NI PVA 10%
m3
/h pressure 2 to 3 bar
temperature 20C
viscosity 90 mPa/sec
Deminwater
PVA 8-88
9 ! concentration ! 11 % (1)
Plastic piping PP.
Butt welded, ball valves.
app. 13
app. 14
NJS
NJR
PVA 2.5% m3
/h pressure 2 to 3 bar
temperature 30C
viscosity 7.5 mPa/sec
Deminwater
PVA 8-88
2.3 ! concentration ! 2.8 % (1)
Plastic piping PP.
Butt welded, ball valves.
app. 13
app. 14
NK
PVA 2.5% from
regeneration
m3
/h pressure 2 to 3 bar
temperature 30C
viscosity 7.5 mPa/sec
Deminwater
PVA 8-88
2.3 ! concentration ! 2.8 % (1)
Plastic piping PP.
Butt welded, ball valves.
app. 13
NO Hydrofluoric Acid m3
/h pressure 2 bar
viscosity 1 mPa/sec
Hydrofluoric Acid
Deminwater
5 ! concentration ! 8 % (1)
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall.
app. 15
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code medium unit physical properties chemical composition
preferred pipe material and treatment appendix NP Hydrofluoric
Acid,
storage
m3
/h pressure 2 bar
5 ! temperature ! 20 C
viscosity 1 mPa/sec
Hydrofluoric Acid
30 ! concentration ! 80 % (1)
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall. In tank preferred to be placed outside
factory
and sealed from UV light.
app. 15
NQ Nitric Acid m3
/h pressure 2 bar
viscosity 1 mPa/sec
Nitric Acid
Deminwater
5 ! concentration ! 8 % (1)
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall.
app. 15
NR Nitric Acid, storage
technical grade
m3
/h pressure 2 bar
5 ! temperature ! 20 C
viscosity 1 mPa/sec
Nitric Acid
Deminwater
40 ! concentration ! 60 %
technical grade (1)
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall.
app. 15
NS Nitric Acid, storage
chemical pure
m3
/h pressure 2 bar
5 ! temperature ! 20 C
viscosity 1 mPa/sec
Nitric Acid
Deminwater
40 ! concentration ! 60 %
chemical pure (1)
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall.
app. 15
NT Hydrofluoric and
Nitric Acid
m3
/h pressure 2 bar
viscosity 1 mPa/sec
Hydrofluoric Acid
Nitric Acid
Deminwater
5 ! concentration HF ! 12 %
10 ! concentration HNO3 ! 20 (1)
Plastic piping Double wall HDPE / PVDF
Butt-welded. Double wall.
app. 15
NU Boric acid m3
/h pressure 2 bar
viscosity 1 mPa/sec
Boric Acid
Deminwater
Plastic piping Double wall HDPE / PP
Butt-welded. Double wall.
app. 16
(1) remark: to be defined in project
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Tab 11 -
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Appendices
dosingblue
pourbackblue
preparationphosphor
blue
KCS
KCR
MNR
MNS
preparationphosphor
green
KAR
MLR
MLS
KAS dosinggreen
pourbackgreen
MMS
MMR
KBR
KBS
preparationphosphor
red pourbackred
dosingred
seperationphosphor
green
seperationphosphor
red
regenerationphosphor
red
regenerationphosphor
green
decanterphosphor
MB
MC
MA
MA
MA
MA
waste
flowcoat green
flowcoat red
flowcoat blue
separation
ME
process
rewash
chem. prep.
MA
MA
seperationphosphor
blue
regenerationphosphor
blue
MD
MA
MA
regeneration
CCW
CCW
CCW
MA
PREFERRED TO BE DONE AT
SUPPLIER
CCW = Corner Cup Washing
app. 1: Phosphor preparation, regeneration and separation.
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photoresist supply
KFR
KFS
KO
photoresistcart
matrix #1
processchem. prep.
photoresistpreparation
KO
matrix #2photoresist
cart
KFS
KFRphotoresist supply
remark: for every single matrix line a extra photoresist supply
unit and supply system is needed.
butanoltank
(outside building)
KE
processouter screen coating
chem. prep.
ethanoltank
(outside building) KZ
AS - AG preparation
app. 2: Anti Static - Anti Gloss preparation.
remark: direct routing from photoresist preparation to matrix by
photoresists cart PREFERRED
app. 3: photo resist preparation.
