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1
MECH 6491 Engineering Metrology
and Measurement Systems
Lecture 6 Cont’d
Instructor: N R Sivakumar
2
Interferometry Examples
Moire and Phase Shifting Interferometry
Theory
Types of measurement
Applications (form and stress measurement)
Theory of phase shifting
Types of phase shifting methods available,
Errors associated with phase shifting
Outline
3
Twyman Green InterferometerFlat Surfaces
4
Twyman Green InterferometerSpherical Surfaces
5
Mirau Interferometer
6
Mirau Interferometer
7
Diffraction
8
DiffractionTypes of diffraction
9
DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionTriple Slit
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DiffractionTriple Slit
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DiffractionMultiple Slit
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DiffractionMultiple Slit
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dsin m m = 0,1,2,3..
d = w/N where w is the entire width of the grating
w
DiffractionGrating -- N slits or rulings
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DiffractionGrating -- N slits or rulings
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tan (ym y0) /D
Measure angles of diffracted lines with a spectroscope using
formula below. Then relate to wavelength
= dsin /m
Diffraction GratingsMeasure Wavelength of Light
20
Diffraction GratingsMeasure Wavelength of Light
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R / Nm
Resolving power of grating.
Measure of the narrowness of lines
Diffraction GratingsResolving Power
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Diffraction GratingsResolving Power
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Moire Interferometry
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Dark fringe - when the dark lines are out of step one-half period
Bright fringe - when the dark lines from one fall on the dark lines
for of the other
If the between the two gratings is increased the separation
between the bright and dark fringes decreases
Moire Interferometry
Moiré pattern formed
by two line gratings
rotated by small
M = 2y sin
25
Dark fringe - when the dark lines are out of step one-half period
If the gratings are not identical, the moiré pattern will not be
straight equi-spaced fringes
How are moiré patterns related to interferometry?
The grating shown in Fig. can be a “snapshot” of plane wave
traveling to the right, and the grating lines distance = of light.
Moire Interferometry
M = 2y sin
28
It becomes like interfereing two plane waves at an angle 2
Where the two waves are in phase, bright fringes result, and
where they are out of phase, dark fringes result
The spacing of the fringes on the screen is given by previous
eqn. where is now the wavelength of light (M = 2y sin)
Thus, the moiré of two gratings correctly predicts the centers of
the interference fringes produced by interfering 2 plane waves
Since binary gratings are used, the moiré does not correctly
predict the sinusoidal intensity profile of the interference fringes.
Moire Interferometry
29
Fig shows the moiré
produced by superimposing
two computer-generated
interferograms.
First interferogram (a) has
50 waves of tilt across the
radius
Second interferogram (b)
has 50 waves of tilt plus 4
waves of defocus.
Moire Interferometry
30
If they are aligned such that
the tilt is same for both, tilt
cancels and the 4 waves of
defocus remain (c).
In (d), the two inferograms
are rotated wrt each other so
that the tilt will quite cancel.
These results can be
described mathematically
using two grating functions:
Moire Interferometry
31
Gratings used in Moire measurements are usually
transparencies and if this is placed in contact with
object, the phase of this grating will be modulated
depending on the object displacement - np for maxima
and (n+1/2) P for minima
It there is a model grating as well, then the deformation
produces fringes, with which the displacement can be
computed
The model grating can be placed over the grating, or
imaged over the grating or imaged on
photographic film
Moire – In Plane Measurement
32
Out of plane displacements are
measured by using a single
grating and an interference with
the shadow of the grating itself
The most successful application
of shadow moire is in Medicine
Useful in coarse measurements
on large surfaces with complex
contours
Shadow Moire – Out of Plane
W = out of plane displacement
p = grating pitch; = light angle
= observation angle
33
Fringe Projection
34
Fringe Projection
35
Phase Shifting InterferometryParameters Fringe
skeletonizing
Phase stepping/
shifting
Fourier
transform
Temporal
heterodyning
No of interferograms to be
reconstructed
1 Minimum 3 1 (2) One per detection
point
Resolution () 1 to 1/10 1/10 to 1/100 1/10 1/30 1/100 to 1/1000
Evaluation between
intensity extremes
No Yes Yes Yes
Inherent noise suppression Partially Yes No (yes) Partially
Automatic sign detection No Yes No (yes) Yes
Necessary experimental
manipulation
No Phase shift No (phase
shift)
Frequency
Experimental effort Low High Low Extremely high
Sensitivity to external
influences
Low Moderate Low Extremely high
Interaction by the
operator
Possible Not possible Possible Not possible
Speed of evaluation Low High Low Extremely low
Cost Moderate High Moderate Very high
Comparison of phase evaluation methods
36
With CCDs, the intensity at multiple points can be recorded
and processed simultaneously at high speeds. Therefore,
the equation can be:
where I(x, y) is the intensity of the interference pattern at the
corresponding pixel of the CCD camera, (x, y) is the phase
difference at that particular pixel
3 unknowns in I0, V and . Therefore, a minimum of three
phase-shifted images is required to find out the phase
value of a particular point
Phase Shifting Interferometry
}]),(cos{1)[,(),( 0 ++ yxVyxIyxI
37
2 waves derived from a common source, the phase difference
between the two waves is given by
where is the phase difference, P is the path difference between
them and, the wavelength.
