Optical MEMS Laboratory - OML

Optical MEMS Laboratory - OMLProf. Dr. Hakan Ürey

Koç University, Electrical Engineering

RESEARCH AREAS•2D/3D Display and Imaging Systems•MEMS/NEMS sensors and actuators •Micro-optics and screen technologies •Optical system design

InfrastructureOML is well-equipped for electrical, optical, mechanical

design, test, and characterization

Office Area

Test Area

Measurement Cleanroom

Meeting Room

Test Area

InfrastructureOML is well-equipped for electrical, optical, mechanical

design, test, and characterization

Office Area Test Area

Measurement Cleanroom

FabricationCleanroom

Projects-Industrial Funding (>10 projects)• Microvision (USA, since 2002),

Aselsan (TR), Fraunhofer IPMS (DE), OPET (TR), Inventram (TR), Fotoniks (TR)

- EC Funded Projects (7 projects)• ERC-Advanced (2014-2019)• FP7 STREP projects (MEMFIS,

HELIUM3D)• FP7 IAPP Project• FP6 Networks (NEMO, 3DTV,

MINOS)

- TÜBİTAK (8 projects)• 5 projects completed• 3 projects on-going

• 3D displays (3D laser TV, wearable displays, head-worn projection displays);

• Pico-projectors and Laser scanners (world leader in MEMS scanners);

• Micro-optics (head-up-displays, exit pupil expanders); • MEMS Spectrometers (MEMS-based Fourier transform

infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers);

• Thermal imaging (MEMS based thermal detector array with optical readout; CMOS optical ROIC);

• Portable Nano-Biosensor (MEMS sensor array for multi-analyte screening for diagnostics applications).

Patents and Spin-Offs• Patent Licensing Agreements

(consists a portfolio of about 25 patents)– Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel

micro-optical screens– Fraunhofer IPMS (DE): MEMS spectrometers– Aselsan Inc. (TR): Thermal imaging sensor array– Inventram Inc. (TR): Biosensors for point-of-care diagnostics of

multiple diseases.– Opet Inc. (TR): Tagging and identification of functional fluids

• Spin-off companies from the lab– Tarabios (bio-tech)– Quantag (energy)

Wearable Displays Pico-projectors

3D Picop

Dynamic Pupil Tracker 3D HMPD

AR BidirectionalScreens

Multi-viewer 3D 3D Telepresence

OML Research on Emerging Display Tech., 3D, AR, and Human-Computer Interaction

Eyewear displays

OML Research on MEMS Laser Scanners for Displays and Imaging

Comb-drive

Innerflexure

Outerflexure

Outerframe

(Electrostatic MEMS) Arslan, JMEMS, 2010

(Piezoelectric, MEMS) Baran, JMEMS, 2012

(Thin Film Magnetic, FR4) Yalcinkaya, Sens&Act:A, 2007

(Electromagnetic, MEMS) Yalcinkaya, JMEMS, 2006

(Microlens array on 2D MEMS Stage Gokce, JMEMS, 2010

(Rotary Electrostatic, MEMS) Baran, JMEMS, 2012

(Integrated Electromagnetic, FR4) Isikman, Phot. Tech. Lett., 2009

Biosensors for POC Diagnostics: Immunosassay, Viscosity & Coagulation Tests

Cakmak et al, Methods, 2013

Coil for magneticactuation

Phas

e an

dAm

plitu

dere

ad-o

ut

SignalGenerator

CurrentAmplifier

Lock

-in A

mpl

ifier

150um

Oscillating Cantilever

Ni

SiLaserSpot

Optical Read-outREADER

CARTRIDGE

Cartridge

MEMS Chip

Reader

Freq

uenc

y Sh

ift [p

pm]

1

10

100

1000

10000

0,01 0,1 1 10 100Concentration [ng/ml]

Hep A Antigen 1Hep A Antigen 2

Hep C Negative Control

Hep C Antigen

Hep A Negative Control

Virus Detection

Timurdogan et al, Biosens & Bioelec, 2011

Coagulation Measurement

Thermal Imaging Using Thermo-Mechanical Pixels and Optical Readout

Sensor Input

1st order

0th o

rder

MEMS/CMOS IntegrationArray (35um and 50um pixel sizes)

Single pixel

100 200 300 400 500 600 700 800 900 1000

100

200

300

400

500

600

700

Image and video acquisitionusing discrete optics

OML Research on MEMS FT Spectrometers

70µm

217µm

438µm

585µm

658µm -

3µm

Comb actuators on the springs

Grating fingers

70µ 217µ 364µ 511µ 658µ

fRES =462HzIR Source

IR Detector

Sample Plane

ReferenceLaser

-1st0th

1stPD

MEMS device

Ellipticreflectors

Ataman, JMM, 2006 - Seren, JMEMS, 2012 - Ferhanoglu, Opt. Exp., 2010

FP7-Strep Project: MEMFISPartners: Bruker, KOC, FhG-IPMS, VIGO, SOPRALAB, CTR, Teknikon

Summary• We’re open to collaboration in photonics, MEMS, and human-

computer interaction related projects• Photonics KET2014, suitable topics:

– Biophotonics for screening of diseases– Sensing for safety and security

• FET-Open projects• You can visit our lab today (Eng Z16)

Contact: Prof. Dr. Hakan UreyE-mail: hurey@ku.edu.tr Group Web Site: http://mems.ku.edu.tr