© 2003 Swagelok Company Ultrahigh-Purity Gas Filters SCF Series
Ultrahigh-Purity Gas Filters
Jan 10, 2016
Ultrahigh-Purity Gas Filters. SCF Series. Performance Features. High particle removal efficiency Extremely low particle shedding Faster moisture dry down Low ΔP Lower cost of ownership Inline and surface mount configurations. Performance Features. High particle removal efficiency - PowerPoint PPT Presentation
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© 2003 Swagelok Company
Ultrahigh-Purity Gas FiltersSCF Series
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding • Faster moisture dry down• Low ΔP• Lower cost of ownership• Inline and surface mount
configurations
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency– 99.9999999% @ 0.003µm at
maximum rated flow• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership• In-line and surface mount
configurations
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding
– Non-shedding during constant, pulse flow, high pressure differential, and impact test
– Extremely low outgassing– Low reactivity– Meets SEMASPEC #93021511A-
STD
• Faster moisture dry down• Low ΔP• Lower cost of ownership
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down
– Dries faster– Holds less post purge moisture– Purges impurities faster
• Low ΔP• Withstands high differential
pressures • Lower cost of ownership
0.1
1
10
100
0 2 4 6 8 10 12 14 16
Hours
Moi
stur
e (p
pb)
3 ppb
CERAMIC
METALLIC
Moisture Dry-down
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding
Faster moisture dry down• Low ΔP
– Higher flow than much larger PTFE metallic filters.
– Has lower pressure drops than metallic and PTFE filters
• Lower cost of ownership• In-line and surface mount
configurations
0123456789
10
0 10 20 30 40 50 60 70 80 90 100
Nitrogen Flow in SLPM
Pres
sure
Dro
p in
PSI
D
1 bar2 bar
3 bar
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership
– Reduce downtime– Reduce gas costs– Reduce maintenance– Reduce inventory– Competitive price
• In-line and surface mount configurations
© 2003 Swagelok Company
SCF Series FiltersProduct Line
© 2003 Swagelok Company
Product Line
Inline Filters– Max. flow rates:
• 30, 225, 600, 900 and 2700 std L/min.
– End connections• ¼, ½, ¾ inch integral male
VCR and ¼ inch female VCR face seal fittings
– Lengths:• 3.31, 5.00, 11.22 in. (84.1,
127,and 285 mm)
© 2003 Swagelok Company
Product Line
Modular surface mount filters– Max. Flow rates:
• 7, 30, 100 std L/min.
– Surface mount design• SEMI PR3.1 compliant• Gaskets: C-rings and
spring energized C-ring• Compatible with Swagelok
IGC™ll integrated gas system
© 2003 Swagelok Company
Ultrahigh-Purity FiltersSCF Series
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