102035504邱萬誠 final presentation

按一下以編輯母片標題樣式

NATIONAL TSING HUA UNIVERSITY

National Tsing Hua University HsinChu, Taiwan

Presenter : Wan-Cheng Chiu (邱萬誠)

Instructor : Cheng-Hsien Liu (劉承賢)

Final Presentation-Presentation I-

June 3, 2014


Transducer 2013, Barcelona, Spain

Wireless Chipless Passive Microfluidic Temperature SensorA. Rifai1,2, E. Debourg1,2, S. Bouaziz1,2, A. Traille1,2, P. Pons1,2, H Aubert1,2, M. Tentzeris3

1CNRS, LAAS, 7 avenus du colonel Roche, F-31400 Toulouse, France2Univ de Toulouse, LAAS, F-31400 Toulouse, France

3School of ECE, Georgia Institute of Technology, Atlanta, GA 30332, U.S.A


National Tsing Hua University

2

• Introduction

• Principle

• Concept

• Fabrication

• Characterization

• Conclusion

Outline



3

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



Introduction

Active Sensor Passive Sensor

Transmit

Receive

TransmitReceive



Introduction

Bimorph Cantilever Variation of Dielectric Constant

Transmit

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Temperature Sensor:

Temp.

Beams bent down

Frequency

Temp.

Dielectric constant changes

Frequency

20 ℃ to 300 ℃ 19.45 to 19.30 GHz 50 ℃ to 1000 ℃ 5.12 to 4.74 GHz



6

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



7

Principle

•For two parallel plate:

+

V

-

g

Capacitance = εA/g

ε, permittivity changes for different

medium between the two plates.

Material Permittivity

Vacuum 1

Air ~1

Water ~80

SiO2 3.9



8

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



9

Concept

As temperature rises

liquid dilates

Plate capacitors

both 100nm thick

•Device Mechanism:

As the temperature rises,

the dilated liquid will

change the permittivity

between capacitors thus

causing a capacitance

change.

Glass substrate

to reduce loss

Operating frequency fixed

at 29.75GHz to match their

radar.



10

Concept

Materials Permittivity

Air ~1

Water ~80

As temperature increases and

water fills up the channel, the

reflection coefficient decreases.

~The simulation proves this

method can work.~

Reflection Coefficient versus Frequency

12.5%

25%

37.5%

50%62.5%75%87.5%



11

Concept

The geometry of the capacitor was tuned

to allow a S11 full scale of 9dB between

full and empty channel.400 μm

400 μm



Concept

Without Water With Water

Capacitor

Surface

Capacitor

Surface

Vertical Axis Vertical Axis

Electric field without water is stronger and 100μm thick

water is enough to confine the electromagnetic field



13

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



14

Fabrication

Glass substrate

Glass substrate

Glass substrate

1.

2. Metalized with Ti/Cu, then patterned

3. 3050-SU8 spun on, then patterned

Glass substrate

4. Lamination of 3050-SU8



15

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



Characterization

Temperature range of 9℃(24℃ ~33℃) from beginning to

end of capacitor electrode.

~43μm/℃



17

Characterization

∆S11~8dB for a full scale range

This corresponds to a capacitance

shift between 20fF and 140fF



18

Characterization

Reflection Coefficient for Various Liquid Filling the Channel

PG: propylene glycol

EG: ethylene glycol

S11 full scale

variation are too low

for pure EG or PG

(less than 1dB).

A mixture water and

PG or EG (50%/50%)

shows an increase up

to 6dB.



19

• Introduction

• Principle

• Concept

• Fabrication


• Conclusion

Outline



20

• A new concept of passive temperature sensor based on electromagnetic coupling between an RF capacitor and dielectric liquid has been presented.

• This type of temperature sensor obtained a high sensitivity.

• Water has been replaced to avoid evaporation problem.

Conclusion



21

~Thanks for your attention~

102035504邱萬誠 final presentation

Engineering