The phase difference could be introduced by introducing path
difference and vice versa
In most of the phase shifting interferometric techniques, changing
the path length of either the measurement, or the reference beam,
by a fraction of the wavelength provides the required phase shifts
2p
Phase Shifting Interferometry
38
Phase Shifting Interferometry
39
Phase shifting with rotating glass plate.
Glass plate of thickness
't' rotated by an angle
1
Phase Shifting Interferometry
))cos()cos(( 1 nk
t K =2/
n is refractive index of the plate
)sin(
)cos(
)cos(11
1nk
t Phase shift achieved by rotating
the glass plate by small angle
40
a b
Phase shifting by moving grating and Bragg cell.
Phase Shifting Interferometry
yd
n
2 Where d is the period of the grating
and n is the order of diffraction
41
Phase shifting with laser feedback
Phase Shifting Interferometry
the frequency of
the source is
changed by
injecting electrical
current to the
laser and using a
large optical path
difference
between the
measurement and
reference beams
42
Object
Reference
PZT to move
fraction
of a wavelength
Incident
Beam BS
Detector
From
Source
Interference Sensor
2
p
P is the path difference between the two beams
is the phase difference between them
the wavelength of the light source
Phase Shifting Interferometry
43
‘I(x, y)’ is the intensity of the interference pattern,
‘(x, y)’ is the phase difference between object and
reference,
‘V’ is the modulation of the fringes
( )cos1),(),( 01 VyxIyxI +
Phase Shifting Interferometry
44
Phase Shifting Interferometry
45
Mirror with linear
transducer
Rotating glass
plate
Moving diffraction
grating
Laser feedback
Polarization based phase shifting
Incident Beam Object Reference
PZTBS
Glass plate of thickness
't' rotated by angle
1
)sin(
)cos(
)cos(11
1nk
t
Where K =2/ and
‘n’ is the refractive index
Where d =grating period
‘n’ is the refractive index
yd
n
2
2Where = phase shift
= angle of rotation
Where ‘phase shift’ is proportional to
path difference and ‘temporal frequency’
Where is wavelength
p is the path difference
p
2
Phase Shifting Techniques
46
Three step
method
Four step method
Carré
method
Five step
method
Other algorithms like ‘Integrated Bucket Technique’ for continuous
phase shifting and ‘multi-step techniques’ have been used
23
12
II
IITan
312
31
2
)(3
III
IITan
31
24
II
IITan
)()(
)]())][(()(3[
4132
41324132
IIII
IIIIIIIITan
++
+
153
42
2
)(2
III
IITan
Phase Shifting Algorithms
47
Linear phase
error
Non linear phase
error
Light detector
anomalies
Vibration & air
turbulence
Other random
errors
All these are errors associated with
mechanical phase shifters
Phase Shifting Errors
48
MECH 6491 Engineering Metrology
and Measurement Systems
Lecture 7
Instructor: N R Sivakumar
49
Holography
Introduction and Background
Theory and types of Holography
Holographic Interferometry
Theory
Applications
Speckle Methods
Speckle Introduction
Speckle intensity and size
Speckle Interferometry
Theory
Applications
Outline
Holography Introduction
Reflection
hologram
Transmission
hologram
Holography Introduction
52
Holography History
Invented in 1948 by Dennis Gabor
Leith and Upatnieks (1962) applied laser to holography
Holography is the synthesis of interference and diffraction
In recording a hologram, two waves interfere to form an
interference pattern on the recording medium.
When reconstructing the hologram, the reconstructing
wave is diffracted by the hologram.
