Koc University Hakan Ürey

Koç University – Istanbul

Director of OML - Optical Microsystems Laboratory

Electrical Engineering Department

5mm

1mm2 Microlens Array on 2D MEMS Stage (2009)

Micro Spectrometers and Laser Scanners on Silicon

Wafer

Koc University

Koç University, Istanbul, Turkey •  Private University established by Vehbi Koç Foundation

in 1993 •  Among the World's top 250 universities by THE (Times

Higher Education) rankings in 2012-2013. •  ~4,000 undergraduate and ~500 graduate students

(>300 international exchange students); •  Among the top Universities in Turkey based on scholarly

research articles and faculty awards

Koc University Prof. Dr. Hakan Ürey Dr. Necmettin Kilinc

Sven Holmström (Sr. Res. Eng.) Erhan Ermek (Res. Eng.)

Berker Hüsam (Res. Eng.) Selim Ölçer (Tech.)

Research Focus: •  MEMS/NEMS sensors and actuators, Micro-optics,

• 2D/3D Display and Imaging Systems

Graduate Students Kaan Aksit

Aref Mostafazadeh Ulas Adiyan

Onur Cakmak Osman Eldeş

Kivanc Hedili Basarbatu Can Ziya Isıksacan

Özgecan Karabulut Uğur Aygün

Koc University Selected Patents

Koc University Awards and Invited Presentations

Koc University Projects

Funding -Industrial •  Microvision, Aselsan,

Fraunhofer IPMS, OPET, Inventram

EC Projects •  FP6 Networks (NEMO,

3DTV, MINOS) •  FP7 STREP projects

(MEMFIS, HELIUM3D) •  FP7 IAPP Project •  FET-Open Project

TÜBİTAK (National Funding) •  5 projects completed •  2 projects on-going

•  3D displays (3D laser TV, 3D head-worn projection displays, 3D light-field display using LED arrays);

•  Pico-projectors and Laser scanners (high-performance electromagnetic, electrostatic, and piezoelectric actuated record-performance MEMS scanners; FR4 based dynamic zoom barcode scanner);

•  Micro-optics (exit pupil expanders, heads-up-display screens, Gabor super lenses);

•  Endoscopic imaging (Microlens on MEMS stage based laser scanner);

•  Portable Micro-Spectrometer (MEMS-based Fourier transform infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers);

•  Thermal imaging (MEMS bimaterial sensor array; CMOS optical readout IC; 3D CMOS integration);

•  Portable Nano-Biosensor (MEMS sensor array for parallel multi-analyte screening for portable point of care diagnostics).

Koc University

Patent Licensing Agreements (consists a portfolio of about 25 patents)

•  Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel micro-optical screen.

•  Fraunhofer IPMS (DE): MEMS spectrometers

•  Aselsan Inc. (TR): Thermal imaging sensor array

•  Inventram Inc. (TR): Biosensors for point-of-care diagnostics of multiple diseases.

•  Opet Inc. (TR): Tagging and identification of functional fluids for vehicles

Koc University

MEMS SCANNERS AND PICO-PROJECTOR APPLICATIONS

Koc University

1st Laser Scanning Display Product NOMAD à 2004

Red monochrome display with SVGA resolution Blue and green lasers were not yet commercial

(direct green LD is available only recently)

Koc University Pico Projectors (Sponsor Microvision Inc.)

•  Optics and MEMS scanners for laser projectors

–  >10 patents licensed to industry; –  Sponsor: Microvision (USA)

1st  Pico  Projector  product  by  Microvision  -­‐  2009

Latest  Pico-­‐projector  product  by  Microvision  -­‐2011

Koc University MEMS Scanners

MEMS  scanners  for  pico-­‐projectors  and  MEMS  

spectrometers  on  Si  wafer.

•  Single coil bimagnetic actuation •  WVGA Resolution 850 x 480 pixels

Yalcinkaya  et.al.  JMEMS,2006  

•  300um Silicon wafer •  Structure formed with DRIE •  Front Side:

•  Electroplated multi-turn coils •  PZR sensors on both flexures •  Al mirror

•  Backside KOH etched to reduce weight

Koc University Piezoelectric  Actuated  Fast-­‐Axis  Scanner  

•  1.4mm  round  mirror,    •  24V  opera=on.  •  40deg  op=cal  scan  angle  •  40kHz  resonance,  •  Also  demonstrated  PZT  

angle  sensor.  Record  Performance!    

Baran  et.al.  IEEE  MEMS  Conference,  2012  

Collabora=on  with  Paul  Muralt  Group,  EPFL  

•  125um  SOI  •  PZT:  2um  solgel  deposi=on  

Desired Mode

Koc University

Resonant MEMS Scanner Comparison for Dynamic Displays at 60 fps

=Dis

play

Hor

izon

tal

Res

olut

ion

=Display Vertical Resolution

•  Record performance obtained •  Piezo and EM actuation preferred •  Future Goal: Full HD resolution capable fast and slow axis scanners

Koc University Ice Hockey Using PicoP, Camera, and Retros

Koc University

SCREEN TECHNOLOGIES FOR NOVEL DISPLAYS

Koc University

Another Application of See-Through Screen Windshield Embedded HUD

PicoP

projector

Built into windshield

Requires varying pitch and varying tilt angle microlenses in 2D array form to form a large eyebox

Koc University

Koc University

Demo in a car Camera focused on the screen

See-through Screens For HUDs (Sponsor: Microvision Inc.)

