1 Nanotechnology and Nano-Materials Manufacturing David J. Lawrence ISAT Department & Center for Materials Science James Madison University.

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Nanotechnology andNano-Materials Manufacturing

David J. Lawrence

ISAT Department & Center for Materials Science

James Madison University

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Outline

• My background & interests: microfabrication and sensors

• Impact of Nanotechnology on FCS– Communications– Power generation– Sensors– Armor

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Introduction

• The development and commercialization of many nano-scale devices and products relies on a combination of micro- and nanotechnologies.

• Microfabrication, including MicroElectroMechanical Systems (MEMS), enables the application of nanomaterials to a wide variety of devices…

“nano-enabled” devices

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Microfabrication at JMU

• Few predominantly undergraduate colleges and universities offer undergraduates an opportunity to work in a microfabrication laboratory.

• The JMU Microfabrication Laboratory is a cleanroom facility, which– gives undergraduate students hands-on

experience with microfabrication technology, and

– reinforces the fundamental understanding provided through classroom instruction.

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JMU Microfabrication Laboratory

Floor Plan of 1600 ft2 Laboratory Area

Profiler

Photolithography Class 1000

Deposition Systems

Furnace

Chemical Vapor Deposition and

Electrical Measurements

Room

Class 100,000

Wet Etching and Microscope

AreaClass 10,000

Deposition & Plasma Etch

AreaGowning

Room

Microscope

Electrical Characterization

Wet Process Stations

SolventCabinet

Spin CoatingHood

Plas-ma

Etch

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Materials Investigated

• Activities in the Microfabrication Laboratory focus on the preparation, characterization, and application of thin films of a variety of materials, including– Metals: aluminum, titanium, nickel, chromium, vanadium, gold, tin,

bismuth, and alloys

– Dielectrics: SiO2, Al2O3, WO3, glasses

– Semiconductors and Transparent Conductors: Ge, VOx, ITO, SnO2, ZnO

• These thin films are deposited by a variety of techniques, including multi-source dc and rf magnetron sputtering, evaporation, CVD, and spin coating.

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DC & RF Multi-Target Magnetron Sputter Deposition System

Rotating Substrate Holder

3 Sputter Guns

Substrate Heater

Deposition Chamber & Pumping System

Control Panel

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Metal-Silicon Thermopile Temperature Sensor

Completed DevicesDevice Design

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Thermopile Sensor with Etched Well

Al SiO2

p+

n-Si Etched Well

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Bismuth-Antimony Thermopiles

Top Bottom

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Nanotechnology: Aspects of FCS Impacted

• Communications– Electronics

– Optoelectronics

– Optical fibers

– Displays

• Power generation– Photovoltaic devices

– Fuel Cells

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Nanotechnology: Aspects of FCS Impacted

• Sensors– Physical

– Chemical

– Biological

• Armor

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Nanotubes

• Nanotubes are sheets of graphite rolled up into cylinders.

• They range from 1 to tens of nanometers in diameter.

• They have a broad range of electronic (metallic or semi-conducting, depending upon the twist of the tube), thermal (thermal conductivity is temperature dependent), and structural (they can be straight or twisted) properties.

• They can have single- or multiple-wall structure.

• They are very very strong: they have 100 times the tensile strength of steel

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Nanotubes

• Graphite sheet and single-walled nanotubes

Phaedon Avouris,

IBM Research

(artist’s rendition)

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Nanotubes

• Nanotube (on four gold electrodes)

 Christian Schönenberger’s research group, University

of Basel

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Nanotubes for Electronics

• Nanotube transistors (prototype)

Phaedon Avouris, IBM

Research

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Nanotubes for Electronics

• Nanotube transistors (artist’s rendition)

– High performance (i.e., high speed & low power consumption)– Flexibility

Phaedon Avouris, IBM Research

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Nanotubes for Electronics

• Array of nanotube transistors wired into a circuit (artist’s rendition)

Adrian Bachtold, Cees Dekker, et al.,Delft University of Technology

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Nanotubes for Optoelectronics

• Light-emitting nanotubes

Phaedon Avouris, IBM Research

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Nanotechnology for Optoelectronics

• Quantum-dot laser

Zia Laser, Inc.Albuquerque,NM

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Nanotubes for Optical Fibers

• SnO2 Nanoribbons

Peidong Yang, University of California, Berkeley and Lawrence Berkeley National Laboratory

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Nanotubes for Displays

• Field Emission Display – FED

Adrian Burden, Materials World,vol. 8, pp. 22-25, July 2000

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Nanotubes for Power Generation

• Batteries– Nanotubes have a high surface area (~1000 m2/g) and good

electrical conductivity (lithium ion batteries: lithium ion storage).

• Fuel Cells– Nanotubes’ high surface area and thermal conductivity make

them useful as electrode catalyst supports and perhaps as current collectors because of their high electrical conductivity.

– Hydrogen storage?

• Photovoltaic Cells– Dye-Sensitized Carbon Nanotube/Polymer Solar Cells

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Nanotechnology for Sensors

• Sensors– Physical

– Chemical

– Biological

• Since nano-scale materials are made up of structures just a few atoms across, just a few molecules of a chemical can produce a response.

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Nanotechnology for Sensors

• Plastic nanowires have been used to detect gases (e.g., ammonia). An array of wires might be made sensitive to a variety

of different gases.

• Carbon nanotubes could be functionalized at their ends to act as biosensors for DNA or proteins.

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Nanotubes for Sensors

• World’s smallest balance

Walter de Heer, Georgia Institute of Technology

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Nanotechnology for Sensors

• Nanocantilevers

P. G. Datskos and T. G. Thundat,Oak Ridge National Laboratory

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Nanotechnology for Armor

• Future Force Warrior Uniform

Future Warrior exhibit, RussellSenate Building in Washington, DC

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Nanotechnology for Body Armor

• Lighter and stronger fabrics

• Adaptive fabrics no longer passive– fabrics that can stiffen at the sound of gunfire or become

a splint

– porosity can adapt to temperature changes and precipitation

• “Nanomuscle fibers” increase soldier’s strength

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Nanotechnology for Body Armor

• Built-in sensors and communications– Can monitor the soldier on the battlefield

• location• battlefield conditions (including chemical and biological

agents)• body temperature• heart rate …

– Heads-up display in eyewear• maps• enemy location …

– Communications

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Nanotechnology for Body Armor

• Protection against chemical and biological agents– Fabrics that block toxic chemicals and germs

– Fabrics that neutralize chemical and biological agents

– Fabrics that can deliver medications

– Protective skin creams

– Examples:

• anthrax antibiotic (Rice University)

• silver nanoparticles – silver has natural antibacterial and antifungal properties

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Acknowledgments

• Drs. Gerald R. Taylor, W. Gene Tucker, Ronald W. Raab, and Thomas C. DeVore

• We thank John Gotwald, Brandon Shreckhise, Zachary Workman, Evan Schwartz for their technical assistance.

• Our Microfabrication Laboratory has been supported by Virginia’s Center for Innovative technology (CIT) through Virginia’s Manufacturing Innovation Center (VMIC).

• Our Microfabrication Laboratory has also been supported by a CCLI grant from the National Science Foundation (Award #DUE-0088127).

• Our Research Experience for Undergraduates (REU) Program is supported by NSF (Awards #DMR-0097449, 2001-2004 and #DMR-0353773, 2004-2007).

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Questions?