Arterium Rejector Modules · 2020. 6. 19. · Arterium Rejector Modules • 303-544-9068 • 4775 Walnut St., Suite 102 • Boulder, CO 80301 We are constantly improving the performance

Applications

Features

Arterium Rejector Modules

www.kmlabs.com • 303-544-9068 • 4775 Walnut St., Suite 102 • Boulder, CO 80301 We are constantly improving the performance of our products.

Please check back with us or visit our website for the latest updates and specifications.

Steering EUV beams is most efficiently performed with grazing incidence optics. EUV light from high harmonic genereration co-propagates with the IR light used to create it. Ensuring IR light is removed is essential for nearly all applications. KMLabs offers a set of IR-rejecting beam steering modules, which both steer the EUV beam with high efficiency and remove IR radiation.

•Removal of IR from HHG driven EUV•High Efficiency in-vacuum EUV beam steering

Top View (Cross-section)

•6° Grazing angle (12° Beam deviation)•EUV Reflection Effciency up to 95%•IR Extinction >95%•High Vacuum Compatible•Zero-length module interconnection

Specifications

EUV Reflection Efficency (6° Grazing Angle) Up to 95%

IR Extinction >95%

Flange Fittings KF-40

Vacuum Rating High Vacuum

Footprint (Single Module) 7.0”(178mm) x 8.5”(216mm)

Beam Height 4.5” (114.3mm)

Height 6.75”(165mm)

Options•Water-cooled (No variable steering)•In-Vacuum motorized •Fixed (No vairable steering)•Plasma Cleaner•Coating optimization: •Long Wavelength •Short Wavelength

20 22 24 26 28 30 32 34 36 38 40Wavelength (nm)

80

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90

95

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Long Wavelength Rejector

10 12 14 16 18 20 22Wavelength (nm)

80

85

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95

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Short Wavelength Rejector

A standard rejection system consists of two Arterium Rejector Modules. The first is water-cooled, the second is motorized.