Microfluidic Substrates Market and Processing trendsObjectives of the report 26 Microfluidic Market 27 Introduction of the market section 28 Microfluidic devices market forecasts 29
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Microfluidic Substrates Market
and Processing trends
Sample of the report
June 2011
© 2011• 2
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Table of Content
Page
Table of Content 2
Executive Summary 13
Introduction 24
Context 25
Objectives of the report 26
Microfluidic Market 27
Introduction of the market section 28
Microfluidic devices market forecasts 29
Microfluidic Component Market: Value and forecast 30
Microfluidic Component Market: Value and forecast; Market in M$ 31
Microfluidic Component Market: Value and forecast; Market in Munits 32
Microfluidic players world 33
Microfluidic Fabs Geographical Distribution 34
Microfluidic device market divided by substrates and applications; Market Value in $M 35
Microfluidic devices: Material value share 36
Microfluidic devices market by Substrates:Market value in $M 37
Material distribution 2010 38
Material trends for clinical and veterinary diagnostics 39
Material trends for point of care devices 40
Material trends for point of care devices 40
Material trends for pharmaceutical research 41
Material trends for analytical devices 42
Material trends for industrial and environment applications 43
Material trends for drug delivery 44
Material trends for microreaction technology 45
Microfluidics Value Chain 46
Value chain comparison 47
Polymer microfluidic devices market 48
Market of microfluidic devices made of polymer 49
Microfluidics Polymers Market 50
Polymer share evolution 51
Polymer Microfluidics supply chain & players 52
Polymer devices supply chain analysis 53
Value Chain for Polymer 54
Main polymer Players 55
EPOCAL: Epoc SmartCard 56
Ocusense (Occulogix) 57
Chempaq 58
Clondiag (Alere) PIMATM CD4 Analyzer 59
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Table of Content
Fluidigm Dynamic Array for Single Cell Gene Expression 60
Gyros Gyrolab Bioaffy™ CD 61
Glass microfluidic devices market 62
Market of microfluidic devices made of glass 63
Glass share evolution 64
Glass Microfluidics supply chain & players 65
Glass devices supply chain analysis 66
Supply Chain for Glass substrates 67
Value Chain for Glass substrates 68
Main Glass Players 69
Illumina Whole-Genome Genotyping Kits 70
CALIPER Life Sciences 71
Glass microreaction products: Corning Glass 72
Glass microreaction products: Chemtrix MRT 73
Silicon microfluidic devices market 74
Market of microfluidic devices made of silicon 75
Silicon Microfluidics supply chain & players 76
Supply Chain for Silicon substrates 77
Boehringer MicroParts Respimat® 78
MicroParts Respimat® Nozzle 79
Silicon wafer market, in units and $M 80
IBM Zurich 81
STMicroelectronics In-Check platform -1 82
STMicroelectronics In-Check platform -2 83
STMicroelectronics In-Check platform -3 84
Silicon Biosystems DEPArrayTM 85
Debiotech insulin pump 86
Metal and Ceramics microfluidic devices market 87
Market of microfluidic devices made of metal and ceramics 88
Micro Reaction Technology exemples 89
Lonza Microreactors 90
Ehrfeld modular microreaction systems 91
Transdermal Microneedle Developments 92
Summary and conclusions: Microfluidic devices market 93
Market section summary -1 94
Market section summary -2 95
Cost Analysis 96
Introduction and objectives 97
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Table of Content
Cost simulation: Chip Design 98
Cost Simulation: Scenario 1; Glass 99
Cost Simulation: Scenario 2; Si +Glass 100
Cost Simulation: Scenario 3; Polymer Injection Molding 101
Mold Optimization 102
Cost Simulation: Scenario 4; Polymer NIL 103
Stamp Optimization 104
Cost simulation: Results 105
Cost simulation analysis 106
Cost breakdown for large scale production 107
Summary of the cost analysis section 108
Microfluidic Materials 109
Microfluidic materials: Introduction 110
Microfluidics Materials 111
Materials overview -1 112
Materials overview -2 113
Glass Materials 114
Possible structurations of Glass substrates 115
Key features for glass substrates in microfluidics applications 116
Types of Glass -1 117
Types of Glass -2 118
Glass material comparison 119
Glass (structured) substrates players (Non-exhaustive list) 120
Main Material Suppliers (Non Exhaustive) 121
