Documents 1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs M. Weinberg, J. Bernstein, S. Cho, A. T....

Slide 11 st MEMS Commercial Tuning Fork Gyroscope Draper Labs M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, A micromachined comb-drive…