GORE Bulk High Purity · GORE ® Bulk High Purity Chemical Filters For Semiconductor and microelectronicS Grade chemicalS Series HCIEM Hydrophilic 0.1µm | 0.05µm | 0.03µm A Length

GORE® Bulk High Purity Chemical Filters

Series HCIEMHydrophilic

0.1µm | 0.05µm | 0.03µm

The Standard of Performance and Productivity

Performance Features and Benefits • Hydrophilic PTFE membrane

Eliminate the need to pre-wet the filter Eliminate de-wetting in applications with off-gassing

• Excellent Particle Capture Unique structural characteristics ideal for high purity filtration Achieve desired retention and high flow capacity

• High Flow Rate Upgrade retention without capital expenditure Decrease package fill times and increase production capacity Reduce costs with fewer filters purchased

• Quality assured 100% Integrity Tested Clean room manufacturing environment ISO9001:2000 Certified Benefits realized may vary with existing process conditions and capabilities.

Pores

Liquid flow

Conventional Filtration Membrane

GORE® Filters make it possible to get the best combination of flow and retention

GORE™ Filtration MembraneSmall pores to enable

higher retentionIncreased open porous area

for higher flow

Filter media

This unique membrane technology helps:• Improve product quality without capital expenditure

• Increase process capacity with faster fill times and higher throughput

• Reduce cost of ownership with fewer filters required

Ideal Applications:

• High throughput chemical filling and packaging systems

• High-turnover recirculation filter systems

Products:

• High purity electronic-grade chemicals

• Aqueous and other higher surface tension chemicals; BOE

• Dilute acids and bases, aqueous specialty blends

• High viscosity fluids

Gore is the world leader in polytetrafluoroethylene (PTFE) membrane technology. Our advanced filter technology offers a significant improvement in performance with the combination of

high flow and retention, compared to other filter technologies.

DescriptionHigh flow, high retention, hydrophilic PTFE membrane in a polypropylene (PP) cartridge

Improve Performance with Advanced Membrane Technology The unique PTFE membrane in GORE® Bulk High Purity Chemical Filters enables exceptional performance in high purity electronic-grade chemical processing applications. Compared to convention-al filtration media, this advanced membrane provides significantly more open porous area for increased fluid flow while its structural characteristics enable a high level of retention. Available exclu-sively through Gore, these filters exceed the combined flow and retention performance of any other filters on the market today.

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

Series HCIEMHydrophilic

0.1µm | 0.05µm | 0.03µm

Estimated Flow Performance for a 20-inch Filter with 1 cP Liquid

Estimated Flow Performance for a 30-inch Filter with 1 cP Liquid

Performance DataEstimated Flow Performance for a 10-inch Filter with 1 cP Liquid

Materials of Construction Series ........................................ HCIEM

Retention Rating ...................... 0.1µm, 0.05µm, 0.03µm

Filter Membrane ....................... Hydrophilic polytetrafluoroethylene (PTFE)

Support and Drainage Layers .... Polypropylene (PP)

Core, Cage, and End Caps .......... Polypropylene (PP)

Sealing Method ......................... Thermal Bond, no resins or binders

Cartridge Configuration Cartridge Adaptor ..................... 222 and 226 double O-ring styles

O-ring Options .......................... Standard: TEFLON® encapsulated VITON® Optional: TEFLON® encapsulated Silicone, EPDM Others available upon request

Maximum Operating Conditions Maximum Operating Temperature . 60°C (140°F)

Maximum Forward Differential Pressure..................... 5.5 bar (80 psi) @ 25°C (77°F)

2.1 bar (30 psi) @ 60°C (140°F)

Maximum Reverse Differential Pressure..................... 3.4 bar (50 psi) @ 25°C (77°F)

Please consult with your local Gore representative for sizing recommendations for higher viscosity fluids.

Liquid Flow Rate (L/min) per 10" Filter - 1cP

Dif

fere

ntia

l Pre

ssur

e (b

ar)

Dif

fere

ntia

l Pre

ssur

e (p

si)

Liquid Flow Rate (gpm)

7

6

5

4

3

2

1

0

0.5

0.4

0.3

0.2

0.1

00 10 20 30 40 50

0.1µm0.05µm0.03µm

Dif

fere

ntia

l Pre

ssur

e (p

si)

Liquid Flow Rate (L/min) per 30" Filter - 1cP

Dif

fere

ntia

l Pre

ssur

e (b

ar) 7

6

5

4

3

2

1

0

0.5

0.4

0.3

0.2

0.1

00 20 40 60 80 100 120

0.1µm0.05µm0.03µm

Please consult with your local Gore representative for sizing recommendations for higher viscosity fluids.

