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1 Basic MOS Device Physics
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1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design Performance affected by second order.

Dec 13, 2015

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Page 1: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

1

Basic MOS Device Physics

Page 2: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

2

Concepts

understanding of semiconductor devices is essential in analog IC design Performance affected by second order effects, often neglected in digital design

More for deep submicron technologies

Develop transistor model for circuit performance and analysis MOS structure, IV characteristics, second order

effects, parasitic capacitances, small-signal model for MOSFET ,SPICE model

Page 3: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

3

MOS Device Structure

Structure: 2 heavily-doped n regions defining D and

S, heavily-doped polysilicon forming G, thin layer of oxide insulating G from substrate

Useful action occurs in substrate region under gate oxide

4-terminal device, with S and D interchangable

Digital IC: transistor acts like a switchTurns on (S and D “connected together”)

when VG high, off when VG low

Page 4: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

4

NMOS and PMOS with Well

CMOS – both NMOS and PMOS available on the same substrate Ok for NMOS, but PMOS must define a local n-

substrate -> n-wellNMOS: S/D junction must be reverse-biased ->

substrate connected to most negative supply voltagePMOS: S/D junction must be reverse-biased ->

substrate connected to most positive supply

Page 5: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

5

MOS Symbols

Page 6: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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triode region I-V characteristic

Triode region when VDS <= VGS - VTH

ID nCoxW

L[(VGS VTH)VDS

1

2VDS

2 ]

Page 7: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

7

Operation in Triode Region

ID nCoxW

L[(VGS VTH)VDS

1

2VDS

2 ]

ID nCoxW

L(VGS VTH)VDS, VDS 2(VGS VTH)

RON 1

nCoxW

L(VGS VTH)

-> ID linear function of VDS

Parabola approximated by straight line.S-D can now be modelled as a linear controlled-resistor given by VDS/ID and value controlled by overdrive voltage (VGS – VTH)

Page 8: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

8

Active Region (cont.)

Active Region

Page 9: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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If VDS > VGS-VTH? I/V curve no longer parabolic ID constant, device in saturation/active region

Density of inversion layer proportional to VGS – V(x) – VTH

If VDS slightly greater that VGS – VTH, inversion layer stops at x <= L; i.e. channel is pinched off

As VDS increases further Point at which Qd equals zero gradually moves toward S

Operation in Active (Saturation) Region

ID nCoxW

L[(VGS VTH)VDS

1

2VDS

2 ]

ID nCox

2

W

L(VGS VTH)2

V 'DS VGS VTH (Pinch off )

Page 10: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

10

Drain current characteristics

Page 11: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Drain current

Linear region (Vds < Vgs - Vt): Id = k’ (W/L)(Vgs - Vt)(Vds - 0.5 Vds

2)

Saturation region (Vds >= Vgs - Vt): Id = 0.5k’ (W/L)(Vgs - Vt) 2

Page 12: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

12

MOS operation conclusion

region VG condition VDS condition ID

OFF VG < VTH Any value 0

TRIODE/ LINEAR

VG >VTH VDS < VDS -VTH nCoxW/L (VDS-VTH)VDS – 0.5VDS

2

SATURATION

VG >VTH VDS > VDS -VTH 0.5nCoxW/L (VDS-VTH)2

Page 13: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

13

Transconductance, gm

Let’s define gm as an indicator of how well a device converts a voltage to a current (consider saturation region)

gm represents device sensitivity e.g. small change in VGS results in large change in ID

As seen in eqn above, gm is equal to inverse of Ron in deep triode region

gm IDVGS VDS constan t

nCoxW

L(VGS VTH) gm 2nCox

W

LID

2ID

VGS VTH

Page 14: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

14

gm behavior – from gm plot

Notice: gm increases with overdrive if W/L constant

gm decreases with overdrive if ID constant

Page 15: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

15

Triode and Active Region Transition

Rule of thumb when trying to know if device is in saturation or linear NMOS: VG - VD < VTHN, pinch-off occurs

PMOS: VD – VG < |VTHP|, saturationActive Active

Page 16: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

16

Second-Order Effects

Now let’s look at second order effects and get some idea on how our circuit could be affected by the phenomena

Page 17: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

17

Body Effect

What happens when bulk and source are not at the same potential

Consider NMOS: When VB drops below VS S and D still reverse-biased -> device continues to operate properly

but some device properties might change e.g. VS=VD=0; VG a bit less than VTH -> depletion layer formed but no

inversion layer As VB becomes more negative -> more holes attracted to substrate

connection, leaving larger –ve charge behind (i.e. depletion region becomes wider)

VTH = f(total charge in depln region), and gate charge must mirror Qd (channel charge density) before an inversion layer formed

VB drops, Qd increases, VTH increases -> “Body effect” / “Backgate” Effect

VTH VTH0 2F VSB 2F , 2qsiNsub

Cox

Page 18: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

18

Body Effect …

denotes body effect coefficient Typical values: 0.3 to 0.4V1/2

Could take place when: Bulk potential change Source potential varies wrt bulk potential

2ox

depFMSTH

C

QV

Page 19: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

19

No Body Effect With Body Effect Ignore body effect:

As Vin varies, Vout closely follows the input Drain current remains I1

• I1=0.5nCox(W/L)(Vin-Vout-VTH)2

• i.e. (Vin-Vout) is constant if I1 is constant

Body effect significant, substrate tied to gnd As Vin and Vout become more positive VSB increases -> VTH increases

To maintain constant ID, Vin-Vout must increase as well

Body Effect: Undesirable, complicates design of analog and digital Ics

Nsub and Cox has to be balanced for reasonable device engineers’ job!!!)