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Tab 11 -
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prewet preparation KGR
polyoxeparation
KHS
KHR
KGSprewet belt
processchem. prep.
pr
app. 4: prewet liquid preparation.
sorgen preparation
KK
process
prewet belt
chem. prep.
ludox preparation
KI tank(high level)
tank(high level)
staticmixer
LK
LI
distribution
NAS
app. 5: new wetting preparation.
isopropanol preparation
KJ
processchem. prep.gun washing
remark: separated distribution for each line PREFERRED
app. 6: isopropanol preparation.
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99-07-16 00-04-15
soda preparation
KLR
KLS
cone wash (zone 3)
processchem. prep.
tank tanktank
cone wash (zone 2) cone wash (zone 1)
lisapol preparation
KQ
processchem. prep.gun mounting
app. 7: lisapol preparation.
app. 8: soda preparation.
lacquersupply
KP
lacquerseperation
MP
seperationprocesschem. prep.lacquering
acetonsupply
KN
acetonseperation
MJ
seperationprocesschem. prep.prewet belt
app. 9: aceton preparation.
app. 10: lacquer preparation.
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Tab 11 -
99-07-16 00-04-15
b ism uth preparation
b ism uth / so ftflash / D AG seperation
(filte r press)
M F
seperationprocesschem . prep.bism uth spraying
softflash preparation
softflash app ly ing
M G
aquadag app ly ing
M H
D AG preparation
app. 11: bismuth, softflash & aquadag preparation.
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Tab
0002-01-15
TION
S
11 -
-04-15
PVA 0.02 %
PVA 0.2 %
PVA 0.1 %
NBS
NBR
NER
NES
NDR
NDS
PVA 5.4 %
preparationphotoresist
NAS
NAR
NAS
tank(high level)
tank(high level)
tank(high level)
wash & precoat
flowcoat developing
lacquering prewet
NAS
NAS
NAS
wash & precoat
chemical preparation process
tank(high level)
NAS
NCS
NCRPVA 0.05 %
NAS preparationsorgen
preparationphosphor
red
NAS
NASpreparationphosphor
green
preparationphosphor
blue
NAS
app. 12: PVA 5.4%, 0.2%, 0.1%, 0.05% and 0.02% preparation.
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chemical preparation process
PVA 2.5 %
PVA 2.5 %regeneration
NI MK
NK
regeneration
chemical preparation process
NJR
NJS
PVA 10 % NI
matrix
PVA 2.5 %
NJS
PVA 10 % NI
NJR
matrixNJS
JH
NJR
app. 13: PVA 10% & 2.5% preparation and 2.5%
regeneration
app. 14: PVA 10% & 2.5% preparation (no regeneration)
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Tab 11 -
00-04-15 02-01-15
HFstorage
(outside building)
chem. prep.
technical HNO3storage
(outside building)
chemical HNO3storage
(outside building)
acids supplyunit
NR
NP
NS
NP
NR
NS
HFpreparation
HF/HNO3preparation
HNO3preparation
NP
processmatrix
HFcart
HF/HNO3tank
wash & precoat
rewash
matrix
HF/HNO3tank
HNO3cart
NT
NO
NQ
NT
DRAIN JA
DRAIN JA
DRAIN JA
DRAIN JD app. 15: hydrofloric-, nitric-, and hydrofloric &
nitric acid preparation
process
lacquering supply tank NU
JD
Boric acid
NU
app. 16: boric acid preparation
Utility standardsmedium group : Aircode : A..medium group :
Gassescode : B..BFmedium group : Watercode : C..medium group :
cooling mediumcode : D..medium group : heating mediumcode :
E..medium group : Exhaustscode : F..medium group : Fuelscode :
H..medium group : Waste water drainscode : J..medium group : Power
supplycode : T..code : TX..Chemical standardsmedium group :
Chemicalscode : K.. & L..medium group : Chemicals to Separation
/ Regeneration.code : M..medium group : Chemicals PVA &
Acidscode : N..