Main glass manufacturing processes -1 122
Main glass manufacturing processes -2 123
Polymer Materials 124
Microfluidics Polymers -1 125
Microfluidics Polymers -2 126
Main polymer materials suppliers 127
Summary and conclusions: Microfluidic materials 128
Summary of the material section 129
Manufacturing Techniques 130
Introduction and objectives 131
Process classification 132
Some process flow comparison 133
Example: Sony DADC process flow 134
Manufacturing processes comparison 135
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Manufacturing processes application 136
Reshaping processes 137
Reshaping processes overview 138
Reshaping processes characteristic data 139
Roller imprinting 140
Hot embossing 141
Thermal NIL (TNIL) 142
UV - NIL 143
UV NIL versus Thermal NIL 144
Soft Lithography -1 145
Soft lithography -2 146
Soft Lithography -3 147
Injection Molding 148
Injection molding process 149
Subtractive processes 150
Subtractive processes overview 151
Characteristic dimensions 152
Photolythography 153
Glass process: FOTURAN 154
The FOTURAN Process versus standard etching 155
LIGA Process 156
LIGA process flow 157
Etching processes -1 158
Etching processes -2 159
Wet etching vs dry etching 160
Etching process comparison 161
Wet etching process 162
Wet etching principle 163
Wet chemicals for Etching 164
Dry etching principle 165
Dry etching types 166
Dry etching characteristics 167
Dry etching qualitative data 168
Sputter etching/ Ion milling 169
Plasma etching 170
Plasma etching principle 171
Reactive ion etching RIE 172
Typical dry etch chemistries 173
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Powder blasting / Sand blasting 174
Laser ablation 175
Micro-Electro Discharge Machining: EDM -1 176
Micro-Electro Discharge Machining: EDM -2 177
Additive processes 178
Screen Printing: Definition 179
Screen Printing: Technology Principle 180
Surface modification 181
Exemple Sony Proprietary coatings 182
Common Organic Functionalized Surfaces 183
Deposition techniques 184
Chemical vapor deposition (CVD) 185
Chemical vapor deposition (CVD) process 186
Physical vapor deposition (PVD) 187
PVD Evaporation 188
CVD vs PVD 189
PVD Sputtering 190
Electron beam gun evaporation 191
Sputtering vs Evaporation 192
Resistive heating & inductive heating 193
Resistive heating vs Electron beam processes 194
Electroplating 195
Sealing and Bonding 196
Bonding and sealing 197
Anodic bonding -1 198
Anodic bonding -2 199
Thermal fusion bonding 200
Laser welding -1 201
Laser welding -2 202
Summary and conclusions: Manufacturing techniques 203
Summary of the Manufacturing section 204
Main Equipment Suppliers (non exhaustive) -1 205
Main Equipment Suppliers (non exhaustive) -2 206
Main Equipment Suppliers (non exhaustive) -3 207
Main Equipment Suppliers (non exhaustive) -4 208
Supply chain for Diagnostic applications 209
Introduction supply chain analysis 210
The IVD Supply chain 2011 -1 211
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Table of Content
The IVD Supply chain 2011 -2 212
Top 15 IVD companies 2009 213
Examples of Collaboration 214
IVD supply chain analysis 215
Conclusion 216
Summary and conclusions -1 217
Summary and conclusions -2 218
Summary and conclusions -3 219
Appendix 220
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Context
• Microfluidics is on its way to becoming a main stream enabling technology
for medical diagnostics, life science research, as well as drug delivery and
synthesis. The market of microfluidic devices (first level packaged devices,
without biological content) is expected to growth with more than 20% in
the next five years and exceed $5 Billion in 2016.
• Today, no real standard in terms of materials have been defined, but the
economic drivers create a partitioning of the market with on one hand, low
cost single point disposable devices, and on the other hand high density
and high accuracy chips.
• The future perspectives for polymer, glass or silicon made microfluidic
chips are thus strongly dependent on the targeted applications.
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Objectives of the report
• The report answers the following questions:
From the OEM perspective: Which material fits best my application?
From the material and manufacturing service providers perspective: What is the
potential of my technology in the microfluidics market?