Koc University

M. Hedili, SPIE Photonics Europe Conf., April 2012

Transparent displays using embedded lenses

Partially reflective coating

Viewing window

Cover glass

Epoxy

Thin metal dielectric mirror as the reflective surface and a narrow band-pass filter

Koc University

Novel See-Through Screen and Transparent Display Concept

Koc University Novel 3D Displays Using Pico-Projectors

Auto-­‐stereoscopic  3D  Display

Mixed-­‐polarizaNon  Stereoscopic  3D  Display

Aksit et al, IEEE-JDT 2012

Koc University

3D Display PicoP Çalışması İle Kaan Akşit ve Osman Eldeş Ağustos 2012’de IMID Konferansında Merck Award Kazandılar

Koc University 3D Head-Worn Projection Display and Retro Screen

Hakan Urey, New Project Starting Jan 2013

Koc University 3D Laser TV

Sponsor: FP7, HELIUM3D project Completed in 2011 Partners: DMU, UCL, HHI, Philips, Barco, TuE

Koc University Exit Pupil Expanders for Head-Worn Displays

θ o FOV

Bi-axial MEMS

Scanner

Gaussian Beam from point

light source

Dlens

Diffractive Exit Pupil Expander (EPE) (NA expander)

Exit pupil

Ocular (viewing optics)

Viewer’s eye

Intermediate Image Plane

Expanded exit pupil

Koc University

FR4 BASED MICRO-OPTO-MECHATRONIC SYSTEMS

Koc University

FR4 as a Micro-Opto-Mechatronic Platform (using standard PCB technology)

FR4 Board with EM actuated scanners

Sponsors: Microvision Inc (USA) NEMO (EC FP6 project)

LED / Waveguide Integrated with FR4 Scanner

Koc University Barcode Reader with Extended Depth of Focus

First barcode reader system with dynamic

focusing ability! Result of 1.5 yrs

development together with NEST, India

1st Proto

Koc University

MEMS FT SPECTROMETER

Koc University Commonly  Used    Michelson  Configura5on  

LGI  Configura5on  

IR  Source

IR  Detector

Sample  Plane

ReferenceLaser

-­‐1st

0th

1stPD

MEMS  device

Ellipticreflectors

IR  Source

IR  Detector

Sample  Plane

Reference  Laser

PD

Ellipticreflector

Stationary  Mirror

Moving  Mirror

Beam  Splitter

Compensation  Plate

Lamellar Grating Interferometer (LGI) Based Fourier Transform Spectrometer Advantages

ü  LGI  eliminates  ü  reference  mirror  ü  beam  spliSer  ü  compansa=on  plate  ü  vacuum  packaging  of  MEMS  ü  interference  alignment  efforts    

ü  LGI  is  Achroma=c  ü  LGI  is  less  suscep=ble  to  vibra=on  noise  ü  LGI  is  smaller,  more  robust  and  easier  to  

assemble  X  LGI  useful  range  is  limited  by  Talbot  

distance  

Lamellar  Gra5ng  Interferometer  (LGI)  Advantages  over  Michelson  Interferometer:  

O.  Ferhanoglu  et  al.,  OpNcs  Express,  2009.  

Koc University MEMS LGI Device

•  Micro Fourier Transform Spectrometer –  Patent licensed to Fraunhofer – IPMS (Dresden, DE) –  Sponsor: FP7 / MEMFIS project Partners: Bruker, FhG-IPMS, VIGO, RHE, CTR, Sopra

MEMS Diffraction

Grating

Koc University

Transmission Spectra Comparison: Commercial Desktop FTIR vs. Our Compact FTIR

Achieved spectral resolution of 20-30cm-1 in 2.5um-16um range One of the best reported performance with MEMS spectrometers

Poor SNR at >3,000cm-1

Nearly all absorption peaks are resolved

Koc University

MOEMS UNCOOLED THERMAL IMAGING

Koc University MEMS Thermal Imaging

•  MEMS Thermal Imaging Sensor Array –  Patent pending –  Sponsor: ASELSAN (TR) –  Bimaterial bending due to IR hear –  Sensed using interferometric

optical readout •  Nano-Biosensor for POC diagnostics

–  Sponsor: TÜBİTAK

Infrared Camera Pixels50um

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Hermetic sealingby laser welding

Vacuum pipe

IR window (BaF2)

Package developed with VTT

Koc University

BIOSENSOR FOR POC DIAGNOSTICS

Koc University Portable Biosensor for POC Diagnostics

In-vitro multianalyte screening device –  Patent pending –  Sponsor: TÜBİTAK, Inventram –  Using MEMS and optical readout

Tested  MDC  <0.1  ng/ml;    Standard  ELISA  MDC  0.2ng/ml  

Robust portable system

Multiplexed detection 64 sensor parallel

readout PTL 2008; Biosensors and Bioelectronics 2010 and 2011 papers

Koc University Summary

Micro-optics and MEMS is a powerful combination with many applications: •  MEMS scanners and pico-projectors •  Special Augmented Reality (AR) screens •  3D displays •  Wearable displays •  FR4 as a micro-opto-mechatronic platform •  Spectrometers •  Thermal imaging •  Biosensors for multiplexed detection

Koc University Contact Details

Prof. Dr. Hakan Urey Koç University Electrical Engineering Sariyer, 34450 Istanbul – TURKEY

Office Phone: +90 212 338 1474 Lab Phone: +90 212 338-1772 E-mail: [email protected] Web: http://mems.ku.edu.tr