VTH and Body Effect

Page 20: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Noted earlier that VGDL’ (pinch-off) L’=f(VDS) channel length modulation We can then write: Assume 1st order relationship btwn L/L and VDS,

and define as CLM coefficient:

We can re-write current equation in saturation:

L' L L )/1(1

'/1 LLL

L

1/ L' 1

L(1VDS), VDS L / L

ID nCox

2

W

L(VGS VTH)2 (1VDS)

L L’

Channel Length Modulation

Page 21: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Channel Length Modulation (cont’d…)

CLM results in non-zero slope in IV characteristics Non-ideal current source btwn D and S in saturation regime represents relative variation in length for a given increment in VDS

Short channel -> must consider bcoz it’s bigger compared to longer channels L/L VDS linear approximation becomes less accurate for shorter

channel Re-write equation for current in saturation -> must rewrite equation

for transconductance, gm

gm nCoxW

L(VGS VTH)(1VDS) gm

2nCoxW LID

(1VDS)gm

2ID

VGS VTH, (unchanged)

Page 22: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Subthreshold Conduction

When VGSVTH, weak inversion layer still exists (transistor do not fully turn off) hence allowing some current flows from D to S ID drops at a finite rate as VGS falls below VTH

Exponential dependence on VGS

> 1 = nonideality factor, VT=kT/q Eqn similar to bipolar’s characteristic

Subthreshold Conduction: Static Power Dissipation (Leakage)

a problem for large circuits (e.g. memory)

ID I0 expVGS

kT q

Subthreshold conduction

Page 23: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

23

MOS Layout

Brief look at layout to better understand / visualize device capacitance & MOS model

Layout determined by: Electrical properties required of the device & design rules

(e.g. W/L dictates gm, L governed by the process)

(a) 3D view of an NMOS (b) top-view

Poly extends beyond diffusion Ensure reliable definition of edge of transistor Total S and D area minimized to minimize capacitance

Page 24: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Layout…

Draw layout of circuit in (a)

Page 25: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Device Capacitances

Need to consider to predict ac behaviorValue of capacitance depends on bias

conditions of transistorSource of capacitance:

Oxide capacitance, Cdepln, Coverlap

Page 26: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Device cap… cont’d

Oxide capacitance Btwn gate and channel

C1 = WLCox

Depletion capacitance Btwn channel and substrate

C2 = WL(qsiNsub/(4F))

Overlap capacitance C3 and C4, simplest formula WLDCox

More elaborate calculations required for accurate value Junction capacitance

Btwn S/D and substrate Cbottom-plate (Cj) + Cside-wall (Cjsw) Cj = Cjo/[1 + VR/B]m, VR = reverse voltage across junction, B built-in

potential, m a power in between 0.3 and 0.4

Page 27: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

27

Layout for Low Capacitance

Folded structureFor layout in (a)

For the same transistor in (b)

Note: (b) has less CDB than (a)

jswjSBDB CEWWECCC )2(

jswj

jswjSB

jswjDB

CEWWEC

CEW

ECW

C

CEECW

C

)4(

)22

(22

2

)(22

Page 28: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

28

G-S and G-D Capacitance

Device off CGD = CGS = CoverlapW CGB = Cox in series with Cdepln

CoxCdepln/(Cox + Cdepln)

Device in deep triode region (VS VD) CGS = CGD = Cox/2 + overlap cap = WLCox/2 + Wcov

Cox/2 because WLCox divided equally btwn GS and GD terminals• Change V in VG draws equal amount of charge from S and D

Device in saturation CGD Wcoverlap

Non-uniform vertical electrical field in gate oxide along channel because Potential across channel varies from VGS @ S to VGS – VTH at pinch-off point

CGS = 2WLeffCox/3 + Wcoverlap

CGB neglected in triode & saturation because inversion layer acts as shield btwn G and bulk. Charge supplied by S and D rather than bulk for a change in VG

Page 29: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

29

MOS Small Signal Models

Channel length modulation modeled as VDS

Channel length modulation modeled as a resistor

Body effect modeled as gmVBS

Page 30: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Models explained…

Channel Length Modulation ID varies with VDS -> modeled by a voltage-

dependent current source Note: I linearly varies with V -> linear resistor

ro affects circuit’s performanceLimits amplifier gain, affect output impedance, etc.

DTHGS

oxnDSDD

DSo

IVVL

WCVII

Vr

1

)(2

1

/

1

2

Page 31: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

31

Bulk Transconductance, gmb

Bulk potential affects VTH hence gate-source overdrive

When all other terminals held constant ID = f(VB) -> bulk behaves like a second gate

Modeled as a dependent current-source -> gmVBS

gmb IDVBS

nCox

2

W

L(VGS VTH)

VTH

VBS

gmb gm

2 2F VSBgm

Also,

VTH

VBS VTH

VSB

2

(2F VSB) 1/ 2

saturation

F = work function of polysilicon gate – work function of silicon substrateF = (kT/q)[ln(Nsub/ni)]

Page 32: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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Gate Resistance

Need to consider resistivity

as well Each terminal exhibits finite ohmic resistance How to minimize the resistance?

Folded structure?Reduces RG by 4X

Page 33: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

33

MOS Small Signal Model with Capacitance

Page 34: 1 Basic MOS Device Physics. 2 Concepts understanding of semiconductor devices is essential in analog IC design  Performance affected by second order.

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C-V of NMOS

Capacitor on chip very expensive Transistor capacitive (monolithic)

NMOS: S,D, and bulk GND-ed VG inversion layer forms from VGS VTH

For VG –ve Holes in substrate atrracted to oxide interface

• NMOS in “accummulation region” Device viewed as Cox (gate plate and substrate plate, tox separation)

As VGS density of holes @ interface falls Depletion region starts to form, device enters weak inversion C = Cox and Cdepln

For VGS > VTH

Channel formed. Capacitance = Cox