YOU ARE DOWNLOADING DOCUMENT

Please tick the box to continue:

Transcript
Page 1: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Ultrahigh-Purity Gas FiltersSCF Series

Page 2: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency• Extremely low particle shedding • Faster moisture dry down• Low ΔP• Lower cost of ownership• Inline and surface mount

configurations

Page 3: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency– 99.9999999% @ 0.003µm at

maximum rated flow• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership• In-line and surface mount

configurations

Page 4: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency• Extremely low particle shedding

– Non-shedding during constant, pulse flow, high pressure differential, and impact test

– Extremely low outgassing– Low reactivity– Meets SEMASPEC #93021511A-

STD

• Faster moisture dry down• Low ΔP• Lower cost of ownership

Page 5: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down

– Dries faster– Holds less post purge moisture– Purges impurities faster

• Low ΔP• Withstands high differential

pressures • Lower cost of ownership

0.1

1

10

100

0 2 4 6 8 10 12 14 16

Hours

Moi

stur

e (p

pb)

3 ppb

CERAMIC

METALLIC

Moisture Dry-down

Page 6: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency• Extremely low particle shedding

Faster moisture dry down• Low ΔP

– Higher flow than much larger PTFE metallic filters.

– Has lower pressure drops than metallic and PTFE filters

• Lower cost of ownership• In-line and surface mount

configurations

0123456789

10

0 10 20 30 40 50 60 70 80 90 100

Nitrogen Flow in SLPM

Pres

sure

Dro

p in

PSI

D

1 bar2 bar

3 bar

Page 7: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Performance Features

• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership

– Reduce downtime– Reduce gas costs– Reduce maintenance– Reduce inventory– Competitive price

• In-line and surface mount configurations

Page 8: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

SCF Series FiltersProduct Line

Page 9: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Product Line

Inline Filters– Max. flow rates:

• 30, 225, 600, 900 and 2700 std L/min.

– End connections• ¼, ½, ¾ inch integral male

VCR and ¼ inch female VCR face seal fittings

– Lengths:• 3.31, 5.00, 11.22 in. (84.1,

127,and 285 mm)

Page 10: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Product Line

Modular surface mount filters– Max. Flow rates:

• 7, 30, 100 std L/min.

– Surface mount design• SEMI PR3.1 compliant• Gaskets: C-rings and

spring energized C-ring• Compatible with Swagelok

IGC™ll integrated gas system

Page 11: Ultrahigh-Purity Gas Filters

© 2003 Swagelok Company

Ultrahigh-Purity FiltersSCF Series


Related Documents