Liquid Flow Rate (L/min) per 20" Filter - 1cP

Dif

fere

ntia

l Pre

ssur

e (b

ar)

Dif

fere

ntia

l Pre

ssur

e (p

si)

Liquid Flow Rate (gpm)

Liquid Flow Rate (gpm)

7

6

5

4

3

2

1

0

0.5

0.4

0.3

0.2

0.1

00 20 40 60 80 100

0.1µm0.05µm0.03µm

Please consult with your local Gore representative for sizing recommendations for higher viscosity fluids.

0 5 10

0 5 10 15 20 25

0 5 10 15 20 25 30

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

Series HCIEMHydrophilic

0.1µm | 0.05µm | 0.03µm

A Length 10-inch: 274 mm (10.8 in.) B Length 10-inch: 259 mm (10.2 in.) C Diameter: 69 mm (2.7 in.)

20-inch: 521 mm (20.5 in.) 20-inch: 505 mm (19.9 in.)

30-inch: 765 mm (30.1 in.) 30-inch: 749 mm (29.5 in.)

Please contact Gore for dimensions of finned configuration.

Cartridge Dimensions

AB

C

Example:

Part Numbers | Ordering InformationTo order, select from the columns in this table.

HCIEM 0100 300 2FL TV 000

product family rating length configuration o-ring option

HCIEM 0100 0.1µm 100 10-inch 2FL 222 Flat TV TEFLON® encapsulated VITON® 000 0050 0.05µm 200 20-inch 2FN 222 Finned TS TEFLON® encapsulated Silicone 0030 0.03µm 300 30-inch 6FL 226 Flat EP EPDM 6FN 226 Finned 00 None

The Science Behind GORE® Filters Polytetrafluoroethylene (PTFE) is the ideal choice for microfiltration media, because it is thermally and chemically resistant, mechanically strong, non-shedding and chemically inert. Engineered using Gore’s unique membrane technology, GORE® Bulk High Purity Chemical Filters provide several times the flow rate with equal or better retention than conventional filters. Gore’s advanced PTFE microfiltra-tion membranes have more pores in any given area, which results in a high flow rate. At the same time, the small pore size ensures consistently high retention rates.

The Gore Advantage W. L. Gore & Associates, founded in 1958, creates innovative, technology-driven solutions such as high-performance GORE-TEX® fabrics, medical devices that treat aneurysms, and electronic cables used in space exploration. Gore products have set new standards for reliability and performance in the consumer, industrial, electronic, medical and surgical markets.

For more than 30 years, Gore has supplied reliable, chemically inert, exceptionally pure PTFE-based products for microelectronics fabrication and process equipment. Gore’s most advanced PTFE membranes are only available in GORE® Filters for ultra high purity liquid microfiltration.

Gore’s advanced PTFE microfiltration membrane

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

GORE® Filters Redefining Filtration Performance

Contact Us Gore has sales offices and plants throughout the world. For detailed selection criteria, technical assistance or installation guidelines, please contact your local Gore representative:

China +86.21.5172.8299Germany +49.89.4612.2389Japan +81.3.6746.2572 Singapore +65.6.733.2882

South Korea +82.2.393.3411 Taiwan +886.2.2173.7799 United States +1.410.392.3200

The GORE® Filters’ quality system is certified according to ISO9001:2008 standards.

FOR MICROELECTRONICS USE ONLY. Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.

The information provided is based on Gore’s previous experiences and/or test results. Gore gives this information to the best of its knowledge, but assumes no legal responsibility. Customers are asked to check the suitability and performance of the product in their specific applications. This information is subject to change and is not to be used for specification purposes. Gore’s terms and conditions of sale apply to the sale of the products by Gore.

GORE, GORE-TEX and designs are trademarks of W. L. Gore & Associates. TEFLON and VITON are registered trademarks of DuPont.

© 2012-2014 W. L. Gore & Associates, Inc. All rights reserved. Printed in USA.

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201 Airport Road • Elkton, MD 21921 • USAPhone: +1.410.392.3200 • Toll-Free (US): +1.800.542.3146 Email: [email protected]

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