What is the link between applications, functions needed and materials
• The objectives of this report are:
Provide and overview of the main materials used in microfluidics
Provide market forecast of the by material
Describe the main manufacturing processes and their characteristics
Compare the processes in terms of structure sizes, aspect ratios, speed and
costs
Provide an understanding of the supply and value chain
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Microfluidic Fabs Geographical Distribution
Asia Pacific 20%
Europe 41%
North America
39%
Microfluidic Fabs distribution Activity Distribution
Number of microfluidic
Fabs identified: 218
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Microfluidics Materials
Main Materials used in Microfluidics
Silicon
Glass
D 263
B 270
Borosilicate
Borofloat
Fused silica
Pyrex
Polymer
SU-8
PMMA
COC
PDMS
PTFE
PI
COP
PEEK
PET
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Process classification
Reshaping processes
• Casting, molding
• Hot embossing
• Nano imprint
• Thermo-forming
• …
Substractive processes
• Lithography
• Etching
• Micromachining
• Sand blasting
• …
Additive processes
• PVD, CVD Coatings
• Screen printing
• Lamination
• …
Bonding and sealing processes
• Anodic bonding
• Thermal bonding
• Adhesives
• …
There are many ways to classify the manufacturing processes used for
microfluidics.
We propose the four main categories, as depicted below:
In the next chapters, we will describes the different techniques in terms of
process steps and provide their main characteristics (Feature sizes,
advantages, …)
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Reshaping processes overview
Reshaping methods
Large area continuous
Roll-to-roll
Imprint by UV exposure
UV- NIL
Imprint under pressure and temperature
Thermal NIL
Hot embossing
Soft lithography
Replica molding
Microtransfer Molding
Microcontact printing
Micromolding in capillaries
Solvent-assisted micromolding
Injection Molding
Reel to Reel manufacturing: screen printing of silver conducting paste
(source FhG-IZM)
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UV - NIL
• In UV- NIL, a UV-curable liquid photopolymer is deposited as a resist on the
substrate before the imprinting process.
• The mold is composed of transparent material such as glass, fused silica.
• This method also use subsequent deposition and/or etching steps.
UV - NIL Basic process flow
Imprint steps
• A thin layer of UV-curable liqud photopolymer is spin-coated on the substrate.
• The resin is liquid at room temperature
• A mold is pressed into the melt polymer under small pressure and the resist fill the trenches of the mold
• The resist is then cured in UV-light, becomes solid and is crosslinked
• After the imprinting step, the mold is released
• Resist residual layer is then removed
A contrast pattern in the resist is left on the substrate
Mold removed
UV and Pressure applied
Mold
Silicon substrate
Resist layer
Mold
Silicon substrate Mold
Silicon substrate
UV-light
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Subtractive processes overview
Subtractive Technologies
Photolithography LIGA process Etching
Wet etching
Dry etching
Mechanical process
Powder blasting Laser ablation Micromachining;
uEDM
Die sinking
Wire EDM
High aspect ratio structure made with
the FOTURAN process, Source
Mikroglas
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Etching processes -1
• Etching processes consists of removing selected areas from wafer substrates. They follow the “resist mask patterns step on the wafer, called lithography.
• Etching processes can be classified into two categories :
Wet etching process
uses liquid chemicals or etchants to remove materials from the wafer
does not change the chemical nature of the dissolved material
Has usually the isotropic etch profile ie: wet etching takes place in all directions at the same rate
Dry etching process
utilizes a vapor phase etchant or reactive ions to dissolve or sputter the material
Has the anisotropic etch profile ie: process proceeds in one direction only
( vertical only = completely anisotropic which is preferable)
Provides higher resolution
Anisotropic wet etching Isotropic wet etching
Layer that has to be
etched
Substrate
substrate
Substrate
Etch mask
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Etching processes -2
• The selection of the etching method is relies on finding an
optimum among the following conflicting requirements
– Vertical profile
– Minimal undercutting or bias
– Selectivity to other exposed films and resist
– Uniform and reproducible
– Clean, economical, and safe
Anisotropic etch Isotropic etch Perfectly anisotropic
Wet Etching Dry Etching
$, Fast $$$, Slow
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Chemical vapor deposition (CVD)
• Chemical vapor deposition (CVD) is a deposition method where reactants gases (chemical precursors) are simultaneously introduced into a reaction chamber (furnace heater).
CVD set-up with hot wall
CVD set-up with cold wall
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Yole activities in Microfluidics
Media business News feed / Magazines /
Webcasts
www.yole.fr
Market Research Reports & database
Consulting services
Market research, Technology & Strategy
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Microfluidics reports from YOLE
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