53
Holography History
When looking at the reconstruction of a 3-D object, it
is like looking at the real object
By means of holography an original wave field can
be reconstructed at a later time at a different location
This technique has many applications; we
concentrate on holographic interferometry
A photograph tells more than a thousand words and
a hologram tells more than a thousand photographs
54
Holography Advantages
Conventional Photography:
2-d version of a 3-d scene
Photograph lacks depth perception or parallax
Film sensitive only to radiant energy
Phase relation (i.e. interference) are lost
55
Holography Advantages
Holographic Photography:
Freezes the intricate wavefront of light that carries all
the visual information of the scene
To view a hologram, the wavefront is reconstructed
View what we would have seen if present at the
original scene through the hologram window
Provides depth perception and parallax
56
Holography Advantages
Holographic Photography:
Converts phase into amplitude information (in-phase
= max amp, out-of-phase = min amp)
Interfere wavefront of light from a scene with
reference wave
The hologram is a complex interference pattern of
microscopically spaced fringes
“holos” – Greek for whole message
57
Holography Recording
Laser beam is split in 2
1 wave illuminates the object
The object scatters the light
onto the hologram plate
(object wave)
The other wave is reflected directly onto the hologram
plate. (reference wave) constitutes a uniform illumination
of the hologram plate
The hologram plate must be a light-sensitive medium,
e.g. a silver halide film plate with high resolution
58
Holography Recording
Let the object and
reference waves in the hologram
plane be described by the field
amplitudes uo and u.
These two waves will interfere
resulting in an intensity distribution
This intensity is allowed to blacken the hologram plate
Then it is removed and developed
This process is hologram recording
*uu u*u u u u u I oo
2
o
22
o ++++
59
Holography Recording
This hologram has a
transmittance t proportional to
intensity distribution
*uu u*u u u I t oo
2
o
2 +++
Replace the hologram back in the holder in
the same position
Block object wave and illuminate the hologram with the reference
wave (reconstruction wave) Ua which will be U multiplied by t
o
2
o
2
o
2
a uu (uu)*u u u u u u +++ t
60
Holography Reconstruction
The quantity IuI2 is constant –
uniform light and the last term thus
becomes (apart from a constant)
identical to the original object
wave uo.
We are able to reconstruct the
object wave, maintaining its
original phase and relative
amplitude distribution uo
by looking through the hologram, object can be seen in 3D
even though the physical object has been removed
Therefore this reconstructed wave is also called the virtual
wave
61
Direct wave: corresponds to zeroth order grating
diffraction pattern
Object wave: gives virtual image of the object
(reconstructs object wavefront) – first order diffraction
Conjugate wave: conjugate point, real image (not
useful since image is inside-out) – negative first order
diffraction
In general, we wish to view only the object wave – the
other waves just confuse the issue
Hologram Reconstruction
62
Virtual image
Real image
-z z
Direct wave
Object
wave
Conjugate
wave
z=0
Reference wave
Hologram Reconstruction
63
Virtual imageReal image
Direct wave
Object
wave
Conjugate
wave
Reference wave
Use an off-axis system to record the hologram, ensuring separation of the
three waves on reconstruction
Hologram Reconstruction
64
Holography Reconstruction
Alternative method of recording
Fewer components hence more stable
Can you spot the difference …………..
65
Transmission hologram: reference and object waves
traverse the film from the same side
Reflection hologram: reference and object waves traverse
the emulsion from opposite sides
Hologram
View in Transmission View in reflection
Reflection vs. Transmission
66
Hologram - Transmission
67
Hologram - Reflection
68
Hologram: Wavelength
With a different color, the virtual image will appear at a
different angle – (i.e. as a grating, the hologram disperses
light of different wavelengths at different angles)
Volume hologram: emulsion thickness >> fringe spacing
Can be used to reproduce images in their original
color when illuminated by white light.
Use multiple exposures of scene in three primary
colors (R,G,B)
69
Volume Hologram
Reconstruction wave must be
a duplication of the reference
wave
Reflection hologram can be
reconstructed in white light
giving images in their original
color
70
Hologram - Applications
Microscopy M = r/s
Increase magnification by viewing hologram with
longer wavelength
Produce hologram with x-ray laser, when viewed
with visible light M ~ 106
3-d images of microscopic objects – DNA, viruses
71
Hologram - Applications
Interferometry
Small changes in OPL can be measured by viewing
the direct image of the object and the holographic
image (interference pattern produce finges Δl)
E.g. stress points, wings of fruit fly in motion,
compression waves around a speeding bullet,
convection currents around a hot filament
72
Two waves reflected from two identical objects could
interfere
With the method of holography now at hand, we are
able to realize this by storing the wavefront scattered
from an object in a hologram.
We then can recreate this wavefront by hologram
reconstruction, where and when we choose.
Holographic Interferometry
73
For instance, we can let it interfere with the wave
scattered from the object in a deformed state.
This technique belongs to the field of holographic
interferometry
In the case of static deformations, the methods can be
grouped into two procedures, double-exposure and
real-time interferometry.
Holographic Interferometry
(Vest 1979; Erf 1974; Jones and Wykes 1989).
74
Double Exposure Interferometry
Two holograms of the object recorded in
same medium at different time instants
If conditions at the recordings different
→interference between the reconstructed
holographic images reveals deformations
simple to carry out
avoids the problem of
realignment
distortion minimized
compares only two time
instances
75
The observer sees any
deformation of the object
(in scale of λ) in real time
as interference between
the real object and the
holographic image of the
object at rest
Disadvantage is that the
hologram must be
replaced in its original
position with very high
accuracy
Real Time Interferometry
76
Holographic Interferograms
Deflection of a
rectangular plate
fastened with five
struts and subjected
to a uniform pressure
Detection of
debonded region of
a honeycomb
construction panel
A bullet in flight
observed through
a doubly-exposed
hologram
77
Make hologram of vibrating
object
Maximum vibration amplitude
should be limited to tens of
wavelengths
Illumination of hologram
yields image on which is
superimposed interference
fringes
Fringes are contour lines of
equal vibration amplitude
Holographic Vibration Analysis
78
Speckle Introduction
When looking at the laser light
scattered from a rough surface, one
sees a granular pattern
This so-called speckle pattern can
be regarded as a multiple wave
interference with random phases
Speckle is considered a mere
nuisance
But from the beginning of 1970
there were several reports from
experiments in which speckle was
exploited as a measuring tool.
79
Speckle Introduction
light is scattered from a
rough surface of height
variations greater than the .
In white light illumination,
this effect is scarcely
observable ???
Applying laser light,
however, gives the scattered
light a characteristic granular
appearance
80
Speckle Introduction
The probability density
function P, for the intensity in
a speckle pattern is given as
Where I is the mean intensity.
The intensity of a speckle
pattern thus obeys negative
exponential statistics
From this plot we see that the
most probable intensity value
is zero, that is, black.
81
Speckle Size
Objective speckle size
(without lens) is given by
Subjective speckle size (with
lens) is given by
Objective speckle size
Subjective speckle size
82
Laser speckle methods can be utilized in many ways; Speckle-
shearing enables direct measurements of displacement derivatives
related to strains
Speckle Interferometry
(Hung and Taylor 1973; Leendertz and Butters 1973).
The principle of speckle-
shearing (shearography) is
to bring the rays scattered
from one point of the object
into interference with rays
from neighboring point
83
This can be obtained in a speckle-shearing interferometric camera
where one half of the camera lens is covered by a thin glass wedge
In that way, the two images focused by each half of the lens are
laterally sheared
If the wedge is oriented to shear in the x, the rays from a point P(x,
y) on the object will interfere in the image plane with those from a
neighbouring point P(x+x, y)
The shearing x is proportional to the wedge angle
When the object is deformed there is a relative displacement
between the two points that produces a relative optical phase
change
Speckle Interferometry
84
For small shear angles x the equation can be
approximated to (k= 2/)
For out of plane measurement normal angle (=0) is
enough and the equation becomes
For both in plane and out of plane measurement that is
both u and w, we need to use different angle
Speckle Interferometry
85
Electronic Speckle Interferometry
86
Electronic Speckle Interferometry
(a) Out-of-plane displacement fringes (w)
and slope fringes (w/x) for a aluminium
plate loaded at the centre. x is 6 mm,
and w = 2.5 µm and
(b) Out-of-plane displacement fringe
pattern (w) and slope pattern (w/y) for
the same object. The shear y is 7 mm.
87
Speckle and Holography
Electronic shearography (ES) used for non-destructive
testing of a ceramic material.
(a) A vertical crack is clearly visualized by ES as a
fringe in the centre of the sample and
(b) The crack is not detected using TV holography
88
ESPI for NDT
GOOD part BAD part
Digital Shearography
Setup
Able to detect surface/subsurface
defects effectively and efficiently
To develop a non-destructive In-line
subsurface defects detection system
89
READY FOR IC FABRICATION PROCESS
RECYCLE
BIN
Defect?yes no
New process
Unpolished Silicon Wafers
Defect?no
RECYCLE
BIN
yesSilicon wafers
Patterned Wafer
Unpolished Silicon Wafers
Polishing(whole batch)
Polishing(good wafers only)
Conventional process
Estimated cost
savings more than
S$1million/year
for ISP
ESPI for NDT